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显微条纹投影小视场三维表面成像技术综述

王永红 张倩 胡寅 王欢庆

王永红, 张倩, 胡寅, 王欢庆. 显微条纹投影小视场三维表面成像技术综述[J]. 中国光学(中英文), 2021, 14(3): 447-457. doi: 10.37188/CO.2020-0199
引用本文: 王永红, 张倩, 胡寅, 王欢庆. 显微条纹投影小视场三维表面成像技术综述[J]. 中国光学(中英文), 2021, 14(3): 447-457. doi: 10.37188/CO.2020-0199
WANG Yong-hong, ZHANG Qian, HU Yin, WANG Huan-qing. 3D small-field surface imaging based on microscopic fringe projection profilometry:a review[J]. Chinese Optics, 2021, 14(3): 447-457. doi: 10.37188/CO.2020-0199
Citation: WANG Yong-hong, ZHANG Qian, HU Yin, WANG Huan-qing. 3D small-field surface imaging based on microscopic fringe projection profilometry:a review[J]. Chinese Optics, 2021, 14(3): 447-457. doi: 10.37188/CO.2020-0199

显微条纹投影小视场三维表面成像技术综述

doi: 10.37188/CO.2020-0199
基金项目: 国家重点研发计划(No. 2016YFF0101803);国家自然科学基金资助项目(No. 51805137)
详细信息
    作者简介:

    王永红(1972—),男,安徽合肥人,博士,教授,博士生导师,美国Oakland University博士后。主要从事光学精密测试、激光散斑干涉检测和机器视觉等方面的研究。 E-mail:yhwang@hfut.edu.cn

  • 中图分类号: TP391;TP274.5

3D small-field surface imaging based on microscopic fringe projection profilometry:a review

Funds: Supported by National Key Research and Development Program of China (No. 2016YFF0101803); National Natural Science Foundation of China (No. 51805137)
More Information
  • 摘要: 智能制造不断向着精密化、微型化、集成化的方向发展,具有代表性的集成电路技术及其衍生出的MEMS等微型传感器技术等得以迅猛发展,快速精确地获取微型器件表面信息并进行缺陷检测对于集成电路和MEMS等产业发展具有重要意义。基于结构光的条纹投影技术具有非接触、高精度、高效率、全场测量等优点,在精密测量中发挥着重要的作用。近年来,显微条纹投影测量系统,包括其光学系统结构,系统标定,相位获取以及三维重建方法等各个方面取得了重大发展。本文回顾了显微条纹投影三维测量系统的结构原理,分析了不同于传统投射模型的小视场系统标定问题,介绍了显微投影系统结构发展过程,同时对由系统结构以及金属测量时造成的反光问题进行了分析,在此基础上,对显微条纹投影三维测量系统的发展前景进行了展望。

     

  • 图 1  光学三角法测量原理图

    Figure 1.  Principle diagram of optical triangulation projection measuring system

    图 2  (a)针孔成像模型及(b)双远心成像模型

    Figure 2.  (a) Pinhole imaging model and (b) dual-telecentric imaging model

    图 3  相机与投影仪标定流程

    Figure 3.  Flow chart of calibration of the camera and projector

    图 4  (a)一种常用的小型化和通用的DLP LightCrafter[18]和(b)其二元投影机制

    Figure 4.  (a) A commonly used miniaturized and versatile DLP LightCrafter [18] and (b) its binary projection mechanism

    图 5  基于立体显微镜的MFPP系统。 (a)系统测量方案原理图; (b)测量系统实物图

    Figure 5.  Real-time MFPP system using stereoscopic microscope. (a) Schematic diagram of the system measurement and (b) physical diagram of the measurement system

    图 6  不同曝光时间下的条纹图像

    Figure 6.  Measurement results of captured fringe images under different exposure times

    表  1  基于体视显微镜的MFPP系统的比较

    Table  1.   Comparison of MFPP systems based on off-the-shelf microscopes

    文章投影技术系统复杂度测量视场大小
    Leonhardt等[7]Ronchi光栅0.10 mm×0.10 mm~
    2.50 mm×2.50 mm
    Proll等[9]LCD芯片1.40 mm×1.00 mm~
    16.5 mm×12.0 mm
    Zhang等[12]DMD芯片1.20 mm×0.90 mm~
    7.60 mm×5.70 mm
    Proll等[9]LCOS芯片0.83 mm×0.62 mm~
    21.2 mm×15.7 mm
    Chen等[30]DLP投影仪未给出
    Li等[31]LCOS投影仪3.0 mm×3.0 mm(变倍可调)
    [28]LightCrafter20.0 mm×15.0 mm(变倍可调)
    Jeught等[29]LightCrafter10.7 mm×8.0 mm(变倍可调)
    Hu等[26]LightCrafter8.0 mm×6.0 mm(变倍可调)
    下载: 导出CSV

    表  2  基于LWD镜头的MFPP系统对比

    Table  2.   Comparison of MFPP systems based on an LWD lens

    文章投影技术长工作距离镜头类型测量视场大小
    Quan等[8]LCD投影针孔+针孔镜头1.2 mm×1.5 mm
    Quan等[38]精细的正弦光栅针孔+针孔镜头0.1 mm×0.1 mm
    Wang等[39]LCD投影针孔+针孔镜头768 pixel×576 pixel
    Yin等[34]DLP投影针孔+针孔镜头5.0 mm×4.0 mm
    Li等[20]LightCrafter针孔+远心镜头10.0 mm×8.0 mm
    Li等[32]DLP投影仪远心+远心镜头30.0 mm×20.0 mm
    Liu等[21]LCD投影仪远心+远心镜头34.6 mm×29.0 mm
    Peng等[33]DMD芯片远心+远心镜头1280 pixel×
    1024 pixel
    Wang等[35]DMD芯片远心+4个远心镜头1280 pixel×
    1024 pixel
    Hu等[36]LightCrafter远心+2个远心镜头10.0 mm×7.0 mm
    下载: 导出CSV

    表  3  两类MFPP系统对比

    Table  3.   Comparison of the two kinds of method for MFPP

    基于立体显微镜的MFPP基于LWD透镜的MFPP
    优点灵活调整放大率
    良好的景深
    仅单相机系统
    条纹对比度高
    良好的景深
    标定结构简单
    结构紧凑
    缺点系统体积大
    构造复杂
    标定费时
    放大倍数固定
    公共视野受限
    适用领域需要快速调整
    视场的被测物
    表面形貌复杂,小空间
    物体测量
    下载: 导出CSV

    表  4  HDR 技术中各类方法的优缺点对比

    Table  4.   Comparison of typical methods in HDR technology

    文章实现方法优点缺点适用范围
    Zhang等[47]相机多重曝光法测量精度和信噪比较高,不需要搭建额外的硬件系统大范围反射率变化表面需采集大量的条纹图像,测量效率降低,未知场景有一定的盲目性复杂纹理表面;多颜色的表面;反射率变化不大表面;静态物体
    Chen等[48]调整投影图案强度法高信噪比,不受环境
    约束
    对未知的场景有一定的盲目性,测量效率低,不能自动预测参数复杂纹理表面;多颜色的表面;反射率变化不大表面;静态物体
    Feng等[54]偏振滤光片法测量精度高信噪比低,空间分辨率降低,硬件系统相对复杂镜面物体测量;快速动态测量
    Benveniste R等[56]颜色不变量法无需前期参数设置容易受到表面颜色和复杂纹理的影响,精度低快速动态测量
    Meng等[58]光度立体技术测量精度高系统结构的限制,单次测量的表面范围很小小范围物体测量;静态物体
    下载: 导出CSV
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出版历程
  • 收稿日期:  2020-11-10
  • 修回日期:  2021-01-07
  • 网络出版日期:  2021-03-27
  • 刊出日期:  2021-05-14

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