Volume 12 Issue 5
Oct.  2019
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Chinese Optics  > 2019  >  12(5): 1147-1154.
ZHANG Hai-dong, WANG Xiao-kun, XUE Dong-lin, ZHANG Xue-jun. Surface testing method for ultra-large convex aspheric surfaces[J]. Chinese Optics, 2019, 12(5): 1147-1154. doi: 10.3788/CO.20191205.1147
Citation: ZHANG Hai-dong, WANG Xiao-kun, XUE Dong-lin, ZHANG Xue-jun. Surface testing method for ultra-large convex aspheric surfaces[J]. Chinese Optics, 2019, 12(5): 1147-1154. doi: 10.3788/CO.20191205.1147
shu

Surface testing method for ultra-large convex aspheric surfaces

  • 1.

    Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science, Changchun 130033, China

  • 2.

    University of Chinese Academy of Sciences, Beijing 100049, China

Funds:

National Key Research and Development Program of China 2016YFB0500100

More Information
  • Corresponding author: ZHANG Hai-dong, E-mail: jimwxk@sohu.com
  • Received Date: 28 Oct 2018
  • Rev Recd Date: 23 Dec 2018
  • Publish Date: 01 Oct 2019
    Abstract
  • In order to achieve high-accuracy measurements of ultra-large aperture convex aspheric mirrors, a modified surface testing method is proposed. This method combines a Computer-Generated Hologram(CGH) and an illumination lens to create highly accurate and efficient measurements for ultra-large convex aspheres. Firstly, the basic principles of the method are researched. Then, a simulation is performed for an aspheric mirror with an aperture of 800 mm and a subaperture plan and CGH are designed. Finally, the sensitivity of this configuration is analyzed. Simulation results indicate that the residual aberrations are less than 0.001 3 nm RMS and that the accuracy of this testing method can be greater than 6 nm RMS. This method can satisfy the requirements for high accuracy surface testing in ultra-large convex aspheric surfaces.

     

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