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放电脉冲重频准分子激光器在不同应用领域的发展现状

LOSEV V F PANCHENKO Yu N DUDAREV V V IVANOV N G KONOVALOV I N PAVLINSKY A V PUCHIKIN A V

LOSEV V F, PANCHENKO Yu N, DUDAREV V V, IVANOV N G, KONOVALOV I N, PAVLINSKY A V, PUCHIKIN A V. 放电脉冲重频准分子激光器在不同应用领域的发展现状[J]. 中国光学, 2011, 4(1): 1-8.
引用本文: LOSEV V F, PANCHENKO Yu N, DUDAREV V V, IVANOV N G, KONOVALOV I N, PAVLINSKY A V, PUCHIKIN A V. 放电脉冲重频准分子激光器在不同应用领域的发展现状[J]. 中国光学, 2011, 4(1): 1-8.
LOSEV V F, PANCHENKO Yu N, DUDAREV V V, IVANOV N G, KONOVALOV I N, PAVLINSKY A V, PUCHIKIN A V. Development of discharge pulse repetition rate excimer lasers for different applications[J]. Chinese Optics, 2011, 4(1): 1-8.
Citation: LOSEV V F, PANCHENKO Yu N, DUDAREV V V, IVANOV N G, KONOVALOV I N, PAVLINSKY A V, PUCHIKIN A V. Development of discharge pulse repetition rate excimer lasers for different applications[J]. Chinese Optics, 2011, 4(1): 1-8.

放电脉冲重频准分子激光器在不同应用领域的发展现状

基金项目: 

Supported by Russian Foundation for Basic Research Project(No.10-08-90002a)

详细信息
  • 中图分类号: TN248.2

Development of discharge pulse repetition rate excimer lasers for different applications

Funds: 

Supported by Russian Foundation for Basic Research Project(No.10-08-90002a)

  • 摘要: 研究了脉冲宽度为25~40 ns的放电脉冲XeCl准分子激光器的工作参数。 结果显示,激光器产生的脉冲能量为0.2~0.7 J,重复频率为100 Hz,表明在泵浦功率为2.8~3.3 MW/cm3时,激光器实现了2.6%的激光效率和3.8%的本征效率。
  • [1] BORISOV V M,BRAGIN I E,VINOKHODOV A Yu,et al.. Pumping rate of electric-discharge excimer lasers[J]. Quantum Electron.,1995,25(6):507. [2] LACOUR B,BRUNET H,BESAUCELE H,et al.. 500 watts industrial excimer laser at high repetition rate[J]. SPIE,1994,2206:41. [3] RIVA R,LEGENTIL M,PASQUIERS S,et al.. Experimental and theoretical investigations of a XeCl phototriggered laser[J]. Phys. D.:Appl. Phys.,1995,28:856. [4] MAKAROV M,BONNET J,PIGACH D. High efficiency discharge-pumped XeCl laser[J]. Appl. Phys.B,1998,66:417. [5] LO D,XIE J. A megawatt excimer laser of small discharge volume(3.8 cm3)[J]. Opt. and Quantum Electronics,1989,21:147. [6] MIYAZAKI K,TODA Y,HASAMA T,et al.. Efficient and compact discharge XeCl laser with automatic UV preionization[J] . Rev. Sci. Instrum.,1985,56:201. [7] PANCHENKO Yu N,IVANOV N G,LOSEV V F. Electric-discharge XeCl laser emitting 10-J, 300-ns pulses [J]. Rus. Quantum Electron.,2005,35:618. [8] BYCHKOV Yu I,LOSEV V F,PANCHENKO Yu N,et al.. Research of short pulse discharge XeCl laser[J]. SPIE,2005,5777:558. [9] BYCHKOV Yu I,LOSEV V F,PANCHENKO Yu N,et al.. Efficiency of discharge XeCl laser with 30 ns pulse duration of radiation[J]. SPIE,2006:60530F. [10] BYCHKOV Yu I,BALBONENKO E F,IVANOV N G,et al.. Discharge pulse-repetition XeCl laser with high efficiency and intensity of radiation[J]. SPIE,2007,6611:66110E. [11] PANCHENKO Yu N,LOSEV V F,DUDAREV V V. Generation of diffraction-limited nanosecond and subnanosecond pulses in a XeCl laser[J]. Rus. Quantum Electron.,2008,38:369. [12] PANCHENKO Yu N,LOSEV V F,IVANOV N G,et al.. Effective pulse-periodic excimer lasers[J]. Atmospheric and Oceanic Opt.,2008,21:674. [13] DUDAREV V V,KOTOV Yu A,LOSEV V F,et al.. Research of production conditions of CeGdO nanopowder with help of excimer laser radiation[J]. Proceedings TPU,2008,2:140.
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  • 被引次数: 0
出版历程
  • 收稿日期:  2010-08-11
  • 修回日期:  2010-10-13
  • 刊出日期:  2011-02-25

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