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摘要: 精密测量是精密机械加工的基础，是制造行业中影响制造精度的决定性因素之一，在当代精密机械制造领域应用广泛。基于光栅的精密位移测量系统以其对环境要求小，测量分辨率高等优点，在精密位移测量领域占据重要位置。基于光栅的精密位移测量系统包括光学测量系统、信号接收、电子学细分及整体装调几部分。本文主要针对光学测量光路部分进行综述介绍。首先介绍了经典光栅干涉位移测量原理；其次，综述了基于光栅的精密位移测量系统的关键技术现状；再次，对比分析了几种最具有代表性的测量技术，总结其优缺点；最后，对基于光栅的精密位移测量技术进行展望，揭示其高精度、高分辨力、高鲁棒性、微型化、多维化、多技术融合的发展趋势。Abstract: Precision measurement is the basis of precision machining and it's one of the decisive factors of manufacturing accuracy in the manufacturing industry. It is widely used in the field of contemporary precision machinery manufacturing. The grating-based precise displacement measurement system play an important role in the field of precise displacement measurement because of its small environmental requirements and high resolution. The grating-based precise displacement measurement system includes optical measurement, signal reception, electronic subdivision and integral adjustment. In this paper, the optical path of optical measurement is introduced. Firstly, the principles of classical grating interferometric displacement measurement are introduced. Secondly, the key technologies of the grating-based precise displacement measurement system are summarized. Thirdly, the latest representative measurement techniques are compared and analyzed, and their advantages and disadvantages are summarized. Finally, prospects are provided for the future of grating-based precise displacement measurement technology wherein the the development trend of its high precision, high resolution, high robustness, miniaturization, multi-dimension and multi-technological fusion are revealed.
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图 1 经典双光栅位移测量系统光学结构
Figure 1. Optical structure of classical double grating displacement measurement system
图 2 单光栅位移测量系统光学结构
Figure 2. Optical structure of single grating displacement measurement system
图 8 外差利特罗式光栅干涉仪位移测量系统原理
Figure 8. Principle of displacement measurement system for heterodyne Littrow interferometer
表 1 基于光栅的位移测量系统优缺点对照表
Table 1. The advantages and disadvantages of grating-based precision displacement measurement
系统名称 研究单位 优点 缺点 三光栅组合干涉仪 中国台湾元智大学哈尔滨工业大学 最佳组合位移误差在10 nm以内测量的相位是360度，对环境干扰具有较强的免疫力 误差会随着三光栅有效栅距的增加而增加 基于两个平行光栅的二维位移测量系统 哈尔滨工业大学超精密光电仪器工程研究所 可测量光栅平面的二维位移，利用扫描光栅代替棱镜对干涉信号的相位进行调制，使编码器结构紧凑 光栅结构复杂，实际装调难度高，精度、稳定性等参数有待验证，停留在实验室测试阶段 基于正交衍射光栅的三维纳米位移传感器 上海交通大学 实现了三维纳米级的位移测量 安装定位要求高，结构复杂，处于试验测试阶段 超精密外差利特罗式光栅干涉位移测量系统 清华大学机械工程系摩擦学国家重点实验室与超精密制造装备及控制北京市重点实验室 高环境鲁棒性，死程误差小 量程受对称光路结构的限制 一种用于远距离、纳米精度的位移测量的时间光栅传感器 重庆理工大学机械检测技术与设备工程研究中心 测量范围大，测量精度达到纳米级，制造成本低，不需要被测物体匀速运动，利用时间量测量精度高 旋转磁场均匀度受速度制约，时栅的加工误差对测量精度影响大，高速动态测量易发生畸变 光纤光栅(FBG)位移传感器 新加坡大学美国生物医学工程学院 抗电磁干扰、抗腐蚀性强，可同时实现对位移与温度的检测 测量精度较低，加工工艺复杂，信号解调设备复杂 
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