蓝光二极管抽运Pr∶YLF腔内倍频连续深紫外激光器

牛娜; 窦微; 浦双双; 刘天虹; 魏程亮; 宋海龙; 郑权

doi:10.37188/CO.2021-0077

蓝光二极管抽运Pr∶YLF腔内倍频连续深紫外激光器

doi: 10.37188/CO.2021-0077

牛娜^1,,
窦微¹,
浦双双¹,
刘天虹^{1, 2},
魏程亮¹,
宋海龙¹,
郑权^{1, 2, ,}

1.
长春新产业光电技术有限公司，吉林长春 130012
2.
中国科学院长春光学精密机械与物理研究所，吉林长春 130033

基金项目: 吉林省科技攻关计划 (No. 20170203013GX)

详细信息

作者简介:
牛　娜（1986—），女，吉林四平人，激光工程师，2012年于长春理工大学获得光学硕士学位，现任职于长春新产业光电技术有限公司，主要从事固体激光器技术与应用方面的研究。Email：niuna@cnilaser.com

郑　权(1973—)，男，黑龙江甘南人，2002年于中国科学院长春光学精密机械与物理研究所获得博士学位，主要从事高性能及大功率固体激光器方向的研究。Email：zhengquan@cnilaser.com

中图分类号: TN248.1
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出版历程
- 收稿日期: 2021-04-13
- 修回日期: 2021-05-11
- 网络出版日期: 2021-05-28
- 刊出日期: 2021-11-19

Continuous deep ultraviolet laser by intracavity frequency doubling of blue laser diode pumped Pr∶YLF

1.
Changchun New Industries Optoelectronics Technology Co., Ltd, Changchun 130012, China
2.
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science, Changchun 130033, China

Funds: Supported by Science and Technology Program of Jilin Province (No. 20170203013GX)

More Information

Corresponding author: zhengquan@cnilaser.com

摘要

摘要: 为了探究波长200~280 nm内连续深紫外激光输出，本文采用输出功率为1.4 W、中心波长为444 nm和输出功率为1.5 W、中心波长为469 nm的两个蓝光激光二极管（LD）合光作为泵浦源，端面泵浦长度为5 mm的国产Pr∶YLF晶体，再利用长度为7 mm的偏硼酸钡（BBO）作为倍频晶体进行腔内倍频，通过优化腔镜膜系设计和加入全波片配合波长选择，实现了Pr∶YLF晶体的弱谱线倍频输出，最终成功获得了最大输出功率为8.37 mW、中心波长为268.89 nm的连续深紫外激光。
- 激光器 /
- 连续深紫外激光器 /
- 掺镨氟化钇锂晶体 /
- 蓝光激光二极管
Abstract: In order to explore the continuous deep ultraviolet laser output within the wavelength of 200~280 nm, a 5 mm long domestic Pr∶YLF crystal was pumped by the combine of 1.4 W blue laser diode at 444 nm and 1.5 W blue laser diode at 469 nm, and the BBO with a length of 7 mm was used as the frequency doubling crystal. By optimizing the resonator mirror coating and inserting a full wave plate for wavelength competition, it makes the output of weak spectra of Pr∶YLF possible. At last, the continuous deep ultraviolet laser with a maximum power of 8.37 mW and center wavelength of 268.89 nm was achieved.
- laser /
- continuous deep UV laser /
- Pr∶YLF crystal /
- blue laser diode

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图 1 蓝光二极管泵浦的Pr∶YLF激光器装置示意图

Figure 1. Schematic diagram of blue laser diode pumped Pr∶YLF laser

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图 2 Pr∶YLF晶体的荧光谱线

Figure 2. Emission spectra of Pr∶YLF crystal

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图 3 基频光光谱测试图

Figure 3. Spectrogram of fundamental laser

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图 4 连续紫外光光谱测试图

Figure 4. Spectrogram of continuous ultraviolet laser

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参考文献(18)

[1]	刘学胜, 杨松, 司汉英, 等. 1 J高光束质量免水冷脉冲Nd∶YAG激光器[J]. 发光学报,2019,40(12):1523-1530. doi: 10.3788/fgxb20194012.1523 LIU X SH, YANG S, SI H Y, et al. High beam quality water-free pulsed Nd∶YAG laser with output energy 1 J[J]. Chinese Journal of Luminescence, 2019, 40(12): 1523-1530. (in Chinese) doi: 10.3788/fgxb20194012.1523
[2]	刘宇乾, 张贺, 金亮, 等. 紧凑型准连续泵浦调Q Nd∶YAG激光器[J]. 中国光学,2019,12(2):413-424. doi: 10.3788/co.20191202.0413 LIU Y Q, ZHANG H, JIN L, et al. Compact quasi continuous pumped Nd∶YAG Q-switched solid laser[J]. Chinese Optics, 2019, 12(2): 413-424. (in Chinese) doi: 10.3788/co.20191202.0413
[3]	崔建丰, 岱钦, 邬小娇, 等. LD侧面泵浦Nd∶YVO₄高重频紫外激光器[J]. 发光学报,2019,40(8):1011-1014. doi: 10.3788/fgxb20194008.1011 CUI J F, DAI Q, WU X J, et al. LD-side pumping Nd∶YVO₄ high repetition rate UV laser[J]. Chinese Journal of Luminescence, 2019, 40(8): 1011-1014. (in Chinese) doi: 10.3788/fgxb20194008.1011
[4]	王晓洋, 刘丽娟. 深紫外非线性光学晶体及全固态深紫外相干光源研究进展[J]. 中国光学,2020,13(3):427-441. WANG X Y, LIU L J. Research progress of deep-UV nonlinear optical crystals and all-solid-state deep-UV coherent light sources[J]. Chinese Optics, 2020, 13(3): 427-441. (in Chinese)
[5]	苏畅, 马宇航, 丁可可, 等. 紫外激光器应用进展[J]. 光电子,2021,11(1):26-34. doi: 10.12677/OE.2021.111004 SU CH, MA Y H, DING K K et al. Application progress of ultraviolet laser[J]. Optoelectronics, 2021, 11(1): 26-34. (in Chinese) doi: 10.12677/OE.2021.111004
[6]	王芳. 高能深紫外激光的产生及应用技术研究[D]. 绵阳: 中国工程物理研究院, 2020: 1-2. WANG F. Study on generation and application of high energy DUV lasers[D]. Mianyang: China Academy of Engineering Physics, 2020: 1-2. (in Chinese)
[7]	李林, 李正佳, 何艳艳. 全固态紫外激光器研究进展[J]. 激光杂志,2005,26(6):1-3. doi: 10.3969/j.issn.0253-2743.2005.06.001 LI L, LI ZH J, HE Y Y. Progress of search on all solid-state ultraviolet laser[J]. Laser Journal, 2005, 26(6): 1-3. (in Chinese) doi: 10.3969/j.issn.0253-2743.2005.06.001
[8]	郝大伟. 微电子加工用266 nm紫外DPL[D]. 长春: 长春理工大学, 2010: 4-5. HAO D W. 266 nm ultraviolet DPL for microelectronics processing[D]. Changchun: Changchun University of Science and Technology, 2010: 4-5. (in Chinese)
[9]	霍晓伟, 齐瑶瑶, 李宇琪, 等. LD泵浦掺Pr³⁺的可见光固体激光器研究进展[J]. 光电技术应用,2019,34(5):7-15. doi: 10.3969/j.issn.1673-1255.2019.05.002 HUO X W, QI Y Y, LI Y Q, et al. Research progress of LD-pumped Pr³⁺-doped solid-state laser in visible wavelength[J]. Electro-Optic Technology Application, 2019, 34(5): 7-15. (in Chinese) doi: 10.3969/j.issn.1673-1255.2019.05.002
[10]	RICHTER A, HEUMANN E, OSIAC E, et al. Diode pumping of a continuous-wave Pr³⁺-doped LiYF₄ laser[J]. Optics Letters, 2004, 29(22): 2638-2640. doi: 10.1364/OL.29.002638
[11]	RICHTER A, HEUMANN E, HUBER G, et al. Power scaling of semiconductor laser pumped Praseodymium-lasers[J]. Optics Express, 2007, 15(8): 5172-5178. doi: 10.1364/OE.15.005172
[12]	XU B, CAMY P, DOUALAN J L, et al. Visible laser operation of Pr³⁺-doped fluoride crystals pumped by a 469 nm blue laser[J]. Optics Express, 2011, 19(2): 1191-1197. doi: 10.1364/OE.19.001191
[13]	OSTROUMOV V, SEELERT W, HUNZIKER L, et al. 522/261 nm cw generation of Pr∶YLF laser pumped by OPS laser[J]. Proceedings of SPIE, 2007, 6451: 645104. doi: 10.1117/12.705521
[14]	OSTROUMOV V, SEELERT W. 1 W of 261 nm cw generation in a Pr³⁺∶LiYF₄ laser pumped by an optically pumped semiconductor laser at 479 nm[J]. Proceedings of SPIE, 2008, 6871: 68711K. doi: 10.1117/12.767511
[15]	GÜN T, METZ P, HUBER G. Efficient continuous wave deep ultraviolet Pr³⁺∶LiYF₄ laser at 261.3 nm[J]. Applied Physics Letters, 2011, 99(18): 181103. doi: 10.1063/1.3657150
[16]	陈晴, 浦双双, 牛娜, 等. 双波长蓝光LD抽运Pr∶YLF晶体倍频261 nm紫外激光器[J]. 红外与激光工程,2020,49(S1):20200090. CHEN Q, PU SH SH, NIU N, et al. 261 nm frequency-doubling UV laser in bi-wavelength blue laser diode pumped Pr∶YLF crystal[J]. Infrared and Laser Engineering, 2020, 49(S1): 20200090. (in Chinese)
[17]	牛娜, 曲大鹏, 窦微, 等. 蓝光二极管抽运掺镨氟化钇锂晶体腔内倍频348.9 nm紫外激光器[J]. 中国激光,2018,45(12):1201003. doi: 10.3788/CJL201845.1201003 NIU N, QU D P, DOU W, et al. 348.9 nm intra-cavity frequency-doubling ultraviolet laser in blue laser diode pumped Pr∶YLF crystal[J]. Chinese Journal of Lasers, 2018, 45(12): 1201003. (in Chinese) doi: 10.3788/CJL201845.1201003
[18]	HUBER G, RICHTER A, HEUMANN E. Continuous wave Praseodymium solid-state lasers[J]. Proceedings of SPIE, 2007, 6451: 645102. doi: 10.1117/12.708561