Si杂质扩散诱导InGaAs/GaAs(P)量子阱混杂研究

王予晓; 朱凌妮; 仲莉; 孔金霞; 刘素平; 马骁宇

doi:10.37188/CO.2021-0200

Si杂质扩散诱导InGaAs/GaAs(P)量子阱混杂研究

doi: 10.37188/CO.2021-0200

王予晓^{1, 2,},
朱凌妮^1, ,,
仲莉^{1, 3, ,},
孔金霞^1,,
刘素平^1,,
马骁宇^{1, 3,}

1.
中国科学院半导体研究所光电子器件国家工程中心, 北京 100083
2.
中国科学院大学电子电气与通信工程学院, 北京 100049
3.
中国科学院大学材料科学与光电技术学院, 北京 100049

详细信息

作者简介:
王予晓（1995—），女，河南焦作人，中国科学院半导体研究所博士研究生，主要从事高功率半导体激光器研究。E-mail：wangyuxiao@semi.ac.cn

朱凌妮（1983—），女，江苏宜兴人，博士，助理研究员，2012年于北京理工大学获得博士学位，主要从事大功率半导体激光器等方面研究。E-mail：lingxiao431@semi.ac.cn

仲　莉（1980—），女，江苏无锡人，博士，研究员，博士生导师，2008年于中国科学院半导体研究所获得博士学位，主要从事大功率半导体激光器等方面研究。E-mail：zhongli@semi.ac.cn

中图分类号: TN314+.3；TN315+.3;
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出版历程
- 收稿日期: 2021-11-16
- 修回日期: 2021-12-16
- 录用日期: 2022-01-21
- 网络出版日期: 2022-01-28
- 刊出日期: 2022-05-20

InGaAs/GaAs(P) quantum well intermixing induced by Si impurity diffusion

WANG Yu-xiao^{1, 2
,},
ZHU Ling-ni^{1
, ,},
ZHONG Li^{1, 3
, ,},
KONG Jin-xia^1
,,
LIU Su-ping^1
,,
MA Xiao-yu^{1, 3
,}

1.
National Engineering Research Center for Optoelectronic Devices, Institute of Semiconductors(CAS), Beijing 100083, China
2.
School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
3.
College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China

More Information

Corresponding author: lingxiao431@semi.ac.cn; zhongli@semi.ac.cn

摘要

摘要: 腔面光学灾变损伤是制约半导体激光器输出功率以及可靠性的主要因素之一，量子阱混杂技术是最常用的解决腔面灾变性光学损伤的方法。为了制备高功率、高可靠性半导体激光器单管器件，对Si杂质诱导量子阱混杂工艺进行了探索。本文使用Si介质层作为扩散源，采用管式炉高温退火的方法进行Si杂质扩散诱导量子阱混杂研究。实验并分析了介质膜厚度、退火条件、量子垒材料、牺牲层材料等因素对InGaAs/GaAs(P)量子阱蓝移量的影响。实验发现，量子阱和量子垒的混杂效果随着扩散时间以及退火温度增加而增大，且对温度尤其敏感。当退火条件为780 ℃、10 h时，InGaAs/GaAsP结构的波长蓝移量达到70.5 nm，量子垒为GaAsP时比GaAs有更好的促进蓝移效果。相同外延结构下，InGaP牺牲层结构相比AlGaAs牺牲层有更大的波长蓝移。
- 量子阱混杂 /
- 半导体激光器 /
- 腔面光学灾变损伤
Abstract: Catastrophic Optical Mirror Damage (COMD) on the cavity surface is one of the main factors that restrict the output power and reliability of semiconductor lasers. Quantum well intermixing technology is one of the most commonly used methods to avoid COMD. Si impurity-induced quantum well intermixing technology is explored for high-power, high-reliability laser diode devices. In this paper, a silicon dielectric layer is used as the diffusion source for a study of silicon impurity-induced disordering by annealing in a tube furnace. The effects of the dielectric film thickness, annealing conditions, quantum barrier material and sacrificial layer material on the wavelength blue shift of InGaAs/GaAs(P) quantum wells were analyzed. It is found that the degree of intermixing between quantum well and barrier increases with the increasing of annealing time and temperature, but is particularly sensitive to temperature. The wavelength blue shift of the InGaAs/GaAsP structure is 70.5 nm under 780 ℃ annealing temperature at a duration of 10 hours. Also, the GaAsP barrier structure has a larger blue shift than the GaAs barrier, and the epitaxial layer with an InGaP sacrificial layer has a larger blue shift than the AlGaAs sacrificial layer.
- quantum well intermixing /
- semiconductor laser diodes /
- COMD

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图 1 两种外延结构示意图

Figure 1. The structures of two types of epitaxial layers

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图 2 不同Si介质膜厚度下退火后的归一化PL谱

Figure 2. Normalized PL spectra varying with different Si dielectric film thicknesses after annealing

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图 3 当Si厚度为70 nm，牺牲层为InGaP，不同退火条件下的PL谱

Figure 3. PL spectra under different annealing conditions when the thickness of Si is 70 nm with InGaP as sacrificial layer

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图 4 800 ℃/10 h下退火后，W₁、W₂外延片在硅诱导下以及W₂在SiN保护下的SIMS图

Figure 4. SIMS of samples with W₁ and W₂ structure induced by Si and W₂ structure protected by SiN after 800 ℃、10 h annealing

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图 5 有无牺牲层的W₁外延片在780 ℃、4 h条件下退火后的PL图像

Figure 5. PL spectra of structure W₁ with and without a sacrificial layer after annealing at 780 ℃、4 h

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图 6 不同牺牲层结构的W₂外延片在780 ℃、10 h条件下退火后的PL图像

Figure 6. PL spectra of structure W₂ with different sacrificial layers after annealing at 780 ℃、10 h

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