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可调微纳滤波结构的研究进展

余晓畅 许雅晴 蔡佳辰 袁梦琦 高博 虞益挺

余晓畅, 许雅晴, 蔡佳辰, 袁梦琦, 高博, 虞益挺. 可调微纳滤波结构的研究进展[J]. 中国光学, 2021, 14(5): 1069-1088. doi: 10.37188/CO.2021-0044
引用本文: 余晓畅, 许雅晴, 蔡佳辰, 袁梦琦, 高博, 虞益挺. 可调微纳滤波结构的研究进展[J]. 中国光学, 2021, 14(5): 1069-1088. doi: 10.37188/CO.2021-0044
YU Xiao-chang, XU Ya-qing, CAI Jia-chen, YUAN Meng-qi, GAO Bo, YU Yi-ting. Progress of tunable micro-nano filtering structures[J]. Chinese Optics, 2021, 14(5): 1069-1088. doi: 10.37188/CO.2021-0044
Citation: YU Xiao-chang, XU Ya-qing, CAI Jia-chen, YUAN Meng-qi, GAO Bo, YU Yi-ting. Progress of tunable micro-nano filtering structures[J]. Chinese Optics, 2021, 14(5): 1069-1088. doi: 10.37188/CO.2021-0044

可调微纳滤波结构的研究进展

doi: 10.37188/CO.2021-0044
基金项目: 深圳市学科布局项目(No. JCYJ20180508151936092);国家自然科学基金项目(No. 51975483);陕西省重点研发计划项目(No. 2020ZDLGY01-03);宁波市自然基金重点项目(No. 202003N4033);西北工业大学高峰体验计划(No. 201912);中国科学院光谱成像重点实验室开放基金项目(No. LSIT201912W)
详细信息
    作者简介:

    余晓畅(1994—),男,安徽广德人,博士研究生,2016年在西北工业大学获得学士学位,主要从事微纳滤波及多光谱成像方面的研究。  E-mail:yuxiaochang@mail.nwpu.edu.cn

    许雅晴(2000—),女,河南登封人,西北工业大学本科生,主要从事微纳滤波结构、多光谱成像、微纳高光谱相机装配集成等方面的研究。E-mail:xyq1159@mail.nwpu.edu.cn

    虞益挺(1980—),男,浙江宁波人,博士,教授,博士生导师,主要从事微纳光学成像与传感方面的应用基础研究。E-mail:yyt@nwpu.edu.cn

  • 中图分类号: O436.1; O436.2; O436.3

Progress of tunable micro-nano filtering structures

Funds: Supported by The Science, Technology and Innovation Commission of Shenzhen Municipality (No. JCYJ20180508151936092); National Natural Science Foundation of China (No. 51975483); Key Research and Development Project of Shaanxi Province (No. 2020ZDLGY01-03); Key Project of Ningbo Natural Science Foundation (No. 202003N4033); Peak Experience Project of Northwestern Polytechnical University (No. 201912); Open Foundation Project of the Key Laboratory of Spectroscopic Imaging of the Chinese Academy of Sciences (No. LSIT201912W)
More Information
  • 摘要: 传统的光谱成像系统体积较大、工作模式固定,难以满足日益复杂的应用需要。可调微纳滤波结构赋予了微型光谱成像系统轻量、灵活的独特优势,有望实现自适应、智能化的技术目标。本文综述了近些年来国内外已有的可调滤波方法和工作原理;论述了采用液晶及其他相变材料、诱导化学反应等静态式的可调方法,珐珀腔、微纳可调光栅等动态式的滤波结构以及机械拉伸、静电驱动、光驱动等实现手段;介绍了基于微流控芯片、石墨烯实现可调滤波的前沿工作;探讨了可调微纳滤波芯片面临的难题、挑战和未来的发展趋势。
  • 图  1  (a)偏振旋转器控制的亚表面非对称晶格纳米孔阵列示意图[18];(b)不同电压下的颜色输出:(1)没有输出分析器;(2)输出分析器与纳米孔晶格正交;(3)输出分析器与纳米孔晶格成135°;(4)输出分析器与纳米孔晶格成45°[16];(c)电可调谐滤波器构成:A为入口偏振器、B为等离子体纳米结构、C为四分之一波板、D为具有主延迟轴的液晶电池、E为具有固定取向的偏振器[19];(d)液晶等离子体纳米孔薄膜[20];(e)液晶铝纳米光栅电池的原理图[14]

    Figure  1.  (a) Electrical broad tuning of plasmonic color filter employing an asymmetric-lattice nanohole array of metasurfaces controlled by a polarization rotator[18]; (b) Experimental optical transmission. (1) No output analyzer; output analyzer (2) aligned orthogonal to nanohole lattice; (3) has a agle of 135° to nanopole lattice; (4) has a agle of 45° to nanopole lattice[16]; (c) elements of the filtering system. A is an entrance polarizer, B is the plasmonic nanostructures, C is a quarter waveplate, D is a liquid crystal cell and E is a polarizer with fixed orientation[19]; (d) switchable plasmonic film using nanoconfined liquid crystals[20]; (e) schematic of liquid-crystal tunable color filters based on aluminum metasurfaces[14]

    图  2  (a)在不同外加电压下液晶铝光栅滤波器的的透射色彩[14];(b)可调谐导模谐振滤波器示意图[23];(c)在不同的外加电压下,经过液晶偏振旋转器的线性偏振反射光的透射率极坐标图[23];(d)染料掺杂液晶全光偏振无关的可调导模共振滤波器[24];(e)由甲氧基偶氮苯染料的顺反异构转化引起液晶从N相到I相的等温相变的机理模型[24]

    Figure  2.  (a) Transmissive color appearance of the cells at various applied voltages[14]; (b) tunable polarizing reflector based on a liquid crystal-clad guided-mode resonator[23]; (c) polar graphs of transmittance of linearly polarised reflected light that has passed through an LC polarization rotator under various applied voltages[23]; (d)all-Optical and polarization-independent tunable guided-mode resonance filter based on a dye-doped liquid crystal incorporated with photonic crystal nanostructure[24]; (e) mechanism model for the isothermal phase transitions of LCs from Nematic phase(N) to isotropic phase(I) and I to N induced by 4-methoxyazobenzene, Fluka[24]

    图  3  (a)涂有ITO的玻璃衬底夹有液晶渗透的电可调透射型二氧化钛亚表面示意图[29];(b)在从0到12 V不断增加的DC电压下,与x方向夹角为(1)$\phi = {0^\circ }$,(2)$\phi = {45^\circ }$ 以及(3)$\phi = {90^\circ }$的入射偏振光在液晶渗透的TiO2亚表面电调谐下的实验结果,其中红色曲线表示电共振位置、黄色曲线表示磁共振位置[29];(c)集成到液晶盒中的硅纳米盘亚表面示意图[30]

    Figure  3.  (a) Schematic diagram of electrically tunable all dielectric TiO2 metasurfaces embedded in thin-layer nematic liquid crystals[29]; (b) experimental results of electrical tuning of the liquid crystal infiltrated TiO2 metasurface for the incident light polarization directions aligned at (1) $\phi = {0^\circ }$, (2) $\phi = {45^\circ }$ and (3) $\phi = {90^\circ }$ under the increased DC voltages from 0 to 12 V. The symbol-line curves mark out the movement of electric (red) and magnetic (yellow) resonance positions under the applied voltage[29]; (c) schematic diagram of active tuning of all-dielectric metasurfaces based on liquid crystals[30]

    图  4  (a)GST不同相态下介电常数与光子能量的关系[31];(b)GST不同相态下吸收系数与光子能量的关系[31]

    Figure  4.  (a) Relationship between dielectric constant and photon energy in different phase states of GST[31]; (b) relationship between absorption coefficient and photon energy in different phase states of GST[31]

    图  5  (a)ITO / GST / ITO器件示意图[35];(b)集成全光子非易失性多级存储器[36];(c)集成光子突触示意图[37];(d)基于相变材料的光学可重构超表面光子器件[38]

    Figure  5.  (a) Schematic diagram of ITO / GST / ITO device[35]; (b) integrated all-photonic non-volatile multi-level memory[36]; (c) schematic diagram of integrated photonic synapse[37]; (d) optically reconfigurable metasurfaces and photonic devices based on phase change materials[38]

    图  6  (a)可控制辐射通过与否的辐射冷却系统[39],由底部的VO2-Ge多层吸收器和顶部的滤波器组成;(b)基于VO2的热可调宽带吸收器示意图[40];(c)VO2混合式开环谐振装置示意图[42];(d)聚对苯二甲酸乙二酯衬底上未掺杂W和W掺杂的VO2薄膜图像;(e)使用MBE技术在蓝宝石衬底上生长的VO2薄膜的XRD图谱[45]

    Figure  6.  (a) A radiant cooling system that can control the passage of radiation[39], consisting of a VO2-Ge multilayer absorber on the bottom and a filter on the top; (b) schematic diagram of a thermally adjustable broadband absorber based on VO2[40]; (c) schematic diagram of VO2 hybrid open-loop resonator device[42]; (d) surface morphology images of VO2 film before and after W doping[44]; (e) XRD pattern of VO2 thin film grown on sapphire substrate by MBE technique[45]

    图  7  (a)使用SmNiO3薄膜器件示意图[46];(b)使用Pt光栅的薄膜SmNiO3器件示意图[46];(c)等离子超表面与SmNiO3薄膜组成的器件结构图[46];(d)模拟得到的SmNiO3薄膜器件、Pt光栅结合薄膜SmNiO3器件各自的光透过率变化曲线[46];(e)玻璃/ FTO / NiOx / CsPbI3-xBrx / ZnO / Al或ITO的新型光伏玻璃架构示意图[47]

    Figure  7.  (a) Schematic diagram of SmNiO3 thin film device[46]; (b) schematic diagram of thin film SmNiO3 device using Pt grating[46]; (c) structure diagram of the device composed of plasma metasurface and SmNiO3 thin film[46]; (d) light transmittance curves of SmNiO3 thin film device and Pt grating combined with SmNiO3 thin film device are obtained by simulation[46]; (e) schematic diagram of a new photovoltaic glass architecture of glass / FTO / NiOx /CsPbI3-xBrx / ZnO / Al or ITO[47].

    图  8  (a)新型电致变色器件设计[50];(b)结合电致变色和能量储存的伪电容玻璃窗的器件制备和工作原理[51];(c)FP腔结合化学反应的设计思路[53]

    Figure  8.  (a) Design of the new electrochromic device[50]; (b) preparation and working principle of pseudocapacitive glass windows that combines electrochromism and energy storage[51]; (c) design idea of FP-cavity combined with chemical reaction[53]

    图  9  (a)一种典型的石墨烯超材料纳米结构器件示意图[56];(b)基于L形石墨烯超材料的器件设计[58];(c)基于金属石墨烯超材料的双带阻滤波器示意图[59]

    Figure  9.  (a)Schematic diagram of a typical graphene metamaterial nanostructured device[56]; (b) device design based on L-shape graphene metamaterials[58]; (c) schematic diagram of dual band stop filter based on metal-graphene metamaterial[59]

    图  10  (a)填充液体后的微流控亚表面[65];基于亚波长光栅的微流控通道可调滤波结构俯视图(b)和横截面(c)示意图[62]T为光栅的周期,H为槽深,$w $为两个光栅之间的间距,$\theta $为入射角,${{{n}}_s}$为基底的折射率,${{{n}}_h}$为光栅区介质折射率,${{{n}}_l}$为微流体通道内流体折射率;(d)在不同溶剂环境中,采用明场显微镜观察二氧化钛表面的反射颜色[63];(e)多功能偏振转换器[64]

    Figure  10.  (a)Sample of liquid-metal-based metasurface filled with liquid[65]; (b) top view and (c) cross section of tunable narrow-band filter with sub-wavelength grating structure by micro-optofluidic technique[62]. T is grating period[62], H is grating depth, w is the distance between two gratings, θ is incident angle; ns is the refractive index of substrate, nh is the refractive index of gratings, nl is the refractive index of liquid; (d) color images of the TiO2 metasurface in different types of liquid[63]; (e) broadband wide-angle multifunctional polarization[64]

    图  11  (a)可调珐珀滤波器的MEMS结构横截面图[66];(b)Z型壁桥在25.5 V静电力驱动下的变形模拟仿真[66];(c)使用NIL制造的圆盘形谐振器的SEM图像及静电驱动式动态滤波可调滤波器[69]

    Figure  11.  (a) Cross section of MEMS structure of tunable Fabry-Pérot filter[66]; (b) simulation of deformation of Z-type wall bridge driven by 25.5 V electrostatic force[66]; (c) SEM image of disk resonator manufactured by NIL and electrostatic driving dynamic filter tunable filter[69]

    图  12  (a)大批量生产的MOEMS模块[70];(b)中小批量生产的压电驱动式可调珐珀滤波器模块[70];(c)TAM和TLNM示意图[71]

    Figure  12.  (a) MOEMS module for mass production[70]; (b) piezo driven adjustable Fabry Perot filter module for medium and small batch production[70]; (c) schematic diagram of TAM and TLNM[71]

    图  13  (a)基本的光栅光阀结构[73];(b)光栅光阀的反射状态和衍射状态[73];(c)PDMS闪耀透射光栅二维等密度拉伸模型[74];(d)主动调谐光栅耦合器工作原理[75]

    Figure  13.  (a)The structure of grating light valve[73]; (b) reflecting modes and diffracting modes of GLV[73]; (c) two-dimensional isometric density stretching model of PDMS blazed transmission grating[74]; (d) working principles of MEMS-based tunable grating coupler[75]

    图  14  (a)用于布拉格光栅的可变形滑动结构[76];(b)可调光栅的工作原理[80];(c)梳状制动器驱动光栅[80]

    Figure  14.  (a) Deformable slides used for tuning fiber Bragg gratings[76]; (b) working principles of tunable gratings[80]; (c) low-power optical beam steering by microelectromechanical waveguide gratings[80]

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  • 收稿日期:  2021-02-18
  • 修回日期:  2021-03-18
  • 网络出版日期:  2021-05-15
  • 刊出日期:  2021-09-18

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