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CCD非线性效应对双频光栅三维面形测量的影响

乔闹生 孙萍

乔闹生, 孙萍. CCD非线性效应对双频光栅三维面形测量的影响[J]. 中国光学. doi: 10.37188/CO.2020-0143
引用本文: 乔闹生, 孙萍. CCD非线性效应对双频光栅三维面形测量的影响[J]. 中国光学. doi: 10.37188/CO.2020-0143
QIAO Nao-sheng, SUN Ping. The influence of CCD nonlinearity effect on the three-dimensional shape measurement of dual frequency grating[J]. Chinese Optics. doi: 10.37188/CO.2020-0143
Citation: QIAO Nao-sheng, SUN Ping. The influence of CCD nonlinearity effect on the three-dimensional shape measurement of dual frequency grating[J]. Chinese Optics. doi: 10.37188/CO.2020-0143

CCD非线性效应对双频光栅三维面形测量的影响

doi: 10.37188/CO.2020-0143
基金项目: 国家自然科学基金(No.61701050, 61703157, 61701050);电子薄膜与集成器件国家重点实验室开放课题资助(KFJJ201807);四川省教育厅科研项目(2018Z073)
详细信息
    作者简介:

    乔闹生(1971—),男,湖南茶陵县人,博士/博士后,教授,硕士生导师,主要从事光学信息处理、机器视觉等方面的研究。E-mail:naoshengqiao@163.com

    孙萍:孙 萍(1979—),女,四川邛崃人,博士,副教授,硕士生导师,主要从事先进材料与光电传感等方面的研究。E-mail:sunping19775525@163.com

  • 中图分类号: O438.2

The influence of CCD nonlinearity effect on the three-dimensional shape measurement of dual frequency grating

Funds: Supported by the National Natural Science Foundation of China (No. 61701050, 61703157, 61701050), the Open Foundation of State Key Laboratory of Electronic Thin Films and Integrated Devices (KFJJ201807), the Project of Sichuan Provincial Department of Education (2018Z073)
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  • 摘要: 由于测量系统中CCD非线性效应会影响复杂光学三维面形测量精度,因此提出了采用双频光栅投影消除CCD非线性效应并提高测量精度的方法。首先,分析了CCD非线性效应对三维面形测量的影响,给出了该情况下出现频谱混叠的解析推导和物理解释。然后,讨论了CCD非线性效应下的双频光栅测量原理,分析了此时变形条纹的光强分布及其经傅里叶变换后得到混叠频谱的原理。最后,给出了由等效波长来衡量测量精度的方法,推出了使用双频光栅投影测量三维面形高度信息的基本公式,并进行了理论分析。仿真了最大绝对值与平均绝对值分别为24.3181 mm和1.0839 mm的物体,测量值与实际值之间的最大绝对高度误差与平均绝对高度误差分别为0.8950 mm和0.0622 mm,提高双频光栅基频后,其对应值分别减小为0.3710 mm和0.0232 mm;在实验结果中,当双频光栅的基频都同等增加2.5倍后,频谱中的基频与高级频谱间分离较好,测量精度提高了。因此,采用双频光栅投影消除CCD非线性效应具有较强的实用性和很好的发展前景。
  • 图  1  测量系统光路图

    Figure  1.  Optical geometry of measurement system

    图  2  模拟物体及沿着x轴方向频谱分布

    Figure  2.  Simulation object and spectrum distribution along x axis

    图  3  系统存在非线性效应时仿真结果图

    Figure  3.  Simulation results when the system has nonlinearity effect

    图  4  实验装置图

    Figure  4.  The schematic diagram of experimental setup

    图  5  系统为非线性情况时的实验结果图

    Figure  5.  Experimental results when the system has nonlinearity effect

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出版历程
  • 收稿日期:  2020-08-17
  • 修回日期:  2020-10-18

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