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摘要: 相比于传统的机械变焦镜头,液体变焦镜头具有体积小、响应快、成本低和集成度高等特点,被广泛应用于图像采集、目标追踪和特征识别等领域。焦距调节方式决定了液体镜头的性能和应用,本文概括了基于液晶材料、介电泳、电化学、电润湿原理的物性控制式变焦镜头和基于静电力、电磁力、压力调节和环境响应的机械驱动式变焦镜头的研究现状,介绍了液体变焦镜头在光流控芯片内的集成应用,并指出当前面临的主要问题和解决方案。最后,对液体变焦镜头的发展前景和研究方向进行了展望和总结。Abstract: Compared with the traditional mechanical zoom lens, the variable-focus liquid lens has a smaller lens, faster response time, lower cost and higher integration capabilities. These lenses are widely used in image acquisition, target tracking and feature recognition. The performance and applications of liquid lenses are determined by the focal length adjustment method. This paper summarizes the progress of liquid crystals, dielectrophoresis, electrochemistry, electrowetting principle-based function control variable-focus lenses, electrostatic force, electromagnetic force, pressure regulation, and environmental-response-technology-based mechanical driven variable-focus lenses. The integrated applications of variable-focus liquid lenses in optofluidic chips are introduced. Also, the major obstacles and the settlement are described. Furthermore, the development potential and future research direction of the variable-focus liquid lens are also predicted and summarized.
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Key words:
- liquid lens /
- focus tunable /
- function control /
- mechanical driven
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图 8 3种常见的电磁驱动液体镜头结构[49-51]。(a)基于电磁吸引的液体变焦镜头;(b)基于通电线圈洛伦兹力驱动的液体变焦镜头;(c)基于铁磁流体流动的液体变焦镜头
Figure 8. Structure of three common electromagnetically driven liquid lenses[49-51]. (a) Electromagnetic attraction varifocal liquid lens. (b) Electric coil Lorentz force driven varifocal liquid lens. (c) Ferrofluid-based fluid varifocal liquid lens
图 9 压力调节液体镜头结构[54-56]。(a)基于液压控制的液体变焦镜头;(b)基于手动操纵的液体变焦镜头;(c)基于形状记忆合金变形的液体变焦镜头
Figure 9. Structures of pressure adjusted liquid lenses[54-56].(a)Variable-focus liquid lens based on hydraulic control.(b)Variable-focus liquid lens based on manual actuation. (c)Variable-focus liquid lens based on shape memory alloy deformation
图 12 基于液体变焦镜头集成的光流控芯片[61-62]。(a)用于流动环境中生物细胞捕捉的热梯度折射率液体镜头;(b)三维液-液双凸凹变焦镜头用于生物细胞成像
Figure 12. Varifocal liquid lens integrated optofluidic chip[61-62].(a)Thermal gradient refractive index liquid lens for trapping single living cell in flowing environments. (b)Switchable 3D liquid-liquid biconvex lens for biological cell image
表 1 4种介质层的实验结果
Table 1. Experimental results obtained with four kinds of dielectric layers
介电层 填充液 击穿电压/V 工作电压/V Parylene C D.I water 95 10 SDS 20 2 Parylene C+Al2O3 D.I water 125 50 SDS 22 6 Parylene C+SiO2 D.I water 120 40 SDS 20 2 Parylene C+SiO2+Al2O3 D.I water 135 65 SDS 24 8 -
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