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摘要: 为了实现振镜旋转角度的高精度测量，设计了一种利用反射式圆形衍射光栅的角度测量系统，对该系统的测量原理、测量过程、测量精度等进行了相应的设计、仿真与验证。设计与振镜同轴的反射镜，搭配反射式圆光栅以及光敏检测器件，利用反射式圆光栅产生的±1级衍射光干涉，把振镜转角位移量转化为干涉条纹光强的变化，以实现振镜转角的测量。实验结果表明：该测量系统能实现振镜±10°的角度测量，测量精度为10″。实现了振镜旋转角度的高精度测量，并且该装置结构紧凑，满足扫描振镜的小巧化设计需求。Abstract: In order to achieve high-precision measurement of the rotation angle of the galvanometer, an angle detection system using a reflective diffraction grating is designed, and its measuring principle, measuring process and measuring precision are designed, simulated and verified. Through a mirror designed coaxially with the galvanometer, with a reflective circular grating and a photosensitive detection device, the ±1st order diffracted light generated by the reflective circular grating is interfered to convert the angular displacement of the galvanometer into a change in the intensity of interference fringes. In this way, the measurement of the rotational angle of the galvanometer is realized. The experimental results show that the detection system can realize the measurement of the galvanometer's angle within ±10°, and the measurement accuracy is 10″. The high-precision measurement of the rotational angle of the galvanometer is realized, and the device has a compact structure to meet the requirements of the scanning galvanometer demand.
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图 8 初始入射角γ分别为（a）10°、（b）30°、（c）45°时的干涉条纹光强图
Figure 8. Interference fringe intensity diagrams at initial incident angles of (a) γ=10°, (b) γ=30°, (c) γ=45°.
表 1 角度测量结果
Table 1. Angle measurement results
(°) 测量次数 实际转动角单位 测量角单位 误差值单位 1 −10.0005 −10.0042 0.0037 2 −8.9998 −9.0033 0.0035 3 −7.9999 −8.0030 0.0031 4 −7.0002 −7.0030 0.0028 5 −6.0000 −6.0027 0.0027 6 −4.9989 −5.0024 0.0035 7 −3.9995 −4.0018 0.0023 8 −2.9994 −3.0012 0.0018 9 −2.0000 −2.0027 0.0027 10 −1.0003 −1.0012 0.0009 11 0.9998 1.0009 0.0011 12 1.9997 2.0012 0.0015 13 3.0003 3.0024 0.0021 14 4.0002 4.0024 0.0022 15 4.9995 5.0021 0.0026 16 5.9998 6.0027 0.0029 17 6.9988 7.0027 0.0039 18 8.0002 8.0033 0.0031 19 8.9995 9.0030 0.0035 20 9.9997 10.0036 0.0039 均值 — — 0.00269 
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