绿光波段60 pm超窄带滤光片的研制

王凯旋; 陈刚; 刘定权; 马冲; 张秋玉

doi:10.37188/CO.2021-0092

绿光波段60 pm超窄带滤光片的研制

王凯旋^{1, 2, 3,},
陈刚^1,,
刘定权^{1, 2, 3, ,},
马冲¹,
张秋玉^{1, 3}

1.
中国科学院上海技术物理研究所，上海 200083
2.
上海科技大学物质学院，上海 201210
3.
中国科学院大学，北京 100049

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出版历程
- 收稿日期: 2021-04-23
- 修回日期: 2021-05-21
- 录用日期: 2021-08-11
- 网络出版日期: 2021-08-11
- 刊出日期: 2022-01-19

Fabrication of an ultra-narrow band-pass filter with 60 pm bandwidth in green light band

doi: 10.37188/CO.2021-0092

WANG Kai-xuan^{1, 2, 3
,},
CHEN Gang^1
,,
LIU Ding-quan^{1, 2, 3
, ,},
MA Chong¹,
ZHANG Qiu-yu^{1, 3}

1.
Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China
2.
School of Physical Science and Technology, ShanghaiTech University, Shanghai 200031, China
3.
University of Chinese Academy of Sciences, Beijing 100049, China

Funds: Supported by Natural Science Foundation of Shanghai Municipality, China (No. 17ZR1434900)

More Information

Author Bio:
Wang Kai-xuan (1992—), male, born in Bozhou, Anhui Province. Doctor. He received his Bachelor’s degree from Beijing University of Aeronautics and Astronautics in 2013. Now he mainly engages in the research of optical thin film materials and devices. E-mail: wangkx@shanghaitech.edu.cn

Chen Gang (1983—), male, born in Yinxian County, Zhejiang Province. Doctor and senior engineer. He mainly engages in the design, development and space application of optical films. E-mail: gangchen@mail.sitp.ac.cn

Liu Ding-quan (1964—), male, born in Chenggu, Shaanxi Province. Doctor, doctoral supervisor and researcher. Currently he is the director of the research office of optical films, materials and devices, and the distinguished professor of Shanghai University of Science and Technology. His research is focused on the thin film optics and technology, infrared optical thin film and space application, and micro nano optics, etc. E-mail: dqliu@mail.sitp.ac.cn

Corresponding author: dqliu@mail.sitp.ac.cn

摘要

摘要: 波长为532 nm的绿色激光在大气层中有较强的穿透能力，可用于自由空间光通信和激光三维测绘，为了抑制背景光的干扰，需要半功率带宽小于100 pm的光谱滤波器。因此，设计并研制了基于光学干涉薄膜的超窄带滤光片。将五氧化二钽（Ta₂O₅）和二氧化硅（SiO₂）分别作为高低折射率膜层材料，将熔石英作为基片，采用双离子束溅射沉积方法制备出所设计的光学薄膜。利用可调谐激光器和功率计测量滤光片的透射光谱，其半功率带宽为（60±2） pm，透过率达到62.6%。
- 光学薄膜 /
- 薄膜滤光片 /
- 皮米带宽 /
- 绿光波段 /
- 空间激光测绘
Abstract: Owing to the strong penetrating ability in the atmosphere, 532 nm-wavelength green laser has wide applications including free-space optical communications and laser three-dimensional mapping. A spectral filter, with a half-power bandwidth of less than 100 pm, is an important optical element to suppress the interference of background light. Therefore, an ultra-narrow band-pass filter based on optical interference film is designed and fabricated in this paper. The high and low refractive index film are made of tantalum pentoxide (Ta₂O₅) and silicon dioxide (SiO₂), respectively. The designed optical thin films are deposited on a fused quartz substrate by double-ion-beam sputtering deposition method. The transmission spectra of the filters are measured by a tunable laser and a power meter. The half-power bandwidths of the filters are (60±2) pm, and the transmittance reaches 62.6%.
- optical thin film /
- thin film filter /
- picometer bandwidth /
- green light band /
- space laser mapping

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图 1 设计的超窄带滤光片透射光谱

Figure 1. Transmittance spectra of the designed ultra-narrow band-pass filter

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图 2 透射光控信号随膜层的变化

Figure 2. Variation of the transmittance of optical signal as a function of the number of film layers

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图 3 各个膜层误差对光谱影响的敏感度

Figure 3. Sensitivity of film layer error on filter spectrum in each layer

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图 4 分成两片监控后光控信号的变化

Figure 4. Change of optical monitoring signal by using two separated monitor glass plates

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图 5 透射光谱测量装置示意图

Figure 5. Schematic diagram of the transmission spectrum measurement setup

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图 6 测量的超窄带通滤光片的透射光谱

Figure 6. Measured transmission spectrum of the ultra-narrow band-pass filter

下载: 全尺寸图片幻灯片

图 7 随机引入控制误差后的光谱曲线变化情况

Figure 7. Variation of spectral curves after randomly introducing the control errors

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图 8 粗糙基片表面与薄膜分界示意图

Figure 8. Schematic diagram of the boundary between rough substrate surface and thin film

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表 1 Comparison of main filtering techniques for sub-nanometer spectrum in visible light band

Table 1. Comparison of main filtering techniques for sub-nanometer spectrum in visible light band

Spectral filtering technique	Spectral fineness	Optical efficiency	Wave option	Structure	Stability
Acoustoptic modulation	1~0.01 nm	Medium	Fast modulated	Complex	Good
Atomic filtering	1~0.001 nm	High−low	Fixed, fewer options	Complex	Not bad
F-P etalon	1~0.002 nm	High	Fixed, more options	Somewhat complex	Good
Film interference	1~0.03 nm	High	Fixed, more options	Simple	Very good

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表 2 Data of measured and designed transmission spectrum

Table 2. Data of measured and designed transmission spectrum

	Bandwidth (pm)	Peak transmittance (%)	Central wavelength (nm)
A. Design value (without absorption)	57	93.4	532.00
B. Design value (with absorption)	63	74.3	532.00
C. Measured value	62	62.6	532.009
D. Deviation value (from B)	−1	−11.7	+0.009

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表 3 Optical and thermal properties of substrates and thin films in this study^{[12, 21-22]}

Table 3. Optical and thermal properties of substrates and thin films in this study^{[12, 21-22]}

Materials	Refractive index, n@ 532nm,20~40 ℃	Refractive-index temperature coefficient, dn/dT (10⁻⁶/℃)	Linear expansion coefficient, α (10⁻⁶/℃) @0~100 ℃
Crystal Quartz (CQ)	1.55	5.2	13.4
Fused quartz (JGS-1)	1.46	10.0	0.55
Glass ceramics (Zerodur)	1.54	14.3	0.05
Glass (K9, BK7)	1.52	3.0	7.4
Sapphire (Al₂O₃)	1.77	13.1	6.7
SiO₂ film	1.44	9.0	0.55
Ta₂O₅ film	2.11	20.0	1.1

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