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摘要: 相比于传统稳腔高功率TEA CO2激光器,如何在不降低功率的基础上,改善其光束质量一直研究者关心的问题。本文在原有稳腔激光器的基础上,设计了三组望远镜虚共焦腔镜,给出了完整的设计过程并进行了理论分析。同时对不同组的非稳腔激光器进行了对比实验研究,结果表明非稳腔能够在保证高单脉冲能量的基础上极大地改善激光远场发散角,其中最佳腔镜组合能够达到单脉冲能量13.7J,其发散角为1mrad(稳腔为2.4mrad),激光脉宽50ns(稳腔为98ns)。这就为此种类型激光器应用于激光制造领域奠定了基础。
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关键词:
- TEA CO2激光器 /
- 非稳腔 /
- 光束质量 /
- 远场发散角
Abstract: Comparing with traditional stable resonator high-power TEA CO2 laser, it is always the key point to improve the optical beam quality as the same time guarantee the power of laser. Based on the original stable resonator, three sets of telescopic positive-branch confocal resonators is designed using unstable resonator scheme, which give the whole design process and theoretical analysis. The corresponding comparison experimental study are conducted with single-pulse energy, divergence angle and pulse duration time. Experimental results indicate that using unstable resonator can largely improve the divergence angle as the same time to maintain the high single-pulse energy. The single-pulse energy 13.7J, the divergence angle 1mrad (stable resonator as 2.4mrad) and pulse duration time 50ns (stable resonator as 98ns) are obtained from the best unstable resonator. This work will make this kind of laser to be widely used in the field of laser manufacture.-
Key words:
- TEA CO2 laser /
- unstable resonator /
- beam quality /
- divergence angle of far field
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