Citation: | SHANG Peng, CHEN Bei-xi, SUN Peng, LIU Hua-song, BAI Jin-lin, JI Yi-qin, CAO Bo, MA Yuan-fei, LIN Quan. Theoretical design and preparation of high performance MWiR notch filter[J]. Chinese Optics, 2023, 16(4): 904-915. doi: 10.37188/CO.2022-0193 |
In order to effectively suppress the interference of CO2 radiation 4.3 μm on MWiR target signal with wavelength of 3 μm−5 μm, based on the Needle random intercalation optimization algorithm, an accurate inversion correction model for the growth error of multi-layer ultra-thick Ge/Al2O3 films under quartz crystal monitoring is established by the electron beam evaporation method, thus realizing the design, the accurate inversion and the accurate preparation of MWiR notch filter. In order to solve the problem that the surface profile of the MWiR notch filter changes greatly, the preset substrate surface method is used to realize the low surface profile regulation of MWiR notch filter. The results show that the high refractive index Ge film has good deposition stability with the increase of coating time, while the deposition scale factor of low refractive index Al2O3 thin film changes up to 11.9% in a regular gradual trend. For the prepared MWiR notch filter, the average cut-off transmittance is less than 0.3% in the wavelength range of 4.2 μm−4.5 μm, and the average transmittances are more than 95% in the wavelength range of 3.5 μm−4.05 μm and 4.7 μm−5.0 μm. The surface profile of the substrate after coating can be effectively controlled in a small range. The film has good adaptability to complex environment, and has successfully passed the environmental test of firmness, high temperature, low temperature and damp heat specified in GJB 2485-95.
[1] |
GUO G, DAI Y L, YE M L. Photoelectric homing technology and its appliance in missile[J]. Infrared and Laser Engineering, 2007, 36(S1): 31-34. (in Chinese) doi: 10.3969/j.issn.1007-2276.2007.z2.007
|
[2] |
HUANG J, ZHANG ZH Y, TIAN SH M. Current status and development trend of airborne air to ground electro-optical detection equipment[J]. Infrared Technology, 2018, 40(5): 412. (in Chinese)
|
[3] |
WU J, LIAO G, MAO H X, et al. IR radiation of CO2 in hypersonic flow fields[J]. Infrared and Laser Engineering, 2013, 42(5): 1113-1116. (in Chinese) doi: 10.3969/j.issn.1007-2276.2013.05.001
|
[4] |
GARRISON M, OZAWA T, LEVIN D. An improved CO2, H2O and soot infrared radiation models for high temperature flows[C]. 36th AIAA Plasmadynamics and Lasers Conference, AIAA, 2005: 4777.
|
[5] |
CHEN W, WANG ZH X, MA D H, et al. Calculation and simulation of infrared radiation characteristics of non-uniform hot gas[J]. Infrared and Laser Engineering, 2010, 39(1): 17-21.
|
[6] |
ZHANG J F, YANG CH M, LIU Q L, et al. Study and preparation of mid-wave infrared 3μm~5μm broad band pass filter[J]. Journal of Applied Optics, 2013, 34(4): 695-699. (in Chinese)
|
[7] |
CHEN CH P, SHI J T, GUO R, et al. Design and preparation of mid-infrared bandpass filter[J]. Journal of Applied Optics, 2012, 33(3): 595-598. (in Chinese)
|
[8] |
林永昌, 卢维强. 光学薄膜原理[M]. 北京: 国防工业出版社, 1990.
LIN Y CH, LU W Q. Optics of Thin Films[M]. Beijing: National Defense Industry Press, 1990.
|
[9] |
FAHR S, ULBRICH C, KIRCHARTZ T, et al. Rugate filter for light-trapping in solar cells[J]. Optics Express, 2008, 16(13): 9332-9343. doi: 10.1364/OE.16.009332
|
[10] |
WANG S L, MI G Y, ZHANG J F, et al. Study and preparation of mid-infrared dual channel band-pass filter[J]. Laser &Infrared, 2017, 47(6): 740-744. (in Chinese) doi: 10.3969/j.issn.1001-5078.2017.06.017
|
[11] |
ZHANG B S, MA M J, XIONG Y Q, et al. Study of designing minus filters method based on Rugate theory[J]. Vacuum &Cryogenics, 2010, 16(4): 219-222,232. (in Chinese) doi: 10.3969/j.issn.1006-7086.2010.04.007
|
[12] |
GAO P, YIN X J, ZHAO SH F, et al. Notch filter designed by a quasi-Rugate method[J]. Optical Instruments, 2013, 35(6): 82-90. (in Chinese) doi: 10.3969/j.issn.1005-5630.2013.06.017
|
[13] |
ZHOU SH, WANG K X, LIU D Q, et al. Research on infrared dual-color filters with 3.2~3.8μm and 4.9~5.4μm bands[J]. Chinese Optics, 2021, 14(3): 536-543. (in Chinese) doi: 10.37188/CO.2020-0206
|
[14] |
CAI Y, ZHOU SH, LIU D Q, et al. Design of dual-band-pass optical filter based on combination of Fabry-Perot coatings in mid-infrared band[J]. Acta Optica Sinica, 2016, 36(2): 0222004. (in Chinese) doi: 10.3788/AOS201636.0222004
|
[15] |
LAPPSCHIES M, GÖRTZ B, RISTAU D. Application of optical broadband monitoring to Quasi-Rugate filters by ion-beam sputtering[J]. Applied Optics, 2006, 45(7): 1502-1506. doi: 10.1364/AO.45.001502
|
[16] |
HENDRIX K D, HULSE C A, OCKENFUSS G J, et al. Demonstration of narrowband notch and multi-notch filters[J]. Proceedings of SPIE, 2008, 7067: 706702. doi: 10.1117/12.795498
|