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摘要: 目前对于超分辨成像技术的研究主要集中在超分辨重建算法方面，光学系统本身的装调误差对超分辨成像结果的影响尚未见报道。针对这一问题，开展了装调误差对超分辨成像影响的研究，建立了基于数字微镜器件(DMD)的超分辨成像光学系统的基本成像模型，设计了一个工作波段为8~12 μm的DMD超分辨成像光学系统，提出了装调误差对超分辨成像质量影响的分析方法。在成像模型中分别引入适当的偏心、倾斜、镜片间隔误差、离焦等装调误差，对超分辨重建结果进行仿真分析，得出了该超分辨成像光学系统装调时的公差范围：该系统在加工装调时X方向总体偏心误差控制在±0.07 mm以内，Y方向总体偏心误差控制在±0.05 mm以内，X方向和Y方向的总体倾斜误差控制在±0.06°以内，总体镜片间隔误差控制在±0.02 mm以内，成像物镜的离焦量控制在±0.04 mm以内，投影物镜的离焦量控制在±0.05 mm以内，在此范围内超分辨成像光学系统可以保证超分辨成像的质量。Abstract: At present, most of the research on super-resolution imaging technology is focused on the super-resolution reconstruction algorithm, but the influence of the alignment error of an optical system on the super-resolution imaging results has not been reported. To solve this problem, We researche the influence of alignment error on super-resolution imaging. First, the basic imaging model of super-resolution imaging optical system based on Digital Micro-mirror Device (DMD) is established. A DMD super-resolution imaging optical system with operating band of 8~12 μm is designed, and a method used to analyze the influence of the alignment error on super-resolution imaging quality is proposed. In the imaging model, alignment errors such as eccentricity, tilt, lens spacing error and defocus are introduced, and the reconstruction results are analyzed. Finally, the range of tolerance of the super-resolution imaging optical system is obtained. The results show that the total eccentricity error in the X direction is controlled within ± 0.07 mm, and that in the Y direction is within ±0.05 mm; the total tilt error in the X and Y directions is controlled within ±0.06°; the overall lens spacing error is controlled within ±0.02 mm; the defocusing amount of the imaging object lens is controlled within ±0.04 mm; the defocusing amount of the projection objective lens is controlled within ±0.05 mm, and within this range, the super-resolution imaging optical system can ensure the quality of super-resolution imaging.
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图 7 镜片偏心量与重建图像PSNR值的关系
Figure 7. Relationship between lens eccentricity and PSNR value of reconstructed image
图 8 镜片倾斜量与重建图像PSNR值的关系
Figure 8. Relationship between lens tilt and PSNR of reconstructed images
图 9 镜片间隔误差与重建图像PSNR值的关系
Figure 9. Relationship between lens spacing error and the PSNR of reconstructed images
图 10 光学系统离焦与重建图像PSNR值之间的关系
Figure 10. Relationship between defocus of the optical system and PSNR value of the reconstructed image
表 1 光学系统参数
Table 1. Performance parameters of the optical system
Parameter Value Wavelength/μm 8~12 Field of view FOV(X/Y)/(°) 0~4.4/0~3.52 F number 1.76 DMD array size 1920 pixel×1080 pixel DMD pixel size/μm 10.8 Detector pixel size/μm 17 Detector array size 640 pixel×512 pixel Dynamic range of detector/dB 29 
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表 2 公差分配结果
Table 2. Tolerance allocation results
偏心/mm 倾斜/(°) 镜片间隔
误差/mm成像物镜
离焦/mm投影物镜
离焦/mmX Y X Y 0.07 0.05 0.06 0.06 0.02 0.04 0.05
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