Design of optical system for quality evaluation of a large rectangular aperture laser beam
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摘要: 自适应光学校正技术可有效提升固体板条激光器的光束质量，但随着激光器输出功率的提升，输出光束口径逐渐增加，系统体积逐渐增大，自适应光学校正系统的设计难度也增加了。因此，在满足自适应光学校正系统中共轭探测等需求的前提下，统筹优化系统的尺寸参数，同时实现波前相位、光束质量评估等多参数的检测具有一定的研究意义。本文在系统整体尺寸为350 mm×180 mm×220 mm（长×宽×高）的条件下，研究实现了板条激光器输出160 mm×120 mm矩形光束多参数的检测。针对探测口径大、筒长限制、长出瞳距等技术要求，首先，利用双高斯初始结构的消像差特点，结合非球面技术，采用大倍率光束压缩后分光探测的设计方案，实现多参数的同时探测。其次，基于摄远成像和共轭成像等原理，确定系统初始参数。接着，建立仿真模型分析系统的成像质量和公差，为实验的搭建提供依据。最后，搭建实验平台验证设计结果。结果表明：所设计系统可在满足物像共轭、尺寸约束等条件下，实现对大口径矩形光束的共轭波前探测、光强均匀度检测和光束质量评估。实验测得被测光束β因子为1.24倍衍射极限，均匀度为73.8%，满足技术指标要求。Abstract: The adaptive optical correction technology can effectively improve the beam quality of solid slab lasers, but with the increase of laser output power, the output beam aperture and the system volume increase gradually, which make the design of adaptive optical correction system more difficult. Therefore, under the premise of meeting the requirements of conjugate detection in the adaptive optical correction system, it is of certain research significance to optimize the size parameters of the detection system as a whole, and realize the detection of multiple parameters such as wavefront phase and beam quality evaluation. In this paper, we realized the multi-parameter detection of 160 mm×120 mm rectangular beam emitted by slab laser under the condition that the overall size of the system is 350 mm×180 mm×220 mm (length × width × height). According to the technical requirements of large detection apertures, limitation of tube length and long exit pupil distance, firstly, the dual-Gaussian initial structure was used to eliminate the aberration. Combined with the aspheric surface technology, the design scheme of splitting detection after high-ratio beam compression was adopted to realize the simultaneous detection and evaluation of multiple parameters. Secondly, the initial parameters of the system were determined based on the principles of telephoto imaging and conjugate imaging. Thirdly, the simulation model of the detection system was established to analyze the imaging quality and the tolerance of the system, which were implemented to provide the basis for the construction of the experiment. Finally, the experiments were carried out to verify the design results. Results indicate that the conjugate wavefront detection, light intensity uniformity detection and beam quality evaluation of 160 mm × 120 mm rectangular beam can be realized under the conditions of the object-image conjugation and size constraint conditions. In the experiment, the β factor of the measured beam is 1.24 times the diffraction limit, and the uniformity is 73.8 %, which meet the technical requirements.
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图 1 矩形大口径激光光束质量评价系统示意图
Figure 1. Schematic diagram of evaluation system of the large rectangular aperture laser beam quality
图 3 主缩束系统的光学结构示意图
Figure 3. Schematic diagram of optical structure of main beam compression system
图 4 非球面子午曲率和弧矢曲率曲线图
Figure 4. Curves of tangential and sagittal curvature of aspheric surfaces
图 5 主缩束系统像质评价
Figure 5. Image quality evaluation results of the main beam compression system
图 6 光束质量探测子系统波像差
Figure 6. Wavefront aberration of the beam quality detection subsystem
图 9 光束质量探测系统像质评价
Figure 9. Evaluation results of the image quality of the beam quality detection system
图 10 光束均匀性探测子系统波像差
Figure 10. Wavefront aberration of the beam uniformity detection subsystem
图 12 光束均匀性探测系统加入理想透镜2D图
Figure 12. 2D diagram of the beam uniformity detection system with an ideal lens
图 13 光束均匀性探测系统像质分析
Figure 13. Evaluation of the image quality of the beam uniformity detection system
图 14 矩形大口径近红外激光光束质量评价系统
Figure 14. Beam quality evaluation system of the large rectangular aperture near-infrared laser
表 1 激光光束质量评价系统的技术指标
Table 1. The technical specifications of the laser beam quality evaluation system
参数 数值 主缩束装置倍率 11× 主缩束系统通光口径 160 mm×120 mm 视场 ±3′ 波长 (1064±0.3) nm 主缩束入瞳位置 500 mm 主缩束出瞳位置 ≥40 mm 主缩束系统筒长 ≤320 mm 主缩束系统配合光束质量
探测光学系统EFFL5500 mm 光束均匀性探测光学系统
缩束倍率4.5× 光束质量β因子 ≤1.3×DL 系统整体尺寸 350 mm×180 mm×220 mm
(长×宽×高)
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表 2 主缩束系统透镜数据
Table 2. Lens data of the main beam compression system
Type Radius Thickness Glass Even Asphere 440.000 22.893 H-ZLAF52A Standard −2924.268 1.000 − Standard 231.431 28.018 H-ZLAF55D Standard 925.079 56.403 − Standard 394.602 10.800 H-ZF73 Standard 64.282 30.000 H-ZLAF68C Standard 191.455 154.885 − Standard −13.435 2.009 H-ZLAF55D Standard −1053.154 4.077 − Standard −20.488 4.037 H-ZLAF53B Standard −13.485 0.811 − Standard 311.182 4.496 H-ZLAF53B Standard −25.212 41.405 −
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表 3 光束质量探测子系统透镜数据
Table 3. Lens data of beam quality detection subsystem
Radius Thickness Glass 36.523 7.047 H-ZLA 415.691 20.267 — −38.384 8.628 H-ZF88 155.064 38.737 — −124.904 5.558 H-ZLA 12.285 45.272 —
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表 4 光束质量探测系统的公差数据
Table 4. Tolerance data of beam quality detection system
No. Radius Thickness/mm Decenter
(X/Y)/mmTilt
(X/Y)/(′)Index Abbe. Len1 ±0.02 ±0.025 ±0.01 ±0.7 ±0.0005 ±0.08% Len2 ±0.02 ±0.025 ±0.01 ±0.6 ±0.0005 ±0.08% Len3 ±0.02 ±0.025 ±0.01 ±0.7 ±0.0005 ±0.08% Len4 ±0.03 ±0.025 ±0.03 ±0.1 ±0.002 ±0.2% Len5 ±0.03 ±0.0375 ±0.01 ±1.5 ±0.002 ±0.2% Len6 ±0.03 ±0.0375 ±0.02 ±1.5 ±0.002 ±0.2% Len7 ±0.03 ±0.0375 ±0.02 ±2 ±0.002 ±0.3% Len8 ±0.03 ±0.0375 ±0.02 ±2 ±0.002 ±0.3% Len9 ±0.03 ±0.0375 ±0.02 ±2 ±0.002 ±0.3%
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表 5 光束质量探测系统的1000次蒙特卡罗分析结果
Table 5. 1000 Monte Carlo statistical analysis results of the beam quality detection system
Percentage of Monte Carlo/% RMS Wavefront 98 0.2715 90 0.1871 80 0.1586 50 0.1109
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表 6 光束均匀性探测子系统透镜数据
Table 6. Lens data of the beam uniformity detection subsystem
Radius Thickness Glass 66.752 3.964 H-ZF7LA Infinity 0.800 − −154.456 6.000 H-ZF7LAGT −340.621 117.358 − −5.693 3.326 H-K9L −7.277 1.000 − −23.127 3.893 H-ZLAF68N −10.385 3.000 − −6.247 3.950 H-K9L −6.247 26.932 −
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表 7 光束均匀性探测系统公差数据
Table 7. Tolerance data of the beam uniformity detection system
No. Radius Thickness Decenter (X/Y)/mm Tilt (X/Y)/(′) Index Abbe. Len1 ±0.02 ±0.025 mm ±0.01 ±0.8 ±0.0005 ±0.08% Len2 ±0.02 ±0.025 mm ±0.01 ±0.6 ±0.0005 ±0.08% Len3 ±0.02 ±0.025 mm ±0.01 ±0.8 ±0.0005 ±0.08% Len4 ±0.03 ±0.035 mm ±0.03 ±1.5 ±0.0005 ±0.2% Len5 ±0.03 ±0.035 mm ±0.01 ±1.5 ±0.003 ±0.2% Len6 ±0.03 ±0.035 mm ±0.03 ±1.5 ±0.003 ±0.2% Len7 ±0.03 ±0.035 mm ±0.03 ±3.0 ±0.001 ±0.2% Len8 ±0.03 ±0.035 mm ±0.03 ±3.0 ±0.003 ±0.2% Len9 ±0.03 ±0.035 mm ±0.03 ±3.0 ±0.003 ±0.2% Len10 ±0.03 ±0.035 mm ±0.03 ±3.0 ±0.003 ±0.2% Len11 ±0.03 ±0.035 mm ±0.03 ±3.0 ±0.003 ±0.2%
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表 8 光束均匀性探测系统1000次蒙特卡罗分析结果
Table 8. 1000 Monte Carlo statistical analysis results of the beam uniformity detection system
Percentage of Monte Carlo RMS Wavefront 98% 0.2403 90% 0.1874 80% 0.1625 50% 0.1189
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