Volume 14 Issue 1
Jan.  2021
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Chinese Optics  > 2021  >  14(1): 213-225.
CHANG Gai-yan, WANG Yu-heng, CHENG Guang-hua. Writing nanopores on a ZnS crystal with ultrafast Bessel beams[J]. Chinese Optics, 2021, 14(1): 213-225. doi: 10.37188/CO.2020-0101
Citation: CHANG Gai-yan, WANG Yu-heng, CHENG Guang-hua. Writing nanopores on a ZnS crystal with ultrafast Bessel beams[J]. Chinese Optics, 2021, 14(1): 213-225. doi: 10.37188/CO.2020-0101
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Writing nanopores on a ZnS crystal with ultrafast Bessel beams

  • 1.

    State Key Laboratory of Transient Optics and Photonics, Xi’an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi’an 710119, China

  • 2.

    University of Chinese Academy of Sciences, Beijing 100049, China

  • 3.

    Research Center of Semiconductor Lighting and Information Engineering Technology, South China University of Technology, Guangzhou 510641, China

  • 4.

    School of Electronics and Information, Center for Optical Imagery Analysis and Learning, Northwestern Polytechnical University, 710072 Xi’an, Shaanxi

Funds:  Supported by National Key Research and Development Program (No. 2018YFB1107401); National Natural Science Foundation of China (No. 61775236)
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  • Author Bio:

    Chang Gaiyan (1992—), female, born in Qingyang City, Gansu Province. She is a master degree candidate of the University of Chinese Academy of Sciences. She is mainly engaged in the research of ultra-fast laser micro-nano machining mechanism and application. E-mail: gaiyanchang@163.com

    Cheng Guanghua (1976—), male, bore in Ankang City, Shaanxi province. He is a professor, doctoral supervisor and the visiting professor of CNRS Hubert Curie Laboratory. He is mainly engaged in the scientific research and talent training in ultrashort pulse laser technique, ultrashort laser-material interaction, femtosecond laser micro-nano machining technique and other fields. E-mail: guanghuacheng@nwpu.edu.cn

  • Corresponding author: guanghuacheng@nwpu.edu.cn
  • Received Date: 08 Jun 2020
  • Rev Recd Date: 22 Jun 2020
    • Available Online: 10 Sep 2020
  • Publish Date: 25 Jan 2021
    Abstract
  • Zinc sulfide (ZnS) crystal is one of the important materials used to make the wide-spectrum infrared window. The ultrafast laser technology for manufacturing the nanopores with high aspect ratio provides an important approach to fabricate the photonic devices such as mid-infrared waveguide Fourier transform spectrometer etc. In this paper, a 40-times-demagnification ultrafast laser direct-writing system was built with a 4f system and a Gaussian-Bessel beam generated by a quartz axicon and a Yb:KGW laser source that operated at a wavelength of 1030 nm, a repetition rate of 100 kHz and a pulse width tunable from 223 fs to 20 ps. When the pulse energy was changed from 36 μJ to 63 μJ and the pulse duration was changed from 12.5 ps to 20 ps, the nanopore structure with a diameter of 80~320 nm was successfully written on the ZnS crystal. The surface morphology, diameter and depth of the nanopores were determined by FIB (Focused Ion Beams) ablation and SEM (Scanning Electron Microscopy) imaging. The influence of laser pulse energy and pulse width on the nanopores was studied. The results show that when the pulse width is 20 ps and the pulse energy is 48 µJ, the depth of a nanopore is about 270 µm.

     

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