| Citation: | Wang Hao-xing, LIU Jia, WANG Hai-yang, WANG Jun, LI Yuan-hao, YIN Jian-xiong, WAN Shun, DAI Yun-teng, JIA Ping-gang. Metal-sensitive diaphragm fiber optic Fabry-perot pressure sensor with temperature compensation[J]. Chinese Optics. doi: 10.37188/CO.EN-2025-0021
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A metal-sensitive diaphragm fiber optic pressure sensor with temperature compensation is developed for pressure monitoring in high-temperature environments, such as engine fuel systems, oil and gas wells, and aviation hydraulic systems. The sensor combines a metal-sensitive diaphragm and a sapphire wafer to form a temperature-pressure dual Fabry-Perot (FP) interference cavity. A cross-correlation signal demodulation algorithm and a temperature decoupling method are utilized to reduce the influence of temperature crosstalk on pressure measurement. Experimental results show that the maximum nonlinear error of the sensor pressure measurement is 0.75% full scale (FS) and 0.99% FS at room temperature and 300 °C, respectively, in a pressure range of 0−10 MPa and 0−1.5 MPa. The sensor’s pressure measurement accuracy is 1.7% FS when using the temperature decoupling method. The sensor exhibits good static pressure characteristics, stability, and reliability, providing an effective solution for high-temperature pressure monitoring applications.
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