超快贝塞尔光束在硫化锌晶体表面制备纳米孔

常改艳; 王玉恒; 程光华

doi:10.37188/CO.2020-0101

超快贝塞尔光束在硫化锌晶体表面制备纳米孔

常改艳^{1, 2,},
王玉恒³,
程光华^4, ,

1.
中国科学院西安光学精密机械研究所瞬态光学与光子技术国家重点实验室，陕西西安 710119
2.
中国科学院大学，北京 100049
3.
华南理工大学广东省半导体照明与信息化工程技术研究中心，广东广州 510641
4.
西北工业大学电子信息学院光学影像分析与学习中心，陕西西安 710072

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出版历程
- 收稿日期: 2020-06-08
- 修回日期: 2020-06-22
- 网络出版日期: 2020-09-10
- 刊出日期: 2021-01-25

Writing nanopores on a ZnS crystal with ultrafast Bessel beams

doi: 10.37188/CO.2020-0101

1.
State Key Laboratory of Transient Optics and Photonics, Xi’an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi’an 710119, China
2.
University of Chinese Academy of Sciences, Beijing 100049, China
3.
Research Center of Semiconductor Lighting and Information Engineering Technology, South China University of Technology, Guangzhou 510641, China
4.
School of Electronics and Information, Center for Optical Imagery Analysis and Learning, Northwestern Polytechnical University, 710072 Xi’an, Shaanxi

Funds: Supported by National Key Research and Development Program (No. 2018YFB1107401); National Natural Science Foundation of China (No. 61775236)

More Information

Author Bio:
Chang Gaiyan (1992—), female, born in Qingyang City, Gansu Province. She is a master degree candidate of the University of Chinese Academy of Sciences. She is mainly engaged in the research of ultra-fast laser micro-nano machining mechanism and application. E-mail: gaiyanchang@163.com

Cheng Guanghua (1976—), male, bore in Ankang City, Shaanxi province. He is a professor, doctoral supervisor and the visiting professor of CNRS Hubert Curie Laboratory. He is mainly engaged in the scientific research and talent training in ultrashort pulse laser technique, ultrashort laser-material interaction, femtosecond laser micro-nano machining technique and other fields. E-mail: guanghuacheng@nwpu.edu.cn

Corresponding author: guanghuacheng@nwpu.edu.cn

摘要

摘要: 硫化锌（ZnS）晶体是重要的宽光谱红外窗口材料，高深径比纳米孔的超快激光制造技术为中红外波导傅立叶变换光谱仪等光子器件的实现提供了重要的技术途径。本文采用中心波长为1030 nm、重复频率为100 kHz、脉冲宽度为223 fs~20 ps可调的Yb: KGW激光光源，用石英锥镜产生高斯-贝塞尔光束，并用4f系统构建了40倍缩束的超快激光直写系统。在能量为36~63 μJ，脉宽为12.5~20 ps的情况下，在ZnS晶体上成功刻写了直径为80~320 nm的纳米孔结构。通过聚焦离子束（FIB）剥蚀和扫描电子显微镜（SEM）成像确定了纳米孔隙表面形貌、直径及深度信息。研究了激光脉冲能量、脉冲宽度对纳米孔隙的影响。结果表明，在20 ps脉冲宽度、48 µJ脉冲能量的激光参数下，纳米孔隙的深度约为270 μm。
- 硫化锌晶体 /
- 高深径比纳米孔 /
- 光子器件 /
- 高斯-贝塞尔光束
Abstract: Zinc sulfide (ZnS) crystal is one of the important materials used to make the wide-spectrum infrared window. The ultrafast laser technology for manufacturing the nanopores with high aspect ratio provides an important approach to fabricate the photonic devices such as mid-infrared waveguide Fourier transform spectrometer etc. In this paper, a 40-times-demagnification ultrafast laser direct-writing system was built with a 4f system and a Gaussian-Bessel beam generated by a quartz axicon and a Yb:KGW laser source that operated at a wavelength of 1030 nm, a repetition rate of 100 kHz and a pulse width tunable from 223 fs to 20 ps. When the pulse energy was changed from 36 μJ to 63 μJ and the pulse duration was changed from 12.5 ps to 20 ps, the nanopore structure with a diameter of 80~320 nm was successfully written on the ZnS crystal. The surface morphology, diameter and depth of the nanopores were determined by FIB (Focused Ion Beams) ablation and SEM (Scanning Electron Microscopy) imaging. The influence of laser pulse energy and pulse width on the nanopores was studied. The results show that when the pulse width is 20 ps and the pulse energy is 48 µJ, the depth of a nanopore is about 270 µm.
- ZnS crystal /
- high aspect ratio nanopores /
- photonic devices /
- Gaussian-Bessel beam

HTML全文

图 1 贝塞尔激光刻写微通道结构实验装置图

Figure 1. Experimental setup for microchannel writing with Bessel laser

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图 2 不同激光参数下ZnS表面纳米孔隙结构的SEM形貌。 (a) 35.83 μJ；(b) 48.67 μJ；(c) 62.82 μJ。第1到4列的激光脉冲宽度分别是10ps, 12.5 ps, 15 ps和20 ps

Figure 2. SEM images of nanopores on ZnS surface at various pulse energies. (a) 35.83 μJ; (b) 48.67 μJ; (c) 62.82 μJ. The laser pulse widths in columns 1 to 4 are 10 ps, 12.5 ps, 15 ps and 20 ps respectively

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图 3 不同激光脉冲宽度下ZnS晶体表面纳米孔隙直径随脉冲能量的变化情况

Figure 3. Nanopore diameter on ZnS crystal surface changes with pulse energy under different laser pulse widths

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图 4 FIB刻蚀纳米孔隙横截面处的SEM形貌图

Figure 4. SEM image of cross section of FIB-etched nanopore

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图 5 ZnS晶体内部纳米孔隙的结构特征。 (a)抛光后纳米孔隙横截面的SEM图；(b) 20×相衬显微镜下的纳米孔隙结构的侧面图(透射式显微模式），上方插图是微通道的放大图，图中的微结构均是在20 ps, 48.67 μJ的激光参数下刻写的

Figure 5. Characteristics of nanopore inside ZnS crystal. (a) SEM image of cross-section of polished nanopore; (b) side view of the nanopore under a 20 × phase contrast microscope (transmission microscopy type). The upper inset is an enlarged view of a microchannel. Note that all the microstructures in the picture are written under the laser parameters of 20 ps and 48.67 μJ

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