局域表面等离激元共振增强硅蓝光波段吸收特性研究

王浩冰; 陶金; 吕金光; 孟德佳; 李阳; 赵永周; 王家先; 张军; 秦余欣; 王惟彪; 梁静秋

doi:10.37188/CO.2020-0056

局域表面等离激元共振增强硅蓝光波段吸收特性研究

王浩冰^{1, 2,},
陶金¹,
吕金光¹,
孟德佳¹,
李阳^{1, 2},
赵永周^{1, 2},
王家先^{1, 2},
张军³,
秦余欣¹,
王惟彪^1, ,,
梁静秋^1, ,

1.
中国科学院长春光学精密机械与物理研究所，应用光学国家重点实验室，长春 130033
2.
中国科学院大学，北京 100049
3.
暨南大学，广州市可见光通信工程技术重点实验室，广州 510632

详细信息

中图分类号: O431.1; O436.2; O471.5
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出版历程
- 收稿日期: 2020-04-02
- 修回日期: 2020-04-27
- 网络出版日期: 2020-10-22
- 刊出日期: 2020-12-01

Absorption enhancement of silicon via localized surface plasmons resonance in blue band

doi: 10.37188/CO.2020-0056

WANG Hao-bing^{1, 2
,},
TAO Jin¹,
LV Jin-guang¹,
MENG De-jia¹,
LI Yang^{1, 2},
ZHAO Yong-zhou^{1, 2},
WANG Jia-xian^{1, 2},
ZHANG Jun³,
QIN Yu-xin¹,
WANG Wei-biao^{1
, ,},
LIANG Jing-qiu^{1
, ,}

1.
State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
2.
University of Chinese Academy of Sciences, Beijing 100049, China
3.
Guangzhou Key Laboratory of Visible Light Communication Engineering Technology, Jinan University, Guangzhou 510632, China

Funds: Supported by the National Key Research and Development Program of China (Grant No. 2018YFB1801900), Science and Technology Plan of Guangdong Province, China (Grant No. 2016B010111003) and Development of Science and Technology Plan of Jilin Province, China (Grant No. 20180801024GX and No. 20190302062GX), the Youth Innovation Promotion Association Foundation (NO. 2018254), the State Key Laboratory of Applied Optics 2019 Open Foundation (SKLAO: 201908)

More Information

Author Bio:
Wang Haobing (1994—), male, born in Songyuan City, Jilin province, Master Degree Candidate. In 2017, he graduated from Changchun University of Science and Technology with a Bachelor of Science degree. He is now a graduate student of Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences. He is mainly engaged in the research of nanophotonics and semiconductor photodetectors. E-mail: 996490955@qq.com

Wang Weibiao (1962—), male, born in Yangzhou City, Jiangsu province. He is a doctor, researcher and doctoral supervisor. He received his doctor’s degree from Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences in 1999. Now he is a researcher of this institute. He is mainly engaged in the research of photonic crystal and micro-nano photonics, LED array chip integration and application, field emission materials and electron emission characteristics. E-mail: wangwb@ciomp.ac.cn

Liang Jingqiu (1962—), female, born in Changchun City, Jilin Province. She is a doctor, researcher and doctoral supervisor. In 2003, she received her doctor's degree from Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences. Now she is a researcher of this institute. She is mainly engaged in the research of micro/nano optical structures, devices and systems, infrared spectrum/imaging spectrum and infrared optical instruments, micro LED microdisplay chip and its application, and visible light communication devices and systems. E-mail: liangjq@ciomp.ac.cn

Corresponding author: wangwb@ciomp.ac.cn; liangjq@ciomp.ac.cn

摘要

摘要: 为增强硅的蓝光吸收，在硅表面设计银纳米颗粒阵列，基于局域表面等离激元共振效应对增强的硅蓝光吸收特性进行了分析研究。采用有限时域差分法计算银纳米颗粒阵列/硅复合结构中硅的蓝光吸收特性。结果表明：金属颗粒的消光能力与其几何参数有关，改变银纳米颗粒阵列的半径r、高度H与周期P可调控局域表面等离激元共振强度与共振频率，当银纳米颗粒阵列参数设定为：r = 18.5 nm、H = 45 nm、P = 49 nm时，在共振吸收波长为465 nm的情况下，硅的蓝光吸收率由59%增加至94%，光吸收增益为0.57，光生载流子数目增益为0.53，分析认为是局域表面等离激元共振增强硅在蓝光波段的光吸收导致上述增益现象。本文的研究结果对了解局域表面等离激元效应，改善硅的蓝光吸收特性，设计和制备高蓝光响应度硅基可见光光电探测器具有重要的参考价值。
- 局域表面等离激元 /
- 硅 /
- 蓝光 /
- 吸收率 /
- 有限时域差分法
Abstract: To enhance the blue light absorption of silicon, an array of silver nanoparticles(Ag-NPs) was designed so that they create Localized Surface Plasmon Resonance(LSPR) near the surface of silicon(Si). The properties of the enhanced optical absorption of silicon in the blue band were then observed and researched. The blue-light absorption characteristic of silicon in the Ag-NPs/Silicon composite structure were calculated using the Finite-Difference-Time-Domain (FDTD) method. The results indicated that the metallic nanoparticles' extinction capability was related to its geometric parameters and the resonance intensity and peak wavelength can be tuned according to different geometric parameters of Ag-NPs including radius, height and period. At a resonance peak wavelength of 465 nm, the optical absorption of Si in the composite structure (Ag-NPs/Si) rises from 59% to 94% with an array of radius r = 18.5 nm, a height H = 45.0 nm and a period P = 49.0 nm. It concluded that the light absorption gain was 0.57 and photogenerated carriers had a gain factor of 0.53 due to the enhanced light absorption of Si via LSPR in blue band. The results provide a significant reference for the enhancement of the blue-light absorption properties in silicon based on the LSPR effect and the design of a silicon-photodetector with a visible wide spectral resoponse.
- localized surface plasmon /
- silicon /
- blue light /
- absorptivity /
- FDTD method

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图 1 金属球状结构的局域表面等离激元示意图

Figure 1. Schematic diagram of localized surface plasmons with a metallic spherical structure

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图 2 Ag-NPs/Si模型结构

Figure 2. Model structure of Ag-NPs/Si

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图 3 Ag-NPs几何参数对硅的光学行为的影响。（a）半径r对硅在蓝光波段的吸收影响；（b）光吸收率与共振波长随半径r的变化；（c）半径r对硅在蓝光波段的吸收增益影响

Figure 3. Influence of geometric parameters of Ag-NPs on the optical properties of silicon. (a) Absorptance versus radius r in blue band; (b) absorptance and resonant wavelength versus radius r; (c) absorption gain versus radius r in blue band

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图 4 Ag-NPs几何参数对硅的光学性质的影响。（a）高度H对硅在蓝光波段的吸收影响；（b）光吸收率与共振波长随高度H的变化；（c）高度H对硅在蓝光波段的吸收增益影响

Figure 4. Influence of geometric parameters of Ag-NPs on the optical properties of silicon. (a) Absorptance versus height H in blue band; (b) absorptance and resonant wavelength versus height H; (c) absorption gain versus height H in blue band

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图 5 Ag-NPs几何参数对硅的光学性质影响。（a）周期P对硅在蓝光波段的吸收影响；（b）光吸收率与共振波长随周期P的变化；（c）周期P对硅在蓝光波段的吸收增益影响

Figure 5. Influence of geometric parameters of Ag-NPs on the optical properties of silicon. (a) absorptance versus period P in blue band; (b) absorptance and resonant wavelength versus period P; (c) absorption gain versus period P in blue band

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图 6 可见光波段硅的光吸收。（a）硅与基于Ag-NPs阵列硅的吸收率曲线；（b）硅的光吸收增益

Figure 6. Si-absorptance in visible bands from 380 nm to 760 nm. (a) Absorptances of silicon without and with Ag-NPs on the surface; (b) absorption gain of silicon

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图 7 蓝光波段结构表面反射率R与Ag-NPs光吸收损耗A_metal的关系曲线

Figure 7. Reflectivity R of structure surface in blue band versus absorption loss A_metal of Ag-NPs

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图 8 蓝光波段Ag-NPs光吸收损耗A_metal曲线

Figure 8. Absorption loss A_metal of Ag-NPs in blue band

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图 9 入射波长465 nm载流子数量曲线：（a）载流子数量曲线；（b）载流子增益比

Figure 9. Generation rate of carriers at λ_in = 465 nm: (a) carrier generation rates of Si/Ag-NPs and Si; (b) gain ratio

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