太赫兹超分辨率成像研究进展

曹丙花; 张宇盟; 范孟豹; 孙凤山; 刘林

doi:10.37188/CO.2021-0198

太赫兹超分辨率成像研究进展

doi: 10.37188/CO.2021-0198

1.
中国矿业大学信息与控制工程学院, 江苏徐州 221000
2.
中国矿业大学机电工程学院, 江苏徐州 221000
3.
北京航天计量测试技术研究所, 北京 100076

基金项目: 国家自然科学基金（No. 62071471）；江苏省自然科学基金（No. BK20211244）

详细信息

作者简介:
曹丙花（1981—），女，山东泰安人，博士，副教授，博士生导师，2004年6月于电子科技大学获得学士学位，2009年6月于浙江大学获得博士学位，2009年至今于中国矿业大学信息与控制工程学院任教。主要从事人工智能及应用、太赫兹无损检测与成像、嵌入式系统及仪器开发、机器人开发等方面研究。E-mail: caobinghua@cumt.edu.cn

张宇盟(1993—)，男，内蒙古通辽人，硕士研究生在读。主要从事太赫兹无损检测与成像系统方面研究。E-mail: 732412741@qq.com

中图分类号: O43
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出版历程
- 收稿日期: 2021-11-12
- 修回日期: 2021-12-13
- 录用日期: 2022-01-21
- 网络出版日期: 2022-01-27
- 刊出日期: 2022-05-20

Research progress of terahertz super-resolution imaging

1.
School of Information and Control Engineering, China University of Mining and Technology, Xuzhou 221000, China
2.
School of Mechatronic Engineering, China University of Mining and Technology, Xuzhou 221000, China
3.
Beijing Institute of Aerospace Metrology and Measurement Technology, Bejing 100076, China

Funds: Supported by National Natural Science Foundtion of China (No. 62071471); Natural Science Foundation of Jiangsu Province (No. BK20211244)

More Information

Corresponding author: caobinghua@cumt.edu.cn

摘要

摘要: 目前太赫兹(Terahertz, THz)成像技术在许多领域被视为最前沿技术之一，经过20年的发展，取得了巨大进步。随着科研、医疗、军事以及工业应用需求的增长，高分辨率THz图像变得不可或缺。超分辨率成像是目前THz技术的研究热点。本文首先回顾了THz系统的成像方法，包括连续波成像与脉冲波成像两种方式；在此基础上，详细介绍了THz超分辨率成像系统与THz信号处理技术，其中超分辨率成像系统包括近场成像、超透镜以及太喷射装置等，THz信号处理技术包括超分辨率重建与卷积计算等；最后，通过分析目前超分辨率成像存在的不足，比如系统的制造工艺要求高、采集速度慢以及重建图像使用的学习样本分辨率较低等，从而进一步对超分辨率成像研究方向进行展望。
- 太赫兹 /
- 近场成像 /
- 超透镜 /
- 光子喷射 /
- 超分辨率重建 /
- 卷积
Abstract: Terahertz (THz) imaging technology has recently become one of the most cutting-edge technologies in many fields and has made great progress in its development over the past two decades. With the increasing demands of scientific research, medical treatment, military and industrial applications, high-resolution THz images have become indispensable. To obtain high-resolution THz images, super-resolution imaging has become a research hotspot. In this paper, the imaging methods of a THz system are reviewed, including continuous wave imaging and pulse wave imaging. On this basis, THz super-resolution imaging systems and THz signal processing technologies are described in detail. The super-resolution imaging systems include near-field imaging, super lens and terajet effect, etc. The THz signal processing technologies could be grouped as either super-resolution reconstruction and convolution calculations. Finally, the shortcomings of current super-resolution imaging technologies were discussed. There are still some bottlenecks that need to be resolved such as the high manufacturing process requirements of the system, the slow acquisition speed, and the low resolution of the learning samples used to reconstruct images. With this analysis, the research direction of super-resolution imaging is proposed.
- terahertz /
- near field imaging /
- super lens /
- photon jet /
- super resolution reconstruction /
- convolution calculation

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图 1 太赫兹成像装置原理图。（a）太赫兹连续波系统；（b）太赫兹时域光谱系统

Figure 1. Schematic diagram of the terahertz imaging device. (a) THz-CW system; (b) THz-TDS system

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图 2 （a）倏逝场示意图和（b）近场扫描示意图^[19]

Figure 2. Schematic diagrams of (a) evanescent field and (b) near field scanning^[19]

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图 3 太赫兹近场成像方法示意图。（a）共焦法原理图^[25]；（b）波导法示意图^[28]；（c）孔径法示意图^[31]；（d）光导探针示意图^[32]；（e）光导探针测量过程示意图^[32]

Figure 3. Principle diagram of Terahertz near field imaging method. (a) Schematic diagram of confocal method^[25]; (b) schematic diagram of waveguide system^[28]; (c) schematic diagram of aperture system^[31]; (d) schematic diagram of photoconductive probe^[32]; (e) schematic diagram of photoconductive probe measurement^[32]

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图 4 太赫兹超材料。（a）开口谐振环结构^[37]；（b）太赫兹吸波器^[38]

Figure 4. Terahertz metamaterials. (a) Split resonant ring^[37]; (b) terahertz absorber^[38]

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图 5 太赫兹光栅超透镜。（a）金属光栅超透镜^[42]；（b）扇形光栅超透镜^[43]

Figure 5. Terahertz grating metalens. (a) Metal grating metalens^[42]; (b) sector grating metalens^[43]

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图 6 太赫兹金属超透镜。(a)放射型金属线超透镜^[44]；（b）周期金属线超透镜^[47]

Figure 6. Terahertz metal metalens. (a) Radial metal wire metalens^[44]; (b) periodic metal wire metalens^[47]

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图 7 太赫兹石墨烯超透镜。（a）双层石墨烯超透镜^[50]；（b）扇形多层结构石墨烯双曲超透镜^[52]；（c）扇形调制结构石墨烯双曲超透镜^[54]

Figure 7. Terahertz graphene metalens. (a) Dobule-layer graphene metalens^[50]; (b) sector multilayer graphene hyperbolic metalens^[52]; (c) sector modulated graphene hyperbolic metalens^[54]

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图 8 太喷射THz-TDS应用^[59]。（a）聚四氟乙烯介质小球工作示意图；（b）硅介质光栅成像对比图

Figure 8. Terajet THz-TDS application^[59]. (a) Working diagram of teflon sphere; (b) comparison chart of silicon dielectric grating imaging

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图 9 适应性超分辨率方法示意图^[68]

Figure 9. Schematic diagram of an adaptive super-resolution method^[68]

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图 10 采用Gaus2小波变换处理前后的成像对比图^[73]。

Figure 10. Imaging comparison diagram^[73] (a) before and (b) after Gaus2 wavelet transform

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参考文献(79)

[1]	李允植. 太赫兹科学与技术原理[M]. 崔万照, 译. 北京: 国防工业出版社, 2012: 1-9. LEE Y S. Principles of Terahertz Science and Technology[M]. CUI W ZH, trans. Beijing: National Defense Industry Press, 2012: 1-9. (in Chinese)
[2]	GUERBOUKHA H, NALLAPPAN K, SKOROBOGATIY M. Toward real-time terahertz imaging[J]. Advances in Optics and Photonics, 2018, 10(4): 843-938. doi: 10.1364/AOP.10.000843
[3]	MITTLEMAN D M. Twenty years of terahertz imaging [Invited][J]. Optics Express, 2018, 26(8): 9417-9431. doi: 10.1364/OE.26.009417
[4]	LIU Q CH, ZHANG Q, LI G L, et al. Terahertz spectral investigation of temperature induced polymorphic transformation of 2, 2dinitroethylene-1, 1-diamine[J]. RSC Advances, 2021, 11(11): 6247-6253. doi: 10.1039/D0RA10754A
[5]	WANG Q, XIE L J, YING Y B, et al. Overview of imaging methods based on terahertz time-domain spectroscopy[J]. Applied Spectroscopy Reviews, 2021: 1-16. doi: 10.1080/05704928.2021.1875480
[6]	阎春生, 黄晨, 韩松涛, 等. 古代纸质文物科学检测技术综述[J]. 中国光学,2020,13(5):936-964. doi: 10.37188/CO.2020-0010 YAN CH SH, HUANG CH, HAN S T, et al. Review on scientific detection technologies for ancient paper relics[J]. Chinese Optics, 2020, 13(5): 936-964. (in Chinese) doi: 10.37188/CO.2020-0010
[7]	丁丽, 丁茜, 叶阳阳, 等. 室内人体隐匿物被动太赫兹成像研究进展[J]. 中国光学,2017,10(1):114-121. doi: 10.3788/co.20171001.0114 DING L, DING X, YE Y Y, et al. Overview of passive terahertz imaging systems for indoor concealed detection[J]. Chinese Optics, 2017, 10(1): 114-121. (in Chinese) doi: 10.3788/co.20171001.0114
[8]	石敬, 王新柯, 郑显华, 等. 太赫兹数字全息术的研究进展[J]. 中国光学,2017,10(1):131-147. doi: 10.3788/co.20171001.0131 SHI J, WANG X K, ZHENG X H, et al. Recent advances in terahertz digital holography[J]. Chinese Optics, 2017, 10(1): 131-147. (in Chinese) doi: 10.3788/co.20171001.0131
[9]	TAO Y H, FITZGERALD A J, WALLACE V P. Non-contact, non-destructive testing in various industrial sectors with terahertz technology[J]. Sensors, 2020, 20(3): 712. doi: 10.3390/s20030712
[10]	戴子杰, 康黎星, 龚诚, 等. PtSe₂薄膜的时间分辨太赫兹光谱特性研究(特邀)[J]. 光子学报,2021,50(8):0850206. doi: 10.3788/gzxb20215008.0850206 DAI Z J, KANG L X, GONG CH, et al. Exploration of PtSe₂ thin film based on time-resolved terahertz spectroscopy (Invited)[J]. Acta Photonica Sinica, 2021, 50(8): 0850206. (in Chinese) doi: 10.3788/gzxb20215008.0850206
[11]	UNNIKRISHNAKURUP S, DASH J, RAY S, et al. Nondestructive evaluation of thermal barrier coating thickness degradation using pulsed IR thermography and THz-TDS measurements: a comparative study[J]. NDT &E International, 2020, 116: 102367.
[12]	叶东东, 王卫泽. 热障涂层太赫兹无损检测技术研究进展[J]. 表面技术,2020,49(10):126-137,197. YE D D, WANG W Z. Research progress in terahertz non-destructive testing of thermal barrier coatings[J]. Surface Technology, 2020, 49(10): 126-137,197. (in Chinese)
[13]	曹丙花, 李素珍, 蔡恩泽, 等. 太赫兹成像技术的进展[J]. 光谱学与光谱分析,2020,40(9):2686-2695. CAO B H, LI S ZH, CAI E Z, et al. Progress in terahertz imaging technology[J]. Spectroscopy and Spectral Analysis, 2020, 40(9): 2686-2695. (in Chinese)
[14]	SARTORIUS B, ROEHLE H, KÜNZEL H, et al. All-fiber terahertz time-domain spectrometer operating at 1.5 µm telecom wavelengths[J]. Optics Express, 2008, 16(13): 9565-9570. doi: 10.1364/OE.16.009565
[15]	郭澜涛, 牧凯军, 邓朝, 等. 太赫兹波谱与成像技术[J]. 红外与激光工程,2013,42(1):51-56. doi: 10.3969/j.issn.1007-2276.2013.01.010 GUO L T, MU K J, DENG CH, et al. Terahertz spectroscopy and imaging[J]. Infrared and Laser Engineering, 2013, 42(1): 51-56. (in Chinese) doi: 10.3969/j.issn.1007-2276.2013.01.010
[16]	张国强, 赵长兴, 辛燕, 等. 基于调频连续波太赫兹技术的复合陶瓷隔热瓦无损检测[J]. 无损检测,2020,42(12):29-34. doi: 10.11973/wsjc202012007 ZHANG G Q, ZHAO CH X, XIN Y, et al. Nondestructive inspection for ceramic matrix composite insulation tile based on FMCW terahertz technology[J]. Nondestructive Testing, 2020, 42(12): 29-34. (in Chinese) doi: 10.11973/wsjc202012007
[17]	王与烨, 陈霖宇, 徐德刚, 等. 太赫兹波三维成像技术研究进展[J]. 中国光学,2019,12(1):1-18. doi: 10.3788/co.20191201.0001 WANG Y Y, CHEN L Y, XU D G, et al. Advances in terahertz three-dimensional imaging techniques[J]. Chinese Optics, 2019, 12(1): 1-18. (in Chinese) doi: 10.3788/co.20191201.0001
[18]	李丹, 饶云坤, 凌福日. 基于太赫兹相干层析成像系统色散补偿的研究[J]. 激光技术,2017,41(6):779-783. LI D, RAO Y K, LING F R. Study on dispersion compensation based on terahertz coherent tomographic imaging system[J]. Laser Technology, 2017, 41(6): 779-783. (in Chinese)
[19]	SYNGE E H. XXXVIII. A suggested method for extending microscopic resolution into the ultra-microscopic region[J]. The London,Edinburgh,and Dublin Philosophical Magazine and Journal of Science, 1928, 6(35): 356-362. doi: 10.1080/14786440808564615
[20]	刘宏翔, 姚建铨, 王与烨, 等. 太赫兹波近场成像综述[J]. 红外与毫米波学报,2016,35(3):300-309,376. doi: 10.11972/j.issn.1001-9014.2016.03.009 LIU H X, YAO J Q, WANG Y Y, et al. Review of THz near-field imaging[J]. Journal of Infrared and Millimeter Waves, 2016, 35(3): 300-309,376. (in Chinese) doi: 10.11972/j.issn.1001-9014.2016.03.009
[21]	刘濮鲲, 黄铁军. 太赫兹超分辨率成像评述Ⅰ: 非实时成像[J]. 微波学报,2020,36(3):1-8. LIU P K, HUANG T J. Terahertz super-resolution imaging I: non-real-time imagin[J]. Journal of Microwaves, 2020, 36(3): 1-8. (in Chinese)
[22]	SEO M A, ADAM A J L, KANG J H, et al. Fourier-transform terahertz near-field imaging of one-dimensional slit arrays: mapping of electric-field-, magnetic-field-, and Poynting vectors[J]. Optics Express, 2007, 15(19): 11781-11789. doi: 10.1364/OE.15.011781
[23]	CHEN H T, KERSTING R, CHO G C. Terahertz imaging with nanometer resolution[J]. Applied Physics Letters, 2003, 83(15): 3009-3011. doi: 10.1063/1.1616668
[24]	黄铁军, 刘濮鲲. 太赫兹超分辨率成像评述Ⅱ: 实时成像[J]. 微波学报,2020,36(4):7-12,20. HUANG T J, LIU P K. Terahertz super-resolution imaging II: real-time imaging[J]. Journal of Microwaves, 2020, 36(4): 7-12,20. (in Chinese)
[25]	ZINOV'EV N N, ANDRIANOV A V, GALLANT A J, et al. Contrast and resolution enhancement in a confocal terahertz video system[J]. JETP Letters, 2008, 88(8): 492-495. doi: 10.1134/S0021364008200058
[26]	MENDIS R, GRISCHKOWSKY D. Undistorted guided-wave propagation of subpicosecond terahertz pulses[J]. Optics Letters, 2001, 26(11): 846-848. doi: 10.1364/OL.26.000846
[27]	李哲, 滕达, 白丽华, 等. 太赫兹金属平行平板波导TE₁模式有效折射率的近似表达式[J]. 激光与光电子学进展,2020,57(19):192302. LI ZH, TENG D, BAI L H, et al. Approximate formula for effective refractive index of TE₁ mode in terahertz parallel-plate metal waveguides[J]. Laser &Optoelectronics Progress, 2020, 57(19): 192302. (in Chinese)
[28]	LIU J B, MENDIS R, MITTLEMAN D M, et al. A tapered parallel-plate-waveguide probe for THz near-field reflection imaging[J]. Applied Physics Letters, 2012, 100(3): 031101. doi: 10.1063/1.3677678
[29]	杨晶, 龚诚, 赵佳宇, 等. 利用3D打印技术制备太赫兹器件[J]. 中国光学,2017,10(1):77-85. doi: 10.3788/co.20171001.0077 YANG J, GONG CH, ZHAO J Y, et al. Fabrication of terahertz device by 3D printing technology[J]. Chinese Optics, 2017, 10(1): 77-85. (in Chinese) doi: 10.3788/co.20171001.0077
[30]	YU T, ZUO X, LIU W W, et al. 0.1THz super-resolution imaging based on 3D printed confocal waveguides[J]. Optics Communications, 2020, 459: 124896. doi: 10.1016/j.optcom.2019.124896
[31]	ISHIHARA K, OHASHI K, IKARI T, et al. Terahertz-wave near-field imaging with subwavelength resolution using surface-wave-assisted bow-tie aperture[J]. Applied Physics Letters, 2006, 89(20): 201120. doi: 10.1063/1.2387984
[32]	NAGEL M, MICHALSKI A, KURZ H. Contact-free fault location and imaging with on-chip terahertz time-domain reflectometry[J]. Optics Express, 2011, 19(13): 12509-12514. doi: 10.1364/OE.19.012509
[33]	杨忠波, 王化斌, 彭晓昱, 等. 基于扫描探针显微镜的近场超空间分辨指纹光谱技术研究现状[J]. 红外与毫米波学报,2016,35(1):87-98. doi: 10.11972/j.issn.1001-9014.2016.01.016 YANG ZH B, WANG H B, PENG X Y, et al. Recent progress in scanning probe microscope based super-resolution near-field fingerprint microscopy[J]. Journal of Infrared and Millimeter Waves, 2016, 35(1): 87-98. (in Chinese) doi: 10.11972/j.issn.1001-9014.2016.01.016
[34]	BITZER A, ORTNER A, WALTHER M. Terahertz near-field microscopy with subwavelength spatial resolution based on photoconductive antennas[J]. Applied Optics, 2010, 49(19): E1-E6. doi: 10.1364/AO.49.0000E1
[35]	PENDRY J B. Negative refraction makes a perfect lens[J]. Physical Review Letters, 2000, 85(18): 3966-3969. doi: 10.1103/PhysRevLett.85.3966
[36]	傅晓建, 石磊, 崔铁军. 太赫兹超材料及其成像应用研究进展[J]. 材料工程,2020,48(6):12-22. doi: 10.11868/j.issn.1001-4381.2019.000849 FU X J, SHI L, CUI T J. Research progress in terahertz metamaterials and their applications in imaging[J]. Journal of Materials Engineering, 2020, 48(6): 12-22. (in Chinese) doi: 10.11868/j.issn.1001-4381.2019.000849
[37]	YEN T J, PADILLA W J, FANG N, et al. Terahertz magnetic response from artificial materials[J]. Science, 2004, 303(5663): 1494-1496. doi: 10.1126/science.1094025
[38]	LIU SH, CHEN H B, CUI T J. A broadband terahertz absorber using multi-layer stacked bars[J]. Applied Physics Letters, 2015, 106(15): 151601. doi: 10.1063/1.4918289
[39]	YAN B, YU B, XU J F, et al. Customized meta-waveguide for phase and absorption[J]. Journal of Physics D:Applied Physics, 2021, 54(46): 465102. doi: 10.1088/1361-6463/ac1466
[40]	GRBIC A, ELEFTHERIADES G V. Overcoming the diffraction limit with a planar left-handed transmission-line lens[J]. Physical Review Letters, 2004, 92(11): 117403. doi: 10.1103/PhysRevLett.92.117403
[41]	LIU ZH W, FANG N, YEN T J, et al. Rapid growth of evanescent wave by a silver superlens[J]. Applied Physics Letters, 2003, 83(25): 5184-5186. doi: 10.1063/1.1636250
[42]	JUNG J, GARCÍA-VIDAL F J, MARTÍN-MORENO L, et al. Holey metal films make perfect endoscopes[J]. Physical Review B, 2009, 79(15): 153407. doi: 10.1103/PhysRevB.79.153407
[43]	HUANG T J, TANG H H, TAN Y H, et al. Terahertz super-resolution imaging based on subwavelength metallic grating[J]. IEEE Transactions on Antennas and Propagation, 2019, 67(5): 3358-3365. doi: 10.1109/TAP.2019.2894260
[44]	BELOV P A, SIMOVSKI C R, IKONEN P. Canalization of subwavelength images by electromagnetic crystals[J]. Physical Review B, 2005, 71(19): 193105. doi: 10.1103/PhysRevB.71.193105
[45]	SILVEIRINHA M G, BELOV P A, SIMOVSKI C R. Subwavelength imaging at infrared frequencies using an array of metallic nanorods[J]. Physical Review B, 2007, 75(3): 035108. doi: 10.1103/PhysRevB.75.035108
[46]	SHVETS G, TRENDAFILOV S, PENDRY J B, et al. Guiding, focusing, and sensing on the subwavelength scale using metallic wire arrays[J]. Physical Review Letters, 2007, 99(5): 053903. doi: 10.1103/PhysRevLett.99.053903
[47]	TUNIZ A, KALTENECKER K J, FISCHER B M, et al. Metamaterial fibres for subdiffraction imaging and focusing at terahertz frequencies over optically long distances[J]. Nature Communications, 2013, 4: 2706. doi: 10.1038/ncomms3706
[48]	郜思衡, 杨宇, 毋金玲, 等. 氧化石墨烯/超细银粒子复合物的制备及其光电性能[J]. 应用化学,2020,37(8):923-929. doi: 10.11944/j.issn.1000-0518.2020.08.200034 GAO S H, YANG Y, WU J L, et al. Preparation and photoelectric performance of graphene oxide/ultrafine silver composite[J]. Chinese Journal of Applied Chemistry, 2020, 37(8): 923-929. (in Chinese) doi: 10.11944/j.issn.1000-0518.2020.08.200034
[49]	王艺晨, 罗静, 刘仁, 等. 石墨烯空心微球制备方法的研究进展[J]. 应用化学,2020,37(12):1374-1383. doi: 10.11944/j.issn.1000-0518.2020.12.200163 WANG Y CH, LUO J, LIU R, et al. Progress in preparation of graphene hollow microspheres[J]. Chinese Journal of Applied Chemistry, 2020, 37(12): 1374-1383. (in Chinese) doi: 10.11944/j.issn.1000-0518.2020.12.200163
[50]	LI P N, TAUBNER T. Broadband subwavelength imaging using a tunable graphene-lens[J]. ACS Nano, 2012, 6(11): 10107-10114. doi: 10.1021/nn303845a
[51]	LI P N, WANG T, BÖCKMANN H, et al. Graphene-enhanced infrared near-field microscopy[J]. Nano Letters, 2014, 14(8): 4400-4405. doi: 10.1021/nl501376a
[52]	ANDRYIEUSKI A, LAVRINENKO A V, CHIGRIN D N. Graphene hyperlens for terahertz radiation[J]. Physical Review B, 2012, 86(12): 121108. doi: 10.1103/PhysRevB.86.121108
[53]	TANG H H, LIU P K. Long-distance super-resolution imaging assisted by enhanced spatial Fourier transform[J]. Optics Express, 2015, 23(18): 23613-23623. doi: 10.1364/OE.23.023613
[54]	TANG H H, HUANG T J, LIU J Y, et al. Tunable terahertz deep subwavelength imaging based on a graphene monolayer[J]. Scientific Reports, 2017, 7: 46283. doi: 10.1038/srep46283
[55]	JIANG X, CHEN H, LI Z Y, et al. All-dielectric metalens for terahertz wave imaging[J]. Optics Express, 2018, 26(11): 14132-14142. doi: 10.1364/OE.26.014132
[56]	YANG M Y, RUAN D SH, DU L H, et al. Subdiffraction focusing of total electric fields of terahertz wave[J]. Optics Communications, 2020, 458: 124764. doi: 10.1016/j.optcom.2019.124764
[57]	LI X, CHEN ZH G, TAFLOVE A, et al. Optical analysis of nanoparticles via enhanced backscattering facilitated by 3-D photonic nanojets[J]. Optics Express, 2005, 13(2): 526-533. doi: 10.1364/OPEX.13.000526
[58]	PHAM H H N, HISATAKE S, MININ O V, et al. Enhancement of spatial resolution of terahertz imaging systems based on terajet generation by dielectric cube[J]. APL Photonics, 2017, 2(5): 056106. doi: 10.1063/1.4983114
[59]	马晓茗, 姜在超, 屈庆山, 等. 基于喷射效应的太赫兹高分辨成像研究与进展[J]. 光电工程,2020,47(5):55-64. MA X M, JIANG Z CH, QU Q SH, et al. Research advances of high-resolution THz imaging based on terajet effect[J]. Opto-Electronic Engineering, 2020, 47(5): 55-64. (in Chinese)
[60]	苏衡, 周杰, 张志浩. 超分辨率图像重建方法综述[J]. 自动化学报,2013,39(8):1202-1213. SU H, ZHOU J, ZHANG ZH H. Survey of super-resolution image reconstruction methods[J]. Acta Automatica Sinica, 2013, 39(8): 1202-1213. (in Chinese)
[61]	OOI Y K, IBRAHIM H. Deep learning algorithms for single image super-resolution: a systematic review[J]. Electronics, 2021, 10(7): 867. doi: 10.3390/electronics10070867
[62]	南方哲, 钱育蓉, 行艳妮, 等. 基于深度学习的单图像超分辨率重建研究综述[J]. 计算机应用研究,2020,37(2):321-326. NAN F ZH, QIAN Y R, XING Y N, et al. Survey of single image super resolution based on deep learning[J]. Application Research of Computers, 2020, 37(2): 321-326. (in Chinese)
[63]	郭佑东, 凌福日, 姚建铨. 基于梯度变换的太赫兹图像超分辨率重建[J]. 激光技术,2020,44(3):271-277. GUO Y D, LING F R, YAO J Q. Super-resolution reconstruction for terahertz images based on gradient transform[J]. Laser Technology, 2020, 44(3): 271-277. (in Chinese)
[64]	邓承志, 田伟, 陈盼, 等. 基于局部约束群稀疏的红外图像超分辨率重建[J]. 物理学报,2014,63(4):044202. doi: 10.7498/aps.63.044202 DENG CH ZH, TIAN W, CHEN P, et al. Infrared image super-resolution via locality-constrained group sparse model[J]. Acta Physica Sinica, 2014, 63(4): 044202. (in Chinese) doi: 10.7498/aps.63.044202
[65]	邵保泰, 汤心溢, 金璐, 等. 基于生成对抗网络的单帧红外图像超分辨算法[J]. 红外与毫米波学报,2018,37(4):427-432. doi: 10.11972/j.issn.1001-9014.2018.04.009 SHAO B T, TANG X Y, JIN L, et al. Single frame infrared image super-resolution algorithm based on generative adversarial nets[J]. Journal of Infrared and Millimeter Waves, 2018, 37(4): 427-432. (in Chinese) doi: 10.11972/j.issn.1001-9014.2018.04.009
[66]	席志红, 侯彩燕, 袁昆鹏, 等. 基于深层残差网络的加速图像超分辨率重建[J]. 光学学报,2019,39(2):0210003. doi: 10.3788/AOS201939.0210003 XI ZH H, HOU C Y, YUAN K P, et al. Super-resolution reconstruction of accelerated image based on deep residual network[J]. Acta Optica Sinica, 2019, 39(2): 0210003. (in Chinese) doi: 10.3788/AOS201939.0210003
[67]	卢贺洋, 苏胜君, 袁明辉, 等. 太赫兹图像的超分辨率重建[J]. 红外技术,2019,41(1):59-63. LU H Y, SU SH J, YUAN M H, et al. Super-resolution reconstruction of terahertz images[J]. Infrared Technology, 2019, 41(1): 59-63. (in Chinese)
[68]	LI Y D, HU W D, ZHANG X, et al. Adaptive terahertz image super-resolution with adjustable convolutional neural network[J]. Optics Express, 2020, 28(15): 22200-22217. doi: 10.1364/OE.394943
[69]	郭彤颖, 吴成东, 曲道奎. 小波变换理论应用进展[J]. 信息与控制,2004,33(1):67-71. doi: 10.3969/j.issn.1002-0411.2004.01.015 GUO T Y, WU CH D, QU D K. Wavelet transform theory and its application progress: a review[J]. Information and Control, 2004, 33(1): 67-71. (in Chinese) doi: 10.3969/j.issn.1002-0411.2004.01.015
[70]	代冰, 王朋, 周宇, 等. 小波变换在太赫兹三维成像探测内部缺陷中的应用[J]. 物理学报,2017,66(8):088701. doi: 10.7498/aps.66.088701 DAI B, WANG P, ZHOU Y, et al. Wavelet transform in the application of three-dimensional terahertz imaging for internal defect detection[J]. Acta Physica Sinica, 2017, 66(8): 088701. (in Chinese) doi: 10.7498/aps.66.088701
[71]	邓玉强, 郎利影, 邢岐荣, 等. Gabor小波分析太赫兹波时间-频率特性的研究[J]. 物理学报,2008,57(12):7747-7752. doi: 10.3321/j.issn:1000-3290.2008.12.054 DENG Y Q, LANG L Y, XING Q R, et al. Terahertz time-frequency analysis with Gabor wavelet-transform[J]. Acta Physica Sinica, 2008, 57(12): 7747-7752. (in Chinese) doi: 10.3321/j.issn:1000-3290.2008.12.054
[72]	陈龙旺, 孟阔, 张岩. 小波变换在太赫兹时域光谱分析中的应用[J]. 光谱学与光谱分析,2009,29(5):1168-1171. doi: 10.3964/j.issn.1000-0593(2009)05-1168-04 CHEN L W, MENG K, ZHANG Y. Application of the wavelet transform in terahertz time-domain spectroscopy[J]. Spectroscopy and Spectral Analysis, 2009, 29(5): 1168-1171. (in Chinese) doi: 10.3964/j.issn.1000-0593(2009)05-1168-04
[73]	DAI B, WANG P, WANG T Y, et al. Improved terahertz nondestructive detection of debonds locating in layered structures based on wavelet transform[J]. Composite Structures, 2017, 168: 562-568. doi: 10.1016/j.compstruct.2016.10.118
[74]	ZHANG ZH R, LU Y, LV C X, et al. Restoration of integrated circuit terahertz image based on wavelet denoising technique and the point spread function model[J]. Optics and Lasers in Engineering, 2021, 138: 106413. doi: 10.1016/j.optlaseng.2020.106413
[75]	张霁旸, 任姣姣, 陈思宏, 等. 小波去噪在太赫兹无损检测中的应用[J]. 中国激光,2020,47(1):0114001. doi: 10.3788/CJL202047.0114001 ZHANG J Y, REN J J, CHEN S H, et al. Application of wavelet denoising in terahertz nondestructive detection[J]. Chinese Journal of Lasers, 2020, 47(1): 0114001. (in Chinese) doi: 10.3788/CJL202047.0114001
[76]	CHEN Y, HUANG SH Y, PICKWELL-MACPHERSON E. Frequency-wavelet domain deconvolution for terahertz reflection imaging and spectroscopy[J]. Optics Express, 2010, 18(2): 1177-1190. doi: 10.1364/OE.18.001177
[77]	DONG J L, LOCQUET A, CITRIN D S. Terahertz quantitative nondestructive evaluation of failure modes in polymer-coated steel[J]. IEEE Journal of Selected Topics in Quantum Electronics, 2017, 23(4): 8400207.
[78]	DONG J L, WU X L, LOCQUET A, et al. Terahertz superresolution stratigraphic characterization of multilayered structures using sparse deconvolution[J]. IEEE Transactions on Terahertz Science and Technology, 2017, 7(3): 260-267. doi: 10.1109/TTHZ.2017.2673542
[79]	叶东东, 王卫泽, 周海婷, 等. 基于太赫兹技术的热障涂层平行裂纹监测研究[J]. 表面技术,2020,49(5):91-97. YE D D, WANG W Z, ZHOU H T, et al. Parallel crack monitoring of thermal barrier coatings based on terahertz technology[J]. Surface Technology, 2020, 49(5): 91-97. (in Chinese)