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基于宽波段光源拼接镜新型共相检测技术研究

李斌 杨阿坤 邹吉平

李斌, 杨阿坤, 邹吉平. 基于宽波段光源拼接镜新型共相检测技术研究[J]. 中国光学(中英文), 2022, 15(4): 797-805. doi: 10.37188/CO.2021-0234
引用本文: 李斌, 杨阿坤, 邹吉平. 基于宽波段光源拼接镜新型共相检测技术研究[J]. 中国光学(中英文), 2022, 15(4): 797-805. doi: 10.37188/CO.2021-0234
LI Bin, YANG A-kun, ZOU Ji-ping. A new co-phasing detection technology of a segmented mirror based on broadband light[J]. Chinese Optics, 2022, 15(4): 797-805. doi: 10.37188/CO.2021-0234
Citation: LI Bin, YANG A-kun, ZOU Ji-ping. A new co-phasing detection technology of a segmented mirror based on broadband light[J]. Chinese Optics, 2022, 15(4): 797-805. doi: 10.37188/CO.2021-0234

基于宽波段光源拼接镜新型共相检测技术研究

doi: 10.37188/CO.2021-0234
基金项目: 国家自然科学基金资助项目(No. 12103019)
详细信息
    作者简介:

    李 斌(1989—),男,江西鹰潭人,博士,讲师,华东交通大学机电学院教师,2012年于武汉大学获得学士学位,2017年于中国科学院光电技术研究所获得博士学位,主要从事拼接镜共相检测和太赫兹光谱应用的研究。E-mail:libingioe@126.com

  • 中图分类号: O436

A new co-phasing detection technology of a segmented mirror based on broadband light

Funds: Supported by National Natural Science Foundation of China (No. 12103019)
More Information
  • 摘要:

    鉴于单块口径的光学望远镜不能无限增大,采用拼接镜技术才能造出10 m以上口径的光学望远镜,因此,拼接镜的共相检测技术成为了拼接过程和维持镜面质量的关键技术。针对目前最被接受的宽窄带夏克哈特曼法,本文提出使用宽波段(400~700 nm)光源的非相干性和相干性相结合方式实现250 nm粗共相,以及10 nm精共相,以此解决由于目标流量过低而引起测量时间过长的问题。即在粗共相时,以两个半圆孔的非相干衍射图样为模板,白光为光源,采用互相关算法计算互相关系数的值,通过设置合理的互相关系数阈值,以实现无限制的检测范围和0.25 μm 的检测精度;精共相时,以白光为光源、采用以一幅相干衍射图案(理想白光艾里斑)为模板的方式替代多幅不同平移误差下的相干衍射图案为模板方式,实现0.27 μm量程、0.01 μm以上精度的共相检测。对该共相方法进行了理论和仿真分析,结果表明:该新型共相检测方法的检测量程为无限量程,检测精度能达到 10 nm以上,该方法适用于拼接镜粗精共相的检测。

     

  • 图 1  放置在子镜间的圆孔示意图

    Figure 1.  Schematic diagram of circular hole placed between sub-mirrors

    图 2  在400~700 nm带宽下,平移误差从1 μm到−1 μm变化时的理论圆孔衍射图

    Figure 2.  Theoretical circular diffraction patterns when piston error is varying from 1 μm to −1 μm at 400−700 nm bandwidth

    图 3  在400~700 nm带宽下,平移误差从250 nm到−250 nm变化时的理论圆孔衍射图

    Figure 3.  Theoretical circular diffraction patterns when piston error is varying from 250 nm to −250 nm at 400−700 nm bandwidth

    图 4  平移误差大于可见光相干长度时的(a)模板图案和(b)互相关系数Corr2随拼接镜平移误差变化关系图

    Figure 4.  (a) Template pattern and (b) Corr2 as a function of piston errors when piston error is greater than visible coherence length

    图 5  平移误差在可见光相干长度以内时的(a)模板图案和(b)互相关系数Corr2随拼接镜平移误差变化关系图

    Figure 5.  (a) Template pattern and (b) Corr2 as a function of piston errors when piston error is within the coherence length of visible light

    图 6  R1分别为0.2、0.3、0.4时,互相关系数Corr2值与平移误差关系图

    Figure 6.  Corr2 as a function of piston errors when R1 is 0.2, 0.3 and 0.4

    图 7  R2分别为0.3、0.4、0.5时,互相关系数Corr2值与平移误差关系图

    Figure 7.  Corr2 as a function of piston errors when R2 is 0.3, 0.4 and 0.5

    图 8  SNR分别为45、60、90时,互相关系数Corr2值与平移误差关系图

    Figure 8.  Corr2 as a function of piston errors when SNR is 45, 60 and 90

    图 9  R1=0.2,R2=0.3,SNR=90和R1=0.3,R2=0.3,SNR=90时,互相关系数Corr2值与平移误差关系图

    Figure 9.  Corr2 as a function of piston errors when R1=0.2, R2=0.3, SNR=90 and R1=0.3, R2=0.3, SNR=90

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出版历程
  • 收稿日期:  2021-12-31
  • 录用日期:  2022-02-13
  • 修回日期:  2022-01-24
  • 网络出版日期:  2022-04-27

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