Development of a 36-element piezoelectric deformable mirror for synchrotron radiation and its surface control ability
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摘要: 第4代同步辐射光源及自由电子激光装置中束线光学系统对光学元件性能提出了苛刻的要求。使用压电变形镜是实现超高面形精度调控和实施波前补偿的有效途径，也是目前亟需突破的国产化技术瓶颈。针对这一问题，研制了长度为200 mm、含36个单元压电促动器的压电变形镜。通过数值模拟优化了变形镜结构参数，利用国产工艺完成了变形镜样机的制作，并对其面形调控能力进行初步探究。测试结果表明：所研制变形镜样机的平面面形误差可降低至1.38 nm (rms)，斜率误差降低至240 nrad (rms)，实现了平面面形的nm级调控。Abstract: Ultra-high quality optical elements are demanded by beamlimes on fourth-generation synchrotron facilities and free-electron laser facilities. A bimorph mirror is effectively used to achieve ultra-high-precision surface profile control and wavefront correction, yet it’s one of the bottlenecks of domestic techniques and must be overcome. In order to accomplish this, a 200 mm long bimorph mirror with 36 elements of piezoelectric actuators was developed. The structure parameters of the bimorph mirror were optimized by numerical simulation, and the bimorph mirror was fabricated by domestic technology. The test results show that the surface profile error and slope error of the bimorph mirror can be reduced to 1.38 nm (rms) and 240 nrad (rms), thus the nanoscale control of the mirror surface profile was realized.
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Key words:
- bimorph mirror /
- surface profile error /
- synchrotron radiation /
- adaptive optics
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图 2 PZT促动能力（红）、PZT表面弯曲对反射镜面形造成的影响（黑）与PZT厚度关系
Figure 2. Relationship between the thickness of PZT and the actuation capacity of PZT (red) as well as that between the thickness of PZT and the influence of PZT’s bend on mirror surface (black)
表 1 变形镜材料参数
Table 1. Material parameters of bimorph mirror
材料 尺寸/mm3 密度/(kg·m−3） 泊松比 杨氏模量/MPa Si 200×55×10 2329 0.28 170000 PZT 200×17.5×d 7500 0.34 63000 
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表 2 变形镜重复性
Table 2. Repeatability of bimorph mirror
时间/天 0 1 2 3 4 PV/nm 3.75 3.92 3.44 4.03 3.68 rms/nm 1.38 1.53 1.21 1.65 1.51
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