留言板

尊敬的读者、作者、审稿人, 关于本刊的投稿、审稿、编辑和出版的任何问题, 您可以本页添加留言。我们将尽快给您答复。谢谢您的支持!

姓名
邮箱
手机号码
标题
留言内容
验证码

真空紫外波段光栅二级衍射效率测量装置

曲艺

曲艺. 真空紫外波段光栅二级衍射效率测量装置[J]. 中国光学(中英文), 2010, 3(6): 566-571.
引用本文: 曲艺. 真空紫外波段光栅二级衍射效率测量装置[J]. 中国光学(中英文), 2010, 3(6): 566-571.
QV Yi. Measuring instrument for second-order diffraction efficiency of grating in vacuum ultraviolet[J]. Chinese Optics, 2010, 3(6): 566-571.
Citation: QV Yi. Measuring instrument for second-order diffraction efficiency of grating in vacuum ultraviolet[J]. Chinese Optics, 2010, 3(6): 566-571.

真空紫外波段光栅二级衍射效率测量装置

详细信息
  • 中图分类号: O436.1

Measuring instrument for second-order diffraction efficiency of grating in vacuum ultraviolet

  • 摘要: 利用光栅二级衍射会影响反射样品光谱反射率结果的原理,通过计算不同光谱反射率获得了光栅二级衍射效率。介绍了测量二级衍射效率的实验装置,该装置采用双光路单色仪结构,使用已知光谱辐亮度氘灯作为光源,探测器为光电倍增管,通过水杨酸钠膜将紫外光转为可见光。以波长161 nm为例,测量了5块反射镜样片,计算得到光栅二级衍射效率为0.006 11(10.077 7)。分析表明,该方法采用的测试装置简单,系统不确定度为14.08%,可以实现真空紫外波段光栅二级光谱衍射效率的连续测量。

     

  • [1] PALMER C. Diffraction Grating Handbook[M]. New York:Thermo RGL,2002. [2] 周哲海. 平面波导凹面衍射光栅的设计[J]. 光学 精密工程 ,2008,16(6):993-998. ZHOU ZH H. Design of planar waveguide concave diffraction gratings[J]. Opt. Precision Eng., 2008,16(6):993-998.(in Chinese) [3] VASNETSOV M V,BAZHENOV V Y,SLUSSARENKO S S,et al.. Coupled-wave analysis of second-order Bragg diffraction. I.Reflection-type phase gratings[J]. J.Opt.Soc.Am.,2009,26(4):684-690. [4] BRUNOT O P,REITIC F. Accurate calculation of diffraction grating efficiencies[J]. SPIE,1993,1919:236-247. [5] KUZNETSOV I G,WILKINSON E,CONTENT D A,et al.. Grating efficiencies comparison study calculations versus metrology for various types of high groove density gratings at VUV-UV wavelengths[J]. SPIE,2004,5178:267-276. [6] 齐文宗,刘颖,李福田. 铝质紫外闪耀光栅衍射效率的模拟计算及其与实验结果的对比[J]. 光学 精密工程 ,2000,8(1):16-18. QI W Z,LIU Y,LI F T. Comparison of calculated and measured diffractive efficiencies of UV aluminum blazed gratings[J]. Opt. Precision Eng.,2000,8(1):16-18.(in Chinese) [7] OSTERMAN S,ROTTMAN G J. Photometric calibration of the first three spectroscopic orders of an extreme-ultraviolet spectrometer by use of synchrotron radiation[J]. Appl.Opt.,1994,33(19):4193-4200. [8] McPherson A,ROUZE N,WESTERVELD W B,et al.. Calibration of a VUV spectrometer-detector system using synchrotron radiation[J]. Appl. Opt.,1986,25(2):298-310. [9] CARUSO A J,MOUNT G H,WOODGATE B E. Absolute S- and P-plane polarization efficiencies for high frequency holographic gratings in the VUV[J]. Appl. Opt.,1981,20(10):1764-1776. [10] LAPORTE P,SUBTIL J L,COURBON M,et al.. Vacuum-ultraviolet refractive index of LiF and MgF2 in the temperature range 80~300 K[J]. J. Opt. Soc. Am.,1983,73(8):1062-1069. [11] LIEBMAN P A,ENTINE G. Radiance of deuterium arc lamps[J]. Appl. Opt.,1969, 8(7):1502-1502. [12] CANFIELD L R,HASS G,WAYLONIS J E. Further studies on MgF2-overcoated aluminum mirrors with highest reflectance in the vacuum ultraviolet[J]. Appl. Opt.,1966,5(1):45-49. [13] ALBYN K,BURNS H D. Interaction of vacuum ultraviolet radiation with molecular deposits[J]. SPIE,2006,6291:62910H1. [14] HERZIG H,FLEETWOOD C M,TOFT A R. Variability in the vacuum-ultraviolet transmittance of magnesium fluoride windows[J]. Appl. Opt.,1992,31(1):110-114. [15] REFT C S,BECHER J,KERNELL R L. Proton-induced degradation of VUV transmission of LiF and MgF2[J]. Appl. Opt.,1980,19(24):4156-4158. [16] KENDRICK R L,McPherson A,ROUZE N,et al.. Comparison of methods for determining the second-order detection efficiency of a VUV spectrometer[J]. Appl. Opt.,1987,26(10):2029-2041. [17] JAMES A R,SAMSON B S. Techniques of Vacuum Ultraviolet Spectroscopy[M]. Nebraska:Pied Publications,1967. [18] KRISTIANPOLLER N,KNAPP R A. Some optical properties of sodium salicylate films[J]. Appl. Opt.,1964,3(8):915-918.
  • 加载中
计量
  • 文章访问数:  4003
  • HTML全文浏览量:  373
  • PDF下载量:  1814
  • 被引次数: 0
出版历程
  • 收稿日期:  2010-05-13
  • 修回日期:  2010-07-17
  • 刊出日期:  2010-12-20

目录

    /

    返回文章
    返回