| Citation: | XU Nuo, HUANG Hu-jun, GUO Wan-qi, JIANG Hu, WANG Ying-ying, ZHANG Pei-qing, SHEN Xiang, DAI Shi-xun, SONG Bao-an. All-dielectric chalcogenide metasurfaces based on fano resonance for high-performance mid-infrared refractive index sensing[J]. Chinese Optics. doi: 10.37188/CO.2025-0158
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This study proposes a high-performance mid-infrared refractive index sensor based on an all-dielectric metasurface, operating at a wavelength of approximately 5.36 μm. The metasurface unit consists of four symmetrically arranged Sb2Se3 semi-elliptical structures and a central Sb2Se3 cylinder, periodically arranged on a BaF2 substrate. Numerical simulations were performed using the finite-difference time-domain (FDTD) method to obtain the reflection spectrum and to analyze the electromagnetic field vector distribution at the resonance peak, as well as the influence of geometric parameters on the spectral response. The observed Fano resonance in the reflection spectrum is explained by the theory of quasi-bound states in the continuum (Q-BIC). Through systematic parameter scanning, we investigate the influence of structural parameters on the quality factor (Q) and full width at half-maximum (FWHM) under the constraint of fixed resonance intensity, and compare the spectral linewidth responses when adjusting parameters in different directions. Furthermore, by varying the background refractive index, the refractive-index sensing characteristics based on the Fano resonance are studied. The results show that the sensor achieves a maximum sensitivity of 1985 nm/RIU, a peak Q-factor of
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