超构表面的振幅调控及其功能器件研究进展

付娆; 李子乐; 郑国兴

doi:10.37188/CO.2021-0017

超构表面的振幅调控及其功能器件研究进展

doi: 10.37188/CO.2021-0017

武汉大学电子信息学院，湖北武汉 430072

基金项目: 国家自然科学基金（No. 91950110，No. 11774273，No. 11904267）

详细信息

作者简介:
付　娆（1994—），女，河北石家庄人，2016年于长春理工大学获得学士学位，现为武汉大学电子信息学院博士研究生，主要从事微纳光学方面的研究。E-mail：furaomly@whu.edu.cn

郑国兴（1977—），男，湖北武汉人，博士，武汉大学电子信息学院教授，博士生导师。2005年于中国科学院光电技术研究所获得博士学位，主要从事超构表面材料及新型微纳光学器件研究。E-mail：gxzheng@whu.edu.cn

中图分类号: O438.1
计量
- 文章访问数: 3836
- HTML全文浏览量: 2085
- PDF下载量: 804
- 被引次数: 0
出版历程
- 收稿日期: 2021-01-20
- 修回日期: 2021-02-22
- 网络出版日期: 2021-05-10
- 刊出日期: 2021-07-01

Research development of amplitude-modulated metasurfaces and their functional devices

Electronic Information School, Wuhan University, Wuhan 430072, China

Funds: Supported by National Natural Science Foundation of China (No. 91950110, No. 11774273, No. 11904267)

More Information

Corresponding author: gxzheng@whu.edu.cn

摘要

摘要: 超构表面是一种具有亚波长特征尺寸的人工平面结构材料，可以在亚波长尺度上对入射电磁波的振幅、相位、偏振、频率、光谱等参量进行精密且灵活的调控，近年来备受关注。振幅是光波的基本参量之一，本文将从振幅调控的角度出发，对基于超构表面材料的振幅调控机理进行分析，主要包括通过改变纳米结构的尺寸和方向角对振幅进行调控，同时对基于振幅调控超构表面的功能器件的研究现状及其应用场景进行总结和讨论。研究表明，振幅调控超构表面具有设计灵活、加工简单、功能强大、可与其他参量调控相融合等特点，其在高分辨率图像显示、高密度信息存储、信息加密、信息复用、光束整形、光信息处理和安全防伪等诸多领域具有重要的研究价值和广阔的应用前景。
- 超构表面 /
- 振幅调控 /
- 马吕斯定律 /
- 偏振调控 /
- 全息术 /
- 纳米印刷术 /
- 图像显示
Abstract: Metasurfaces, a kind of artificial planar material with subwavelength feature sizes, have attracted much attention in recent years because they can precisely and flexibly manipulate the amplitude, phase, polarization, frequency and spectrum of incident electromagnetic waves at the subwavelength scale. Since amplitude is one of the fundamental properties of a lightwave, in this article, we focus on investigating the mechanism of amplitude-modulated metasurfaces. Amplitude modulation is carried out mainly by varying the sizes and orientation angles of nanostructures. In addition, the progress and applications of functional devices based on amplitude-modulated metasurfaces are summarized and discussed in detail. This article shows that amplitude-modulated metasurfaces have the advantages of flexible designs, simple fabrication, powerful functionality and are suitable for easily merging other optical property modulations. Amplitude-moderated metasurfaces have important research value and broad application prospects in the fields of high-resolution image display, high-density information storage, information encryption, information multiplexing, beam shaping, optical information processing, security, anticounterfeiting and many other related areas.
- metasurface /
- amplitude modulation /
- Malus law /
- polarization modulation /
- holography /
- nanoprinting /
- image display

HTML全文

图 1 二元振幅型超构表面器件。(a)基于碳纳米管^[37]、(b)基于随机图案光子筛^[38]和(c)基于光子筛的定量相关全息片^[39]；(d)波长复用^[41]和(e)偏振复用的全息片^[43]

Figure 1. Binary amplitude-only metasurface-based devices. (a) MWCNT-based meta-holograms^[37]; (b) meta-holograms based on random photon sieves ^[38]; (c) quantitatively correlated meta-holograms based on photon sieves^[39]; (d) wavelength multiplexed^[41] and (e) polarization multiplexed meta-holograms^[43].

下载: 全尺寸图片幻灯片

图 2 改变纳米结构的尺寸实现多台阶振幅调控。(a)V型纳米结构^[44]；(b)C型纳米结构^[45]；(c)长方形纳米结构^[49]。迂回相位超构表面：(d)改变缝的宽度^[54]；(e)改变缝的个数^[55]

Figure 2. Multi-step amplitude modulation by varying the dimensions of nanostructures. (a) V-shaped^[44]; (b) C-shaped^[45]; (c) rectangle-shaped^[49]. Detour phase metasurfaces obtained by (d) varying the width of the slits^[54] and (e) varying the number of slits^[55].

下载: 全尺寸图片幻灯片

图 3 双天线超构表面用于(a)复振幅调控^[56]；(b)表面等离子体全息^[57]；(c)矢量全息^[58]；(d)全彩色HSB任意调控^[59]

Figure 3. Diatomic metasurfaces for (a) complex-amplitude modulation^[56]; (b) surface plasmon holography^[57]; (c) vectorial holography^[58]; (d) full color control with arbitrary hue-saturation-brightness^[59]

下载: 全尺寸图片幻灯片

图 4 马吕斯超构表面的应用。(a)信息隐藏^[62]；(b)高分辨率灰度图像显示^[1]；(c)消零级振幅型全息^[5]；(d)安全防伪^[64]；(e)信息加密^[65]；(f)彩色图像显示^[14]；(g)全彩色图像显示^[66]

Figure 4. Applications of Malus metasurfaces. (a) Information hiding^[62]; (b) high-resolution grayscale image display^[1]; (c) zero-order-free amplitude-only holography^[5]; (d) security and anti-counterfeiting^[64]; (e) information encryption^[65]; (f) color image displays^[14]; (g) full color image displays^[66]

下载: 全尺寸图片幻灯片

图 5 复用型马吕斯超构表面。(a)正交偏振复用^[71]；(b)非正交偏振复用^[72]；(c-f)基于转角简并性的偏振复用^[73,75-77]

Figure 5. Multiplexing Malus metasurfaces. (a) Orthogonal-polarization multiplexing^[71]; (b) nonorthogonal-polarization multiplexing^[72]; (c-f) polarization multiplexing based on orientation degeneracy^[73,75-77]

下载: 全尺寸图片幻灯片

表 1 不同类型的振幅型超构表面的振幅调控方式及特点对比

Table 1. Comparison of the amplitude control methods and characteristics of different types of amplitude-modulated metasurfaces

类型	纳米单元结构	振幅调制方式	特点	典型应用场景
二元振幅型超构表面	多壁碳纳米管、纳米孔、光子筛、等离子体纳米粒子	调控局部是否发生透射或反射	二台阶振幅调制，可与波长选择性和偏振选择性相结合	振幅型全息成像、二值图像显示、波长/偏振复用全息成像等
多台阶振幅型超构表面	V型、C型、I型、长方形、十字型等多种纳米结构、纳米孔、狭缝	改变纳米结构的尺寸	多台阶振幅调制，与改变方向角相结合可以实现复振幅调制	灰度纳米印刷图像显示、复振幅光栅、复振幅全息成像等
双天线超构表面	X型、两个分离的纳米砖组成的双天线纳米结构	改变组成双天线单元的两个纳米结构的方向角	连续振幅调制、连续相位调制、偏振态调制	连续灰度/全彩色纳米印刷图像显示、灰度/全彩色复振幅全息成像、复振幅矢量全息成像、纳米印刷图像及全息图像融合显示等
马吕斯超构表面	任意各向异性纳米结构	改变纳米结构的方向角	连续振幅调制，具有转角简并性，可与几何相位调制结合	连续灰度/全彩色纳米印刷图像显示、宽波带消零级2D/3D全息成像、消零级振幅型光栅、纳米印刷及全息图像融合显示、多通道图像显示等

下载: 导出CSV

参考文献(77)

[1]	DAI Q, DENG L G, DENG J, et al. Ultracompact, high-resolution and continuous grayscale image display based on resonant dielectric metasurfaces[J]. Optics Express, 2019, 27(20): 27927-27935. doi: 10.1364/OE.27.027927
[2]	DAI Q, LI Z L, DENG L G, et al. Single-size nanostructured metasurface for dual-channel vortex beam generation[J]. Optics Letters, 2020, 45(13): 3773-3776. doi: 10.1364/OL.398286
[3]	DAI Q, ZHOU N, DENG L G, et al. Dual-channel binary gray-image display enabled with malus-assisted metasurfaces[J]. Physical Review Applied, 2020, 14(3): 034002.
[4]	DENG J, YANG Y, TAO J, et al. Spatial frequency multiplexed meta-holography and meta-nanoprinting[J]. ACS Nano, 2019, 13(8): 9237-9246. doi: 10.1021/acsnano.9b03738
[5]	FU R, DENG L G, GUAN ZH Q, et al. Zero-order-free meta-holograms in a broadband visible range[J]. Photonics Research, 2020, 8(5): ‏723-728. doi: 10.1364/PRJ.387397
[6]	ZHENG G X, FU R, DENG L G, et al. On-axis three-dimensional meta-holography enabled with continuous-amplitude modulation of light[J]. Optics Express, 2021, 29(4): 6147-6157. doi: 10.1364/OE.416084
[7]	SHAN X, LI Z L, DENG L G, et al. Continuous amplitude-modulated meta-fork gratings with zero-order extinction[J]. Optics Letters, 2020, 45(7): 1902-1905. doi: 10.1364/OL.387665
[8]	ZHANG Y L, CHENG Y, CHEN M, et al. Ultracompact metaimage display and encryption with a silver nanopolarizer based metasurface[J]. Applied Physics Letters, 2020, 117(2): 021105. doi: 10.1063/5.0014987
[9]	KRUK S, HOPKINS B, KRAVCHENKO I I, et al. Invited article: broadband highly efficient dielectric metadevices for polarization control[J]. APL Photonics, 2016, 1(3): 030801. doi: 10.1063/1.4949007
[10]	CHEN CH, GAO SH L, XIAO X J, et al. Highly efficient metasurface quarter-wave plate with wave front engineering[J]. Advanced Photonics Research, 2021, 2(3): 2000154. doi: 10.1002/adpr.202000154
[11]	LI Z L, KIM I, ZHANG L, et al. Dielectric meta-holograms enabled with dual magnetic resonances in visible light[J]. ACS Nano, 2017, 11(9): 9382-9389. doi: 10.1021/acsnano.7b04868
[12]	WANG Q, XU Q, ZHANG X Q, et al. All-dielectric meta-holograms with holographic images transforming longitudinally[J]. ACS Photonics, 2018, 5(2): 599-606. doi: 10.1021/acsphotonics.7b01173
[13]	WEN D D, YUE F Y, LI G X, et al. Helicity multiplexed broadband metasurface holograms[J]. Nature Communications, 2015, 6(1): 8241. doi: 10.1038/ncomms9241
[14]	ZANG X F, DONG F L, YUE F Y, et al. Polarization encoded color image embedded in a dielectric metasurface[J]. Advanced Materials, 2018, 30(21): 1707499. doi: 10.1002/adma.201707499
[15]	ZHANG CH M, WEN D D, YUE F Y, et al. Optical metasurface generated vector beam for anticounterfeiting[J]. Physical Review Applied, 2018, 10(3): 034028. doi: 10.1103/PhysRevApplied.10.034028
[16]	ZHENG G X, MÜHLENBERND H, KENNEY M, et al. Metasurface holograms reaching 80% efficiency[J]. Nature Nanotechnology, 2015, 10(4): 308-312. doi: 10.1038/nnano.2015.2
[17]	ZHENG G X, WU W B, LI Z L, et al. Dual field-of-view step-zoom metalens[J]. Optics Letters, 2017, 42(7): 1261-1264. doi: 10.1364/OL.42.001261
[18]	SHRESTHA S, OVERVIG A C, LU M, et al. Broadband achromatic dielectric metalenses[J]. Light:Science &Applications, 2018, 7(1): 85.
[19]	WANG SH M, WU P C, SU V C, et al. Broadband achromatic optical metasurface devices[J]. Nature Communications, 2017, 8(1): 187. doi: 10.1038/s41467-017-00166-7
[20]	WANG SH M, WU P C, SU V C, et al. A broadband achromatic metalens in the visible[J]. Nature Nanotechnology, 2018, 13(3): 227-232. doi: 10.1038/s41565-017-0052-4
[21]	LIN R J, SU V C, WANG SH M, et al. Achromatic metalens array for full-colour light-field imaging[J]. Nature Nanotechnology, 2019, 14(3): 227-231. doi: 10.1038/s41565-018-0347-0
[22]	CHENG Q Q, MA M L, YU D, et al. Broadband achromatic metalens in terahertz regime[J]. Science Bulletin, 2019, 64(20): 1525-1531. doi: 10.1016/j.scib.2019.08.004
[23]	CHEN W T, ZHU A Y, SANJEEV V, et al. A broadband achromatic metalens for focusing and imaging in the visible[J]. Nature Nanotechnology, 2018, 13(3): 220-226. doi: 10.1038/s41565-017-0034-6
[24]	FU R, LI Z L, ZHENG G X, et al. Reconfigurable step-zoom metalens without optical and mechanical compensations[J]. Optics Express, 2019, 27(9): 12221-12230. doi: 10.1364/OE.27.012221
[25]	CHEN X ZH, HUANG L L, MÜHLENBERND H, et al. Dual-polarity plasmonic metalens for visible light[J]. Nature Communications, 2012, 3(1): 1198. doi: 10.1038/ncomms2207
[26]	CUI Y, ZHENG G X, CHEN M, et al. Reconfigurable continuous-zoom metalens in visible band[J]. Chinese Optics Letters, 2019, 17(11): 111603. doi: 10.3788/COL201917.111603
[27]	LI X, CHEN L W, LI Y, et al. Multicolor 3D meta-holography by broadband plasmonic modulation[J]. Science Advances, 2016, 2(11): e1601102. doi: 10.1126/sciadv.1601102
[28]	WAN W W, GAO J, YANG X D. Full-color plasmonic metasurface holograms[J]. ACS Nano, 2016, 10(12): 10671-10680. doi: 10.1021/acsnano.6b05453
[29]	ZHANG X H, PU M B, GUO Y H, et al. Colorful metahologram with independently controlled images in transmission and reflection spaces[J]. Advanced Functional Materials, 2019, 29(22): 1809145. doi: 10.1002/adfm.201809145
[30]	HU Y Q, LI L, WANG Y J, et al. Trichromatic and tripolarization-channel holography with noninterleaved dielectric metasurface[J]. Nano Letters, 2020, 20(2): 994-1002. doi: 10.1021/acs.nanolett.9b04107
[31]	YU N F, GENEVET P, KATS M A, et al. Light propagation with phase discontinuities: generalized laws of reflection and refraction[J]. Science, 2011, 334(6054): 333-337. doi: 10.1126/science.1210713
[32]	YAN Y, XIE G D, LAVERY M P J, et al. High-capacity millimetre-wave communications with orbital angular momentum multiplexing[J]. Nature Communications, 2014, 5(1): 4876. doi: 10.1038/ncomms5876
[33]	BAO Y J, NI J CH, QIU CH W. A minimalist single-layer metasurface for arbitrary and full control of vector vortex beams[J]. Advanced Materials, 2020, 32(6): 1905659. doi: 10.1002/adma.201905659
[34]	TITTL A, LEITIS A, LIU M K, et al. Imaging-based molecular barcoding with pixelated dielectric metasurfaces[J]. Science, 2018, 360(6393): 1105-1109. doi: 10.1126/science.aas9768
[35]	YESILKOY F, ARVELO E R, JAHANI Y, et al. Ultrasensitive hyperspectral imaging and biodetection enabled by dielectric metasurfaces[J]. Nature Photonics, 2019, 13(6): 390-396. doi: 10.1038/s41566-019-0394-6
[36]	RUBIN N A, D'AVERSA G, CHEVALIER P, et al. Matrix Fourier optics enables a compact full-Stokes polarization camera[J]. Science, 2019, 365(6448): eaax1839. doi: 10.1126/science.aax1839
[37]	BUTT H, MONTELONGO Y, BUTLER T, et al. Carbon nanotube based high resolution holograms[J]. Advanced Materials, 2012, 24(44): OP331-OP336.
[38]	HUANG K, LIU H, GARCIA-VIDAL F J, et al. Ultrahigh-capacity non-periodic photon sieves operating in visible light[J]. Nature Communications, 2015, 6(1): 7059. doi: 10.1038/ncomms8059
[39]	XU ZH T, HUANG L L, LI X W, et al. Quantitatively correlated amplitude holography based on photon sieves[J]. Advanced Optical Materials, 2020, 8(2): 1901169. doi: 10.1002/adom.201901169
[40]	WALTHER B, HELGERT C, ROCKSTUHL C, et al. Diffractive optical elements based on plasmonic metamaterials[J]. Applied Physics Letters, 2011, 98(19): 191101. doi: 10.1063/1.3587622
[41]	WALTHER B, HELGERT C, ROCKSTUHL C, et al. Spatial and spectral light shaping with metamaterials[J]. Advanced Materials, 2012, 24(47): 6300-6304. doi: 10.1002/adma.201202540
[42]	MONTELONGO Y, TENORIO-PEARL J O, WILLIAMS C, et al. Plasmonic nanoparticle scattering for color holograms[J]. Proceedings of the National Academy of Sciences of the United States of America, 2014, 111(35): 12679-12683. doi: 10.1073/pnas.1405262111
[43]	MONTELONGO Y, TENORIO-PEARL J O, MILNE W I, et al. Polarization switchable diffraction based on subwavelength plasmonic nanoantennas[J]. Nano Letters, 2014, 14(1): 294-298. doi: 10.1021/nl4039967
[44]	NI X J, KILDISHEV A V, SHALAEV V M. Metasurface holograms for visible light[J]. Nature Communications, 2013, 4(1): 2807. doi: 10.1038/ncomms3807
[45]	WANG Q, ZHANG X Q, XU Y H, et al. Broadband metasurface holograms: toward complete phase and amplitude engineering[J]. Scientific Reports, 2016, 6(1): 32867. doi: 10.1038/srep32867
[46]	LIU L X, ZHANG X Q, KENNEY M, et al. Broadband metasurfaces with simultaneous control of phase and amplitude[J]. Advanced Materials., 2014, 26(29): 5031-5036. doi: 10.1002/adma.201401484
[47]	HE J W, DONG T, CHI B H, et al. Meta-hologram for three-dimensional display in terahertz waveband[J]. Microelectronic Engineering, 2020, 220: 111151. doi: 10.1016/j.mee.2019.111151
[48]	JIA SH L, WAN X, SU P, et al. Broadband metasurface for independent control of reflected amplitude and phase[J]. AIP Advances, 2016, 6(4): 045024. doi: 10.1063/1.4948513
[49]	SONG X, HUANG L L, TANG CH CH, et al. Selective diffraction with complex amplitude modulation by dielectric metasurfaces[J]. Advanced Optical Materials, 2018, 6(4): 1701181. doi: 10.1002/adom.201701181
[50]	OVERVIG A C, SHRESTHA S, MALEK S C, et al. Dielectric metasurfaces for complete and independent control of the optical amplitude and phase[J]. Light:Science &Applications, 2019, 8(1): 92.
[51]	REN H R, FANG X Y, JANG J, et al. Complex-amplitude metasurface-based orbital angular momentum holography in momentum space[J]. Nature Nanotechnology, 2020, 15(11): 948-955. doi: 10.1038/s41565-020-0768-4
[52]	HWANG C Y, YI Y, CHOI C G. Reflection-type spatial amplitude modulation of visible light based on a sub-wavelength plasmonic absorber[J]. Optics Letters, 2016, 41(5): 990-993. doi: 10.1364/OL.41.000990
[53]	LIN J, GENEVET P, KATS M A, et al. Nanostructured holograms for broadband manipulation of vector beams[J]. Nano Letters, 2013, 13(9): 4269-4274. doi: 10.1021/nl402039y
[54]	MIN CH J, LIU J P, LEI T, et al. Plasmonic nano-slits assisted polarization selective detour phase meta-hologram[J]. Laser &Photonics Reviews, 2016, 10(6): 978-985.
[55]	XIE ZH W, LEI T, SI G Y, et al. Meta-holograms with full parameter control of wavefront over a 1000 nm bandwidth[J]. ACS Photonics, 2017, 4(9): 2158-2164. doi: 10.1021/acsphotonics.7b00710
[56]	LEE G Y, YOON G, LEE S Y, et al. Complete amplitude and phase control of light using broadband holographic metasurfaces[J]. Nanoscale, 2018, 10(9): 4237-4245. doi: 10.1039/C7NR07154J
[57]	XU Q, ZHANG X Q, XU Y H, et al. Polarization-controlled surface plasmon holography[J]. Laser &Photonics Reviews, 2017, 11(1): 1600212.
[58]	DENG Z L, JIN M K, YE X, et al. Full-color complex-amplitude vectorial holograms based on multi-freedom metasurfaces[J]. Advanced Functional Materials, 2020, 30(21): 1910610. doi: 10.1002/adfm.201910610
[59]	BAO Y J, YU Y, XU H F, et al. Full-colour nanoprint-hologram synchronous metasurface with arbitrary hue-saturation-brightness control[J]. Light:Science &Applications, 2019, 8(1): 95.
[60]	DENG Z L, DENG J H, ZHUANG X, et al. Diatomic metasurface for vectorial holography[J]. Nano Letters, 2018, 18(5): 2885-2892. doi: 10.1021/acs.nanolett.8b00047
[61]	FAN Q B, LIU M Z, ZHANG CH, et al. Independent amplitude control of arbitrary orthogonal states of polarization via dielectric metasurfaces[J]. Physical Review Letters, 2020, 125(26): 267402. doi: 10.1103/PhysRevLett.125.267402
[62]	YUE F Y, ZHANG CH M, ZANG X F, et al. High-resolution grayscale image hidden in a laser beam[J]. Light:Science &Applications, 2018, 7(1): 17129.
[63]	LI J X, LI Z L, DENG L G, et al. Dichroic polarizing metasurfaces for color control and pseudo-color encoding[J]. IEEE Photonics Technology Letters, 2021, 33(2): 77-80.
[64]	ZHANG CH M, DONG F L, INTARAVANNE Y, et al. Multichannel metasurfaces for anticounterfeiting[J]. Physical Review Applied, 2019, 12(3): 034028. doi: 10.1103/PhysRevApplied.12.034028
[65]	TANG Y T, INTARAVANNE Y, DENG J H, et al. Nonlinear vectorial metasurface for optical encryption[J]. Physical Review Applied, 2019, 12(2): 024028. doi: 10.1103/PhysRevApplied.12.024028
[66]	HUO P CH, SONG M W, ZHU W Q, et al. Photorealistic full-color nanopainting enabled by a low-loss metasurface[J]. Optica, 2020, 7(9): 1171-1172. doi: 10.1364/OPTICA.403092
[67]	WANG Q, ZHANG X Q, PLUM E, et al. Polarization and frequency multiplexed terahertz meta-holography[J]. Advanced Optical Materials, 2017, 5(14): 1700277. doi: 10.1002/adom.201700277
[68]	ZHANG X H, LI X, JIN J J, et al. Polarization-independent broadband meta-holograms via polarization-dependent nanoholes[J]. Nanoscale, 2018, 10(19): 9304-9310. doi: 10.1039/C7NR08428E
[69]	WANG L, LI T, GUO R Y, et al. Active display and encoding by integrated plasmonic polarizer on light-emitting-diode[J]. Scientific Reports, 2013, 3(1): 2603. doi: 10.1038/srep02603
[70]	GUO J Y, WANG T, QUAN B G, et al. Polarization multiplexing for double images display[J]. Opto-Electronic Advances, 2019, 2(7): 180029.
[71]	CHEN Y, GAO J, YANG X D. Chiral grayscale imaging with plasmonic metasurfaces of stepped nanoapertures[J]. Advanced Optical Materials, 2019, 7(6): 1801467. doi: 10.1002/adom.201801467
[72]	CHEN Y, YANG X D, GAO J. 3D Janus plasmonic helical nanoapertures for polarization-encrypted data storage[J]. Light:Science &Applications, 2019, 8(1): 45.
[73]	DENG J, DENG L G, GUAN Z Q, et al. Multiplexed anticounterfeiting meta-image displays with single-sized nanostructures[J]. Nano Letters, 2020, 20(3): 1830-1838. doi: 10.1021/acs.nanolett.9b05053
[74]	SHAN X, DENG L G, DAI Q, et al. Silicon-on-insulator based multifunctional metasurface with simultaneous polarization and geometric phase controls[J]. Optics Express, 2020, 28(18): 26359-26369. doi: 10.1364/OE.402064
[75]	DENG L G, DENG J, GUAN ZH Q, et al. Malus-metasurface-assisted polarization multiplexing[J]. Light:Science &Applications, 2020, 9(1): 101.
[76]	LI Z L, CHEN CH, GUAN ZH Q, et al. Three-channel metasurfaces for simultaneous meta-holography and meta-nanoprinting: a single-cell design approach[J]. Laser &Photonics Reviews, 2020, 14(6): 2000032.
[77]	DAI Q, GUAN ZH Q, CHANG SH, et al. A single-celled Tri-functional metasurface enabled with triple manipulations of light[J]. Advanced Functional Materials, 2020, 30(50): 2003990. doi: 10.1002/adfm.202003990