Offner分光成像系统的球面自准直法快速装调

杨拓拓; 陈新华; 赵知诚; 朱嘉诚; 沈为民

doi:10.37188/CO.2020-0058

Offner分光成像系统的球面自准直法快速装调

doi: 10.37188/CO.2020-0058

杨拓拓^{1, 2, 3,},
陈新华^{1, 2, 3, ,},
赵知诚^{1, 2, 3},
朱嘉诚^{1, 2, 3},
沈为民^{1, 2, 3,}

1.
苏州大学光电科学与工程学院，江苏苏州 215006
2.
教育部现代光学技术重点实验室，江苏苏州 215006
3.
江苏省先进光学制造技术重点实验室，江苏苏州 215006

基金项目: 国家重点研发计划(No. 2016YFB0500501-2)

详细信息

作者简介:
杨拓拓(1993—)，男，河南灵宝人，硕士研究生，2017年于中国计量大学获得学士学位，2020年于苏州大学获得硕士学位，主要从事光学设计与仪器光学方面的研究。E-mail: 20175208001@stu.suda.edu.cn

陈新华(1982—)，男，江苏盐城人，博士，副研究员，2013年于苏州大学现代光学技术研究所获得光学工程博士学位，主要从事光谱成像技术、光学系统设计与研制、光电测量技术等方面的研究。E-mail: xinhua_chen@stu.suda.edu.cn

通讯作者:
陈新华(1982—)，男，江苏盐城人，博士，副研究员，2013年于苏州大学现代光学技术研究所获得光学工程博士学位，主要从事光谱成像技术、光学系统设计与研制、光电测量技术等方面的研究。E-mail: xinhua_chen@stu.suda.edu.cn

中图分类号: TH744
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出版历程
- 收稿日期: 2020-04-08
- 修回日期: 2020-05-11
- 网络出版日期: 2020-10-29
- 刊出日期: 2020-12-01

Fast alignment of an offner imaging spectrometer using a spherical autostigmatic method

YANG Tuo-tuo^{1, 2, 3
,},
CHEN Xin-hua^{1, 2, 3
, ,},
ZHAO Zhi-cheng^{1, 2, 3},
ZHU Jia-cheng^{1, 2, 3},
SHEN Wei-min^{1, 2, 3
,}

1.
School of Optoelectronic Science and Engineering, Soochow University, Suzhou 215006, China
2.
Key Laboratory of Modern Optical Technologies of Education Ministry of China, Suzhou 215006, China
3.
Key Laboratory of Advanced Optical Manufacturing Technologies of Jiangsu Province, Suzhou 215006, China

Funds: Supported by National Key Research and Development Program of China (No. 2016YFB0500501-2)

More Information

Corresponding author: xinhua_chen@stu.suda.edu.cn

摘要

摘要: Offner分光成像系统由凸面光栅和两个凹面反射镜组成。光学结构上同心的特点使其具有相对孔径大、畸变小、结构紧凑等优点。为了降低Offner分光成像系统的装调难度，提高装调效率，本文基于同心特点和球面自准直原理，研究了Offner分光成像系统的快速装调方法。首先搭建球面自准直装置，当该装置生成的点光源位于球面反射镜曲率中心处时，其反射像点和点光源重合。通过检测反射像点和点光源之间的位置偏差，可判定球面反射镜曲率中心位置的偏离程度。利用该装置定位主镜、凸面光栅和三镜的曲率中心位置，完成Offner分光成像系统的装调。实验结果表明，两块离轴凹面反射镜的曲率中心间距误差可控制在10 μm以内，装调完成的分光成像系统成像性能较好，满足指标要求。与现有装调方法相比，该方法具有易于对准、装调速度快、所需设备成本低等优点。
- Offner分光成像系统 /
- 同心特性 /
- 球面自准直 /
- 快速装调
Abstract: Offner imaging spectrometers consist of a convex grating and two concave mirrors. The concentric characteristics of the optical structure allow it to have a large relative aperture, small distortion and a compact structure. In order to reduce the difficulty of aligning an Offner imaging spectrometer and improve its efficiency, this paper presents a fast alignment method for Offner imaging spectrometers based on the concentric characteristic and spherical autostigmatic method. Firstly, a spherical autostigmatic device is built, which can generate a point source. When the point source is located at the spherical mirror’s center of curvature (CoC), its reflection image point and the point source coincide. By measuring the distance between the reflection image point and the point source, the positional deviation of the spherical mirror’s CoC can be determined. The Offner imaging spectrometer is completed by locating the CoC of its primary mirror, convex grating and tertiary mirror. The results show that the location error of the two off-axis concave mirrors’ CoC can be controlled within 10 μm, and our imaging performance requirements for the imaging spectral system are satisfied. Compared with pre-existing methods, this method is easier to operate, lower in cost and has faster alignment capabilities.
- Offner imaging spectrometer /
- concentric characteristics /
- spherical autostigmatic /
- fast alignment

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图 1 球面自准直装置光路图

Figure 1. Light path diagram of the spherical autostigmatic device

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图 2 球面自准直装置

Figure 2. Spherical autostigmatic device

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图 3 对心分辨率实验装置图

Figure 3. Alignment resolution experimental device

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图 4 Offner分光成像系统装调光路原理图

Figure 4. Schematic diagram of the Offner optical imaging system assembly

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图 5 主镜、三镜装调流程图

Figure 5. Primary and tertiary mirrors assembly flowchart

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图 6 光栅装调流程图

Figure 6. Grating assembly flowchart

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图 7 Offner分光成像系统光路图

Figure 7. Optical path diagram of Offner optical imaging system

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图 8 主镜三镜装调实物图

Figure 8. The alignment physical map of the primary and tertiary mirror

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图 9 主镜、三镜自准直光斑

Figure 9. Autostigmatic spots of primary and tertiary mirrors

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图 10 凸面光栅和辅助凹面镜装配实物图

Figure 10. The alignment physical maps of the convex grating and auxiliary concave mirror

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图 11 凸面光栅自准十字叉丝像

Figure 11. Convex grating autostigmatic image point

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图 12 光谱测试实验装置

Figure 12. Spectral test experimental device

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图 13 谱线图

Figure 13. Spectral line map

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表 1 对心分辨率测量数据

Table 1. Alignment resolution measurement data

$x$/μm	${x_i}$	$x'$/μm	$\delta $/μm
0	926.497	0.0	0.0
12	792.524	11.6	−0.4
21	682.097	21.1	0.1
31	568.828	30.8	−0.2
40	457.068	40.5	0.5
52	322.229	52.1	0.1
60	220.331	60.9	0.9
最大误差0.9 μm		标准差0.4 μm

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表 2 Offner分光成像系统指标要求

Table 2. System specifications of Offner imaging spectrometer

指标	要求
色散范围	6.6 mm
光谱分辨率	2 nm
谱线弯曲	<2%像元
色畸变	<2%像元
MTF	≥0.73

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表 3 Offner分光成像系统装调公差分配结果

Table 3. Assembly adjustment tolerance distribution results of Offner imaging spectroscopy system

公差类型			狭缝	主镜	光栅	三镜	窗口
装调公差	倾斜/arc min	X	1	基准	1	0.3	1
		Y	1	基准	1	0.3	1
		Z	1	基准	—	—	—
	偏心/mm	X	0.02	基准	0.02	0.01	—
	偏心/mm	Y	0.02	基准	0.02	0.01	—
	轴向位置/mm		0.02	0.01	0.01	0.02	0.155

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表 4 Offner分光成像系统性能测试结果

Table 4. Performance test results of Offner imaging spectrometer system

测试次数	平均光谱分辨率/nm	谱线弯曲/pixel	色畸变/pixel
1	1.86	0.60%	±0.92%
2	1.91	1.25%	±1.82%
3	1.90	1.38%	±0.81%
平均	1.89	1.08%	±1.18%

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