基于SOI非对称马赫曾德尔结构的集成矢量和 微波光子移相器

肖永川; 瞿鹏飞; 周敬然; 刘彩霞; 董玮; 陈维友

基于SOI非对称马赫曾德尔结构的集成矢量和微波光子移相器

吉林大学电子科学与工程学院集成光电子学国家重点联合实验室, 吉林长春 130012

基金项目:

国家自然科学基金资助项目(No.61077046),吉林省科技发展计划资助项目(No.20090105),吉林大学基本科研业务费资助项目(No.200903084)

详细信息

作者简介:
肖永川(1987-),男,重庆梁平人,硕士研究生,主要从事新型光电子器件的研究。 E-mail:xiaoyc10@mails.jlu.edu.cn

中图分类号: TN256
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出版历程
- 收稿日期: 2011-04-11
- 修回日期: 2011-07-13
- 刊出日期: 2011-08-25

Integrated vector sum microwave photonic phase shifter based on asymmetric Mach-Zendner structure in SOI

State Key Laboratory on Integrated Optoelectronics,College of Electronic Science and Engineering,Jilin University, Changchun 130012,China

摘要

摘要: 设计和分析了一种基于SOI(绝缘体上的硅)脊型波导非对称马赫曾德尔结构的集成矢量和微波光子移相器。对于10 GHz的微波信号,设定非对称两臂的长度差为3 983 m时,其相应的时间延迟约为47 ps。分别在两臂上集成了一个热光可调谐可变光衰减器用于光学调谐,当衰减单元的折射率在0~610-3变化时,实现了10 GHz微波信号在0~180的相位调谐。该器件尺寸小、结构紧凑,易于实现片上集成,在光控相控阵雷达中很有应用前景。
- 移相器 /
- 微波光子学 /
- 绝缘体上的硅
Abstract: An integrated vector sum microwave photonic phase shifter(MWPPS) based on the asymmetric Mach-Zendner structure in Silicon on Insulator(SOI) rib waveguides was designed and fabricated for the first time. A fixed true time delay of 47 ps was achieved by a length difference of 3 983 m between the two asymmetric arms. Then two thermo-optical Variable Optical Attenuators(VOAs) were integrated in the two arms respectively to tune the optical power individually. The phase shift ranging from 0 to near 180 for a 10 GHz microwave signal has been achieved by the RI variation of 0.610 in VOAs. The device which has a very compact size could be easily integrated in silicon optoelectronic chips and expected to be widely used in Optically Controlled Phased Array Radars(OCPARs).
- phase shifter /
- microwave photonics /
- Silicon on Insulator(SOI)

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参考文献(1)

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