玻璃质光学元件表面微裂纹的研究

陈晓苹; 王朋; 李俊峰; 宣斌; 宋淑梅; 谢京江

玻璃质光学元件表面微裂纹的研究

陈晓苹^1,2,
王朋^1,2,
李俊峰^1,2,
宣斌^1,2,
宋淑梅¹,
谢京江¹

1.
中国科学院长春光学精密机械与物理研究所光学系统先进制造技术重点实验室,吉林长春130033;
2.
中国科学院研究生院,北京 100039

基金项目:

中科院知识创新工程资助项目

详细信息

作者简介:

陈晓苹(1983—),女,吉林四平人,博士研究生,主要从事光学元件表面强化技术方面的研究。 E-mail:chenxiaopingapple@163.com
谢京江(1954—),男,北京人,研究员,博士生导师,主要从事先进光学精密加工与检测方面的研究。 E-mail:jjxie@ciomp.ac.cn

陈晓苹(1983—),女,吉林四平人,博士研究生,主要从事光学元件表面强化技术方面的研究。 E-mail:chenxiaopingapple@163.com
谢京江(1954—),男,北京人,研究员,博士生导师,主要从事先进光学精密加工与检测方面的研究。 E-mail:jjxie@ciomp.ac.cn

中图分类号: TQ171.68
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出版历程
- 收稿日期: 2010-04-17
- 修回日期: 2010-06-14
- 刊出日期: 2010-08-25

Study on surface micro-cracks of vitreous optics

1.
Key Laboratory of Optical System Advanced Manufacturing Technology,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;
2.
Graduate University of Chinese Academy of Sciences,Beijing 100039,China

摘要

摘要: 研究了影响玻璃质光学元件表面质量的主要因素,认为表面微裂纹是表面强度改变的主要原因。用机械磨削初成形工艺方法分析研究了表面微裂纹产生的原因;通过裂纹尖端应力集中及Griffith能量平衡理论,分析了裂纹扩展方式;结合表面结构缺陷理论及研磨处理表面微缺陷工艺,阐述了HF腐蚀法对微裂纹的去除机理及效果;最后,综述了通过生产工艺提高玻璃强度的方法,重点讨论了离子交换法,镀膜法和HF腐蚀法等表面处理技术,指出使用HF腐蚀法去除表面微裂纹更适用于玻璃质光学元件的表面加工。
- 表面微裂纹 /
- 应力集中 /
- Griffith裂纹 /
- HF腐蚀 /
- 表面强化
Abstract: The reasons which effect on the surface quality of vitreous optics was investigated and the surface micro-crakes were regarded as a main source that could change the surface strength. The causes of the surface micro-cracks were analyzed based on the mechanical grinding and forming process, then, the crack tip stress concentration and the Griffith energy balance theory were used to analyze the crack propagation mode. Combined with the surface structure defect theory and grinding crafts, the removal mechanism of micro-cracks and the effect of HF etching method were described. Finally, the methods to enhance glass strength by manufacture technology were proposed, which focus on the some surface processing, such as ion exchanging, coating and HF eting. It suggests that the HF etching would be more suitable for the removal of surface micro-cracks in processing the vitreous optics..
- surface micro-crack /
- stress concentration /
- Griffith micro-crack /
- HF etching /
- surface strengthening

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参考文献(1)

[1] 曹志强. 硬脆材料液悬浮超光滑加工的理论与实验研究 . 长春:吉林大学 ,2007. CAO ZH Q. . Changchun:Jilin University,2007.(in Chinese)

[2] 王承遇,陶瑛. 玻璃的表面结构与性质 .http://www.cnki.net.

[3] WEYL W A. Structure of subsurface layers and their role in glass technology
[J]. J. Non-Cryst. Solids,1975,19:1-25.

[4] WIEDERHORN S M,BOLZ L H. Stress corrosion and static fatigue of glass
[J]. J. Am. Ceram. Soc.,1970,53(10):543-548.

[5] CHEN X P,XUAN B,WANG P,et al.. Study on the influence and disposal method of the micro-cracks of optical components
[J]. SPIE,2009,7282:72820D/1-72820D/5.

[6] 王承遇,陶瑛 . 玻璃表面处理技术
[M].北京:化学工业出版社,2004. WANG CH Y,TAO Y. Processing Technology on the Glass Surface
[M]. Beijing:Chemical Industry Press,2004.(in Chinese)

[7] SAVIO G,MENEGHELLO R,CONCHERI G. A surface roughness predictive model in deterministic polishing of ground glass moulds
[J]. Int. J. Mac. Tool. & Manu.,2009,49: 1-7

[8] TOMOZAWA M,TAKAMORI T. Relation of surface structure of glass to HF acid attack and stress state
[J]. J. Am. Ceramic Soc.,1979,62(7-8):370-373.

[9] MELLOTT N P,BRANTLEY S L,HAMILTON J P,et al.. Evaluation of surface preparation methods for glass
[J]. Surf. Interface Anal.,2001,31: 362-368.

[10] KISTLER S S. Stress in glass produced by nonuniform exchange of monovalent ions
[J]. J. Am. Ceram. Soc.,1962,45(2):59-68.

[11] WONG L,SURATWALA T,FEIT M D,et al.. The effect of HF/NH₄F etching on the morphology of surface fractures on fused silica
[J]. J. Non-Crystal. Solids,2009,355:797-810.