| Citation: | WANG Bo, WANG Wei, YIN Zhi-yu, WANG Xin-yu, LIU Zhao-wu, LI Wen-hao, GAO Xu, LIU Lin. Continuous displacement measurement of large spot with stitched gratings[J]. Chinese Optics. doi: 10.37188/CO.EN-2025-0023
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Stitched gratings provide an important method to extend the grating displacement measurement range. However, the existence of stitched seams and stitching errors prevents high-precision continuous displacement measurement. This paper proposes an improved stitched grating displacement measurement method. The method reduces light signal intensity loss during stitching via a large spot suppression technique, ensures continuous displacement measurement using wavefront gradient modulation technology, establishes a theoretical model of the mapping between the stitched grating wavefront and the displacement measurement error, and verifies continuous displacement measurements experimentally using a single-sided Littrow optical path. Experimental results show that, based on the premise of matching the wavefront gradient index, the linear correlation between the theoretical model error and the actual measurement residual is greater than 0.9, and the corrected continuous displacement measurement residual is less than 50 nm. This verifies that the proposed method can realize high-precision continuous displacement measurement and high-stability range extension in the grating displacement measurement field.
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