数字微镜器件（DMD）杂散光特性测试方法及装置

姚雪峰; 高毅; 龙兵; 于晨阳; 李文昊; 于宏柱; 张靖; 李晓天

doi:10.37188/CO.2021-0132

数字微镜器件（DMD）杂散光特性测试方法及装置

doi: 10.37188/CO.2021-0132

姚雪峰^1,,
高毅^2, ,,
龙兵^3, ,,
于晨阳⁴,
李文昊¹,
于宏柱¹,
张靖^{1, 5},
李晓天¹

1.
中国科学院长春光学精密机械与物理研究所，吉林长春 130033
2.
中国刑事警察学院痕迹检验鉴定技术公安部重点实验室，辽宁沈阳 110035
3.
刑事检验四川省高校重点实验室(四川警察学院)，四川泸州 646000
4.
中国电子科技集团公司第十研究所，四川成都 610036
5.
中国科学院大学，北京 100049

基金项目: 吉林省科技发展计划项目(No. 20210203053SF, No. 20190302047GX, No. 20190201104JC, No. 20200404197YY)；刑事检验四川高校重点实验室开放课题(No. 2019ZD02)；国家自然科学基金项目(No. 61975255, No. U2006209, No. 61505204)；公安部科技强警基础工作专项项目(No. GABJC04)；辽宁省教育厅重大科研经费项目(No. ZGXJ2020002)；中国刑事警察学院科研基金项目(No. D2019036)

详细信息

作者简介:
姚雪峰（1985—），男，吉林永吉人，博士，副研究员，2009年于吉林大学获得硕士学位,2018年于中国科学院大学获得博士学位，主要从事新型光谱仪器以及天文光谱仪器方面的研究。E-mail:yaoxf@ciomp.ac.cn

高　毅（1978—），男，吉林省吉林市人，硕士，副教授，2006年于长春理工大学获得硕士学位，主要从事痕迹检验与鉴定。E-mail：396406005@qq.com

龙　兵（1980—），男，四川德阳人，博士，副教授，2007年、2014年于四川大学分别获得硕士、博士学位，主要从事刑事科学技术研究。E-mail：longbing001122@163.com

中图分类号: TP394.1;TH691.9
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出版历程
- 收稿日期: 2021-06-29
- 修回日期: 2021-07-22
- 网络出版日期: 2021-10-16
- 刊出日期: 2022-03-21

Method and device for testing stray light characteristics of Digital Micro-mirror Device (DMD)

YAO Xue-feng^1
,,
GAO Yi^{2
, ,},
LONG Bing^{3
, ,},
YU Chen-yang⁴,
LI Wen-hao¹,
YU Hong-zhu¹,
ZHANG Jing^{1, 5},
LI Xiao-tian¹

1.
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
2.
Key Laboratory of Trace Testing and Identification Technology of the Ministry of Public Security, Criminal Investigation Police University of China, Shenyang 110035, China
3.
Key Laboratory of Sichuan Higher Education Criminal Science and Technology Laboratory (Sichuan Police College), Luzhou 646000, China
4.
China Electronics Technology Group Corporation(CETC10)，Chengdu 610036,China
5.
University of Chinese Academy of Sciences, Beijing 100049, China

Funds: Supported by Jilin Province Science and Technology Development Plan Project (No. 20210203053SF, No. 20190302047GX, No. 20190201104JC, No. 20200404197YY); Open Project of Key Laboratory of Criminal Inspection in Sichuan Universities (No. 2019ZD02); National Natural Science Foundation of China (No. 61975255, No. U2006209, No. 61505204); Special Project of the Ministry of Public Security on the Basic Work of Strengthening the Police Through Science and Technology (No. GABJC04); Major Scientific Research Fund Project of Liaoning Provincial Department of Education (No. ZGXJ2020002); Scientific Research Fund Project of China Criminal Police Academy (No. D2019036)

More Information

Corresponding author: 396406005@qq.com; longbing001122@163.com

摘要

摘要: 为了获得数字微镜器件（DMD）的真实光学特性，提出了微镜单元杂散光分布测试方法，并搭建实验装置对2×2阵列区域微镜单元的杂散光分布情况进行测试。提出了一种杂散光测试方法，并针对微镜单元尺寸小、配置方式灵活的特点，设计了汇聚光斑大小连续可调的照明系统以及可以对微镜单元清晰成像的成像系统。通过实验得到了2×2阵列区域微镜单元的杂散光分布情况。测试结果表明，单个微镜单元中心孔道位置附近反射的能量较强，靠近边缘位置反射的能量则相对较弱。此外，测试区域之外的微镜单元也会反射一部分能量，测试区域内微镜单元杂散光绝对强度最大值出现在中心孔道附近，其灰度值为6.86，紧邻测试区域微镜单元杂散光绝对强度最大值同样也出现在中心孔道附近，其灰度值为4.01，由此可以说明中心孔道位置附近的杂散光较强；测试区域内微镜单元的杂散光相对强度相对较弱，从测试区域边缘开始急剧增大，经过大约两个微镜单元后达到峰值，数值为293.5%，此后开始急剧下降。
- 数字微镜器件 /
- 微镜单元 /
- 杂散光分析 /
- 成像特性 /
- 精密测量
Abstract: In order to obtain the true optical characteristics of a Digital Micro-mirror Device (DMD), a test method for the stray light distribution of the micro-mirror unit was proposed and an experimental device was built to test the stray light distribution of a micro-mirror unit in the 2×2 array area.First, a stray light test method is proposed. Then, in view of the small size of the micro-mirror unit and the flexible configuration mode, an illumination system with a continuously adjustable convergent spot size and an imaging system that can clearly image the micro-mirror unit was designed. Finally, the stray light distribution of the micro-mirror unit in the 2×2 array area was obtained through experimentation.The test results show that the reflection energy near the center channel of a single micro-mirror unit is strong, while the reflection energy near the edge is relatively weak. In addition, the micro-mirror unit also reflects part of the energy outside the test area. The maximum absolute stray light intensity of the micro-mirror unit in the test area appears near the central channel, and its gray value is 6.86. The maximum absolute stray light intensity of the micro-mirror unit close to the test area also appears near the central channel, and its gray value is 4.01, which indicates that the stray light near the central channel is strong. The relative intensity of stray light in the test area is relatively weak, which increases sharply from the edge of the test area and reaches the value of 293.5% after about two micro-mirror units, and then decreases sharply.
- DMD /
- micro-mirror unit /
- stray light analysis /
- imaging properties /
- precision measurement

HTML全文

图 1 DMD实物照片及局部区域放大图

Figure 1. DMD's actual photo and partial area enlarged view

下载: 全尺寸图片幻灯片

图 2 微镜单元三维结构示意图

Figure 2. Schematic diagram of the three-dimensional structure of the micro-mirror unit

下载: 全尺寸图片幻灯片

图 3 测试装置光路图

Figure 3. Light path diagram of the test device

下载: 全尺寸图片幻灯片

图 4 测试装置实物照片

Figure 4. Photo of the test device

下载: 全尺寸图片幻灯片

图 5 F/#=8时的光斑大小模拟结果

Figure 5. Simulation results of the spot size when F/#=8

下载: 全尺寸图片幻灯片

图 6 F/#=17时的光斑大小模拟结果

Figure 6. Simulation results of the spot size when F/#=17

下载: 全尺寸图片幻灯片

图 7 实验测试结果

Figure 7. Experimental test results

下载: 全尺寸图片幻灯片

图 8 仅有2×2阵列微镜单元处于“开”状态以及所有微镜单元处于“开”状态时的探测器像元灰度分布情况

Figure 8. Grayscale distribution of detector pixels when only the 2×2 array micro-mirror unit is in the "on" state and all micro-mirror units are also in the "on" state

下载: 全尺寸图片幻灯片

图 9 2×2阵列微镜单元测试模式下的杂散光绝对强度分布曲线

Figure 9. Absolute intensity distribution of stray light in the 2×2 array micro-mirror unit test mode

下载: 全尺寸图片幻灯片

图 10 2×2阵列微镜单元测试模式下的杂散光相对强度分布曲线

Figure 10. Relative intensity distribution of stray light in the 2×2 array micro-mirror unit test mode

下载: 全尺寸图片幻灯片

表 1 前置镜头主要技术参数

Table 1. Main technical parameters of the front lens

指标名称放大倍率光圈分辨率（1.0×放大倍率、
550 nm条件下）

指标值 0.5×~1.0× 2.8~完全关闭 3.4 μm

下载: 导出CSV

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