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摘要: 非球面光学元件，特别是其中的自由曲面元件，在设计自由度上相比于球面具有很大的优势，基于非球面构建的光学系统能够以简单的光机结构实现复杂的设计目的。面型检测技术是保障光学非球面加工精度的关键，针对不同种类的非球面以及非球面加工的不同阶段对检测指标要求的多样性，现已发展出了种类繁多的检测方法。本文回顾了非球面光学元件面型检测技术的发展历程，分非干涉法与干涉法两大类整理了常用的检测技术，介绍了各自的技术指标与适用条件、研究进展与应用情况。本文重点讨论了基于干涉方法的非球面精密检测技术，举例说明了非零位与零位两条技术路线下各检测方法的基本原理、光路结构与检测能力，对比分析了各方法的优缺点与适用范围，介绍了一些配套算法以及检测光路的精密调节方法。Abstract: Optical Systems using aspheric components (especially for free-form ones) have remarkable advantages over traditional spherical systems in that they can satisfy complicated requirements with simple optical-mechanical structures relying on abundant optional design parameters. Surface testing is an essential process for ensuring accuracy in manufacturing. Therefore, plenty of testing methods have been developed to meet varying testing demands of different types of surfaces at different stages in manufacturing. This paper summarizes the history of aspheric surface testing technology, classifies available techniques by whether they use interferometry, then introduces corresponding technical indexes, applicable conditions, research progress and applications. This paper highlights the high-precision interferometric methods, basic principles, optical layout and testing performances of every measurement method classified into Null and Non-null testing. The pros and cons of each method are compared, relative algorithms are introduced and precise adjustment methods are discussed.
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Key words:
- aspheric surface testing /
- free-form surface testing /
- interferometry /
- null testing /
- non-null testing
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图 1 光学非球面面型检测技术分类
Figure 1. Classification of optical aspheric surface testing technology
图 3 Hartman法及Shack-Hartman法示意图
Figure 3. Schematic diagrams of the Hartman & Shack-Hartman tests
图 8 无像差点法检测抛物面光路模型
Figure 8. Schematic diagrams of testing paraboloids using aberration-free point method
图 9 折射式补偿器零位检测光路模型
Figure 9. Schematic diagrams of null test by the refractive compensator
图 32 基于SNI法的Dimetior AS干涉仪
Figure 32. Dimetior AS interferometer based on the SNI method
表 1 常用回程误差校正算法对比
Table 1. Comparison of common RE calibration algorithms
方法 理论 条件 精度 速度 GDI 小畸变近似理论 黑盒 较低 较快 TRW 参考波面替代理论 白盒 一般 较快 IRO 系统函数的不变性 白盒 高 较慢 
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表 2 非球面常用干涉检测方法总结
Table 2. Summary of widely used interferometric metrology methods of optics aspheric surfaces
方法类别 检测原理 通用性 检测精度 动态范围 检测效率 CGH零位补偿法 衍射补偿器 差 高 较小 高 PNC部分补偿法 部分补偿、回程误差校正 较好 较高，取决于回程误差校正 较大 高 子孔径拼接法(SSI) 子孔径检测、拼接算法 好 较高，取决于回程误差校正 大 低 自适应补偿法 自适应补偿器 好 较高 较大 高 TWI倾斜波前法 倾斜子光束检测不同区域 较好 较高，取决于回程误差校正 较小 较高 剪切干涉法 剪切率调节系统动态范围 较好 较高，取决于回程误差校正 可调 高
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