Differentiation of polarization scattering characteristics of surface nanoparticle defects

In order to distinguish between the two types of surface defects such as dust on the surface and bubble particles below the surface, and to obtain the applicable environmental range and optimal observation conditions of the method, we established and verified two polarization scattering models for surface defects based on Rayleigh scattering theory and a polarization bidirectional reflection distribution function. On this basis, the effects of the different defect environments and different observation conditions on the polarization scattering characteristics of the two surface defect particles were obtained through simulation analysis. The results show that by detecting the changing trend of the bidirectional reflection distribution function value of the p-polarized light incident on the surface with the scattering azimuth angle, we can distinguish between the two surface defects; no matter how the position of the bubble particles under the surface change, it will not affect the change of the trend. Different optical element surface materials, defect particle types, and defect particle size have certain effects on the polarization scattering models of the two surface defects, but the overall relationship remains unchanged. In order to distinguish between the two types of surface defects described in this article, the incident angle and the detection scattering angle are both 45° and an incident light with a smaller wavelength is used in an experiment.