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光纤端头Fizeau腔超快压力传感器及其在高功率激光诱导等离子体冲击波测试中的应用

王俊杰 朱亚凯 刘彦鹏 王淏 贺达 姚磊磊 张普

王俊杰, 朱亚凯, 刘彦鹏, 王淏, 贺达, 姚磊磊, 张普. 光纤端头Fizeau腔超快压力传感器及其在高功率激光诱导等离子体冲击波测试中的应用[J]. 中国光学(中英文). doi: 10.3724/CO.2026-0095
引用本文: 王俊杰, 朱亚凯, 刘彦鹏, 王淏, 贺达, 姚磊磊, 张普. 光纤端头Fizeau腔超快压力传感器及其在高功率激光诱导等离子体冲击波测试中的应用[J]. 中国光学(中英文). doi: 10.3724/CO.2026-0095
WANG Jun-jie, ZHU Ya-Kai, LIU Yan-peng, WANG Hao, HE Da, YAO Lei-lei, ZHANG Pu. Ultrafast pressure sensor based on optical fiber tip fizeau cavity and its application in testing of high-power laser-induced plasma shock waves[J]. Chinese Optics. doi: 10.3724/CO.2026-0095
Citation: WANG Jun-jie, ZHU Ya-Kai, LIU Yan-peng, WANG Hao, HE Da, YAO Lei-lei, ZHANG Pu. Ultrafast pressure sensor based on optical fiber tip fizeau cavity and its application in testing of high-power laser-induced plasma shock waves[J]. Chinese Optics. doi: 10.3724/CO.2026-0095

光纤端头Fizeau腔超快压力传感器及其在高功率激光诱导等离子体冲击波测试中的应用

cstr: 32171.14.CO.2026-0095
基金项目: xxx
详细信息
    作者简介:

    王俊杰(1971—),男,山西代县人,通信作者,2001年于北京理工大学获得机械电子工程专业博士学位,现为武汉理工大学光纤传感技术与网络国家工程研究中心教授,主要研究方向为:高频响光纤F-P腔压力传感器及其在军工动态测试技术中的应用。E-mail:wjj-whut@foxmail.com

    通讯作者:

    E-mail:wangjj@whut.edu.cn

  • 中图分类号: TH741

Ultrafast pressure sensor based on optical fiber tip fizeau cavity and its application in testing of high-power laser-induced plasma shock waves

Funds: xxx
More Information
    Author Bio:

    Wang JunJie (1996—), male, native of Dai County, Shanxi Province, corresponding author received his Ph.D. in Mechanical and Electronic Engineering from Beijing Institute of Technology in 2001. He is currently a professor at the National Engineering Research Center for Fiber Optic Sensing Technology and Networks of Wuhan University of Technology. His main research interests are: High-frequency response fiber optic F-P cavity pressure sensors and their applications in military dynamic testing technology. E-mail: wjj-whut@foxmail.com

    Corresponding author: wangjj@whut.edu.cn
  • 摘要:

    针对351 nm深紫外强激光诱导不锈钢金属产生等离子体冲击波动力学特性的研究中,迫切需要一种响应时间小于50 ns的超快动态压力传感器。为此本文阐述了一种制作在光纤端头基于Fizeau腔的超微型超快空气激波压力传感器。采用活塞式压力计和空气激波管,对该激波压力测试系统进行了静态和动态定标实验。当高速光电探测器的响应时间为8 nS、谐振频率点为20 MHz时,在2.4 MPa压力量程范围内,空气激波压力传感系统的定标结果为:线性度1.09% FS、重复性1.046% FS、回程误差1.117% FS、基本误差3.253% FS,动态响应时间小于50 nS。实测实验,该传感系统完美测取到351 nm深紫外强激光诱导不锈钢产生等离子体冲击压力波。据我所知,这是第一次利用冲击波压力传感器测取到高功率激光诱导不锈钢金属产生的超快等离子体冲击压力波。最后,指出该超快动态压力传感器潜在的应用方向。

     

  • 图 1  全石英光纤Fizeau腔及其力学分析简图

    Figure 1.  Schematic diagram of the all-silica fiber Fizeau cavity and its mechanical analysis

    图 2  传感器实物图.(a)Fizeau腔光学显微镜照片(x500);(b)空气冲击波压力封装探头

    Figure 2.  Physical photo of the sensor . (a) Optical microscope photo(x500) for the Fizeau cavity; (b) Packaged air shock-wave pressure probe

    图 3  探测器性能测试数据.(a)时域响应上升时间测试曲线;(b)频域谐振带宽测试曲线

    Figure 3.  Detector performance test data. (a)Time-domain response rise time test curve;(b) Frequency domain resonance bandwidth test curve

    图 4  Fizeau腔压力探针静态定标实验数据

    Figure 4.  Static pressure calibrated data for the Fizeau cavity probe

    图 5  光纤Fizeau腔端面照片

    Figure 5.  Photograph of the optical fiber Fizeau cavity end face

    图 6  激波管动态定标实验测定传感器响应时间实验曲线。(a)激波管峰值压力测定实验曲线;(b) ,(c)激波管响应输出分别达到平台峰值压力10%和90%的坐标点测试曲线;

    Figure 6.  Shock tube dynamic calibration experiment curve for determining sensor response time. (a) Shock tube peak pressure measurement experiment curve; (b),(c) Test curve of the coordinate point where the shock tube response output reaches 10% and 90% of the plateau peak pressure, respectively.

    图 7  高灵敏度、低量程实测传感器静态定标曲线

    Figure 7.  Static calibration curve of high-sensitivity, low-range measured sensor

    图 9  中量程实测传感器静态定标曲线

    Figure 9.  Static calibration curve of medium-range measured sensor

    图 8  深紫外激光诱导不锈钢金属产生低压等离子体冲击波实测曲线

    Figure 8.  Measured curve of low-pressure plasma shock waves generated on stainless steel induced by deep-ultraviolet laser

    图 10  深紫外激光诱导不锈钢金属产生的中压等离子体冲击波实测曲线。(a)、(b)和(c)为不同能量激励下的三发数据

    Figure 10.  Measured curve of medium-pressure plasma shock waves generated on stainless steel induced by deep-ultraviolet laser. (a),(b) and (c) are three sets of data under different energy excitations.

  • [1] Endevco®. Piezoresistive pressure transducer: 8530C-100[R]. Endevco®. (查阅网上资料, 未找到对应的出版地及年份信息, 请确认补充).
    [2] Endevco®. Piezoresistive pressure transducer: model 8530BM37-2000[R]. Endevco®. (查阅网上资料, 未找到对应的出版地及年份信息, 请确认补充).
    [3] PCB Piezotronics. High frequency ICP® pressure sensor: model 113B27[R]. Walden Avenue Depew: PCB Piezotronics. (查阅网上资料, 未找到对应的年份信息, 请确认补充).
    [4] PCB Piezotronics. High frequency ICP® pressure sensor: model 113B22[R]. Walden Avenue Depew: PCB Piezotronics. (查阅网上资料, 未找到对应的年份信息, 请确认补充).
    [5] 廖延彪, 苑立波, 田芊. 中国光纤传感40年[J]. 光学学报, 2018, 38(3): 0328001. doi: 10.3788/AOS201838.0328001

    LIAO Y B, YUAN L B, TIAN Q. The 40 years of optical fiber sensors in China[J]. Acta Optica Sinica, 2018, 38(3): 0328001. (in Chinese). doi: 10.3788/AOS201838.0328001
    [6] RAO Y J, JACKSON D A, JONES R, et al. Development of prototype fiber-optic-based Fizeau pressure sensors with temperature compensation and signal recovery by coherence reading[J]. Journal of Lightwave Technology, 1994, 12(9): 1685-1695. doi: 10.1109/50.320953
    [7] MACPHERSON W N, GANDER M J, BARTON J S, et al. Blast-pressure measurement with a high-bandwidth fibre optic pressure sensor[J]. Measurement Science and Technology, 2000, 11(2): 95-102. doi: 10.1088/0957-0233/11/2/302
    [8] WATSON S, MACPHERSON W N, BARTON J S, et al. Investigation of shock waves in explosive blasts using fibre optic pressure sensors[J]. Measurement Science and Technology, 2006, 17: 1337-1342. doi: 10.1088/0957-0233/17/6/008
    [9] GANDER M J, MACPHERSON W N, BARTON J S, et al. Embedded micromachined fiber-optic Fabry-Perot pressure sensors in aerodynamics applications[J]. IEEE Sensors Journal, 2003, 3(1): 102-107. doi: 10.1109/JSEN.2003.810099
    [10] PARKES W, DJAKOV V, BARTON J S, et al. Design and fabrication of dielectric diaphragm pressure sensors for applications to shock wave measurement in air[J]. Journal of Micromechanics and Microengineering, 2007, 17(7): 1334-1342. doi: 10.1088/0960-1317/17/7/016
    [11] ZOU X T, WU N, TIAN Y, et al. Rapid miniature fiber optic pressure sensors for blast wave measurements[J]. Optics and Lasers in Engineering, 2013, 51(2): 134-139. doi: 10.1016/j.optlaseng.2012.09.001
    [12] WU N, ZOU X T, TIAN Y, et al. An ultra-fast fiber optic pressure sensor for blast event measurements[J]. Measurement Science and Technology, 2012, 23(5): 055102. doi: 10.1088/0957-0233/23/5/055102
    [13] WU N, WANG W H, TIAN Y, et al. Low-cost rapid miniature optical pressure sensors for blast wave measurements[J]. Optics Express, 2011, 19(11): 10797-10804. doi: 10.1364/OE.19.010797
    [14] WANG W H, WU N, TIAN Y, et al. Optical pressure/acoustic sensor with precise Fabry-Perot cavity length control using angle polished fiber[J]. Optics Express, 2009, 17(19): 16613-16618. doi: 10.1364/OE.17.016613
    [15] WATSON S, GANDER M J, MACPHERSON W N, et al. Laser-machined fibers as Fabry-Perot pressure sensors[J]. Applied Optics, 2006, 45(22): 5590-5596. doi: 10.1364/AO.45.005590
    [16] 殷建雄, 王军, 王昊星, 等. 用于冲击波测量的硅MEMS光纤法珀压力传感器[J]. 中国光学(中英文), 2025, 18(3): 452-459.

    YIN J X, WANG J, WANG H X, et al. Fiber-optic Fabry Perot pressure sensor for shock wave measurements based on silicon MEMS[J]. Chinese Optics, 2025, 18(3): 452-459. (in Chinese).
    [17] 王昭, 吴祖堂, 温广瑞, 等. 一种薄膜式的光纤压力传感技术[J]. 爆炸与冲击, 2019, 39(6): 064101. doi: 10.11883/bzycj-2018-0091

    WANG ZH, WU Z T, WEN G R, et al. A fiber optic pressure sensing technology based on thin diaphragm structure[J]. Explosion and Shock Waves, 2019, 39(6): 064101. (in Chinese). doi: 10.11883/bzycj-2018-0091
    [18] WANG ZH, WEN G R, WU Z T, et al. Fiber optic method for obtaining the peak reflected pressure of shock waves[J]. Optics Express, 2018, 26(12): 15199-15210. doi: 10.1364/OE.26.015199
    [19] ZILBERMAN S, BERKOVIC G, FEDOTOV-GEFEN A, et al. Shock wave diagnostics with an ultra-short optical fiber probe[J]. Journal of Applied Physics, 2022, 131(8): 085903. doi: 10.1063/5.0079204
    [20] CHU CH L, WANG J J, QIU J Y. Miniature high-frequency response, high- pressure -range dynamic pressure sensor based on all-silica optical fiber Fabry-perot cavity[J]. IEEE Sensors Journal, 2021, 21(12): 13296-13304. doi: 10.1109/JSEN.2021.3068456
    [21] 王俊杰, 刘劲, 傅正义, 等. 超微型全石英光纤Fizeau腔水下激波压力传感器[J]. 光学学报, 2019, 39(2): 0212010. doi: 10.3788/AOS201939.0212010

    WANG J J, LIU J, FU ZH Y, et al. Miniature underwater shock wave pressure sensor based on all-silica optical fiber Fizeau cavity[J]. Acta Optica Sinica, 2019, 39(2): 0212010. (in Chinese). doi: 10.3788/AOS201939.0212010
    [22] 王洪业. 传感器工程[M]. 长沙: 国防科技大学出版社, 1997: 148.

    WANG H Y. Transducer engineering[M]. Changsha: National University of Defense Technology Press, 1997: 148. (in Chinese).
    [23] MACPHERSON W N, KIDD S R, BARTON J S, et al. Phase demodulation in optical fibre Fabry-Perot sensors with inexact phase steps[J]. IEE Proceedings - Optoelectronics, 1997, 144(3): 130-133. doi: 10.1049/ip-opt:19971092
    [24] 国家质量监督检验检疫总局. JJG 860-2015 压力传感器(静态)检定规程[S]. 北京: 中国质检出版社, 2015.

    General Administration of Quality Supervision, Inspection and Quarantine. JJG 860-2015 Pressure transducer (static)[S]. Beijing: China Quality Inspection Press, 2015. (in Chinese).
    [25] 中华人民共和国国家质量监督检验检疫总局. JJG 624-2005 动态压力传感器检定规程[S]. 北京: 中国计量出版社, 2006.

    General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China. JJG 624-2005 Verification regulation of dynamic pressure transducers[S]. Beijing: China Metrology Publishing House, 2006. (in Chinese).
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  • 收稿日期:  2026-05-27
  • 录用日期:  2026-08-19
  • 网络出版日期:  2026-09-03

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