Metal-sensitive diaphragm fiber optic Fabry-perot pressure sensor with temperature compensation
doi: 10.37188/CO.EN-2025-0021
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摘要:
本文针对油气井、发动机燃油系统和航空液压系统等高温密闭环境下压力监测的技术难题，研发了一种具有温度补偿的金属膜片式光纤压力传感器。该传感器采用金属敏感膜片与蓝宝石晶片构成温度-压力双法珀（Fabry-Perot, FP）干涉腔结构，并结合互相关信号解调算法与温度解耦方法，有效降低温度串扰对压力测试的影响。实验结果表明，该传感器在常温和300 °C的压力测量中最大非线性误差分别为0.75% FS和0.99% FS。经过温度解耦后，压力测量精度可达1.7% FS。该传感器具有良好的静态压力响应、稳定性和可靠性，为高温压力监测场景提供了一种有效的解决方案。
Abstract:A metal-sensitive diaphragm fiber optic pressure sensor with temperature compensation is developed for pressure monitoring in high-temperature environments, such as engine fuel systems, oil and gas wells, and aviation hydraulic systems. The sensor combines a metal-sensitive diaphragm and a sapphire wafer to form a temperature-pressure dual Fabry-Perot (FP) interference cavity. A cross-correlation signal demodulation algorithm and a temperature decoupling method are utilized to reduce the influence of temperature crosstalk on pressure measurement. Experimental results show that the maximum nonlinear error of the sensor pressure measurement is 0.75% full scale (FS) and 0.99% FS at room temperature and 300 °C, respectively, in a pressure range of 0−10 MPa and 0−1.5 MPa. The sensor’s pressure measurement accuracy is 1.7% FS when using the temperature decoupling method. The sensor exhibits good static pressure characteristics, stability, and reliability, providing an effective solution for high-temperature pressure monitoring applications.
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Figure 1. Schematic diagram of sensor structure. (a) Schematic diagram of sensor sensitive unit(MMF: Multimode Fiber). (b) Schematic diagram of multi-beam interference. (c) Deformation diagram of sensitive diaphragm
Figure 2. Diagram of numerical simulation. (a) Relationship between sensitivity and diaphragm size. (b) Relationship between maximum stress and diaphragm size
Figure 3. Finite element simulation diagram. (a) Stress distribution cloud map. (b) Displacement distribution cloud map
Figure 7. Sensor static pressure test results at room temperature. (a) Repeated tests fit curves. (b) Pressure boost and pressure drop curve at normal temperature
Figure 8. High-temperature experiment. (a) Schematic diagram of sensor demodulation system. (b) Temperature-pressure composite experimental system
Figure 9. Temperature calibration experiment. (a) Temperature curve. (b) Stability test curve
Figure 10. (a) Pressure response at different temperatures. (b) Temperature measurement curve. (c) Initial cavity length at different temperatures. (d) Sensitivity fitting curve
Table 1. Structural parameters of the metal-sensitive diaphragm
Parameters Symbol Value Diaphragm radius/mm r 4 Diaphragm thickness/mm h 0.5 Sensor pressure range/MPa P 0~10 Sensitivity/(μm·MPa−1) S 0.322 Diaphragm yield stress/MPa σ 170 
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