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单片集成式主振荡功率放大器研究进展

谭满清 游道明 郭文涛 刘维华

谭满清, 游道明, 郭文涛, 刘维华. 单片集成式主振荡功率放大器研究进展[J]. 中国光学(中英文), 2023, 16(1): 61-75. doi: 10.37188/CO.2022-0022
引用本文: 谭满清, 游道明, 郭文涛, 刘维华. 单片集成式主振荡功率放大器研究进展[J]. 中国光学(中英文), 2023, 16(1): 61-75. doi: 10.37188/CO.2022-0022
TAN Man-qing, YOU Dao-ming, GUO Wen-tao, LIU Wei-hua. Research progress of monolithic integration master-oscillation power-amplifiers[J]. Chinese Optics, 2023, 16(1): 61-75. doi: 10.37188/CO.2022-0022
Citation: TAN Man-qing, YOU Dao-ming, GUO Wen-tao, LIU Wei-hua. Research progress of monolithic integration master-oscillation power-amplifiers[J]. Chinese Optics, 2023, 16(1): 61-75. doi: 10.37188/CO.2022-0022

单片集成式主振荡功率放大器研究进展

doi: 10.37188/CO.2022-0022
基金项目: 国家自然科学基金资助项目(No. 61935018);国家电网公司科技项目(No. 5700-202058482A-0-0-00)
详细信息
    作者简介:

    谭满清(1967—),男,湖南衡阳人,博士,研究员,博士生导师,1996年于北京理工大学获得博士学位,主要从事半导体光电子器件和模块化方面的研究。E-mail:mqtan@semi.ac.cn

    游道明(1998—),男,江西上饶人,硕士研究生,2020 年于哈尔滨工业大学获得学士学位,主要从事半导体光电子器件及其集成技术方面的研究。E-mail:youdaoming20@semi.ac.cn

    郭文涛(1986—),男,山西运城人,博士,副研究员,2009 年于南昌大学应用物理学专业获得学士学位;2014 年于中国科学院半导体研究所微电子学与固体电子学专业获得博士学位,研究方向为用于光纤传感领域的半导体光电子器件。E-mail:wtguo@semi.ac.cn

  • 中图分类号: TN248.4

Research progress of monolithic integration master-oscillation power-amplifiers

Funds: Supported by National Natural Science Foundation of China (No. 61935018); Science and Technology Project of State Grid Corporation of China (No. 5700-202058482A-0-0-00)
More Information
  • 摘要:

    单片集成式主振荡功率放大器(MOPA)具有体积小、功率大、光束质量高等优势,通过集成布拉格光栅,还能够实现窄线宽和动态单模,在倍频、泵浦、光通信和传感等领域具有重要应用价值,是近年来半导体光电子器件的研究热点。本文梳理了单片集成式MOPA的主流结构,包括锥形、脊型、布拉格光栅型和三段式MOPA,以各自的工作原理和性能特征为出发点,介绍其主要的研究方向,并结合它们各自面临的问题介绍最新的发展趋势。针对单片集成式MOPA中普遍存在的高功率下光束质量退化的问题,梳理了近年在外延层结构、腔面光学薄膜和电极设置等方面的优化设计,重点总结了单片集成式MOPA在提高光束质量及高功率、容线宽及高亮度方面的重要进展。围绕不同领域的应用需求,整理了具备高功率、窄线宽、高光束质量和高亮度等性能特征的单片集成式MOPA的研究进展,最后展望了单片集成式MOPA的发展趋势。

     

  • 图 1  锥形MOPA结构示意图。(a)立体结构;(b)平面结构

    Figure 1.  (a) Three-dimensional structure and (b) planar structure of a tapered-MOPA

    图 2  双锥形激光器结构示意图。(a)平面示意图;(b)立体结构示意图;(c)表面光栅的SEM剖面图;(d)表面光栅的SEM顶视图;(e)周期电注入示意图[33]

    Figure 2.  Schematic diagram of double tapered laser. (a) Planar structure; (b) three-dimensional structure; (c) SEM profile of the surface grating; (d) top view of the SEM of surface grating; (e) periodic electric injection diagram[33]

    图 3  脊型MOPA的结构示意图

    Figure 3.  Structure diagram of a ridge-amplifier MOPA

    图 4  弯曲脊型MOPA结构示意图[35]

    Figure 4.  Structure diagram of a bent ridge-amplifier MOPA[35]

    图 5  布拉格光栅型MOPA结构示意图。(a)DBR型;(b)DFB型

    Figure 5.  Structure diagrams of grating-MOPA. (a) DBR; (b) DFB

    图 6  双光栅型MOPA的结构示意图[47]

    Figure 6.  Structure diagram of a double DBR grating MOPA[47]

    图 7  光栅型MOPA用于倍频的装置图[50]

    Figure 7.  Schematic diagram of the frequency doubling setup with a MOPA[50]

    图 8  锥形光栅型MOPA结构示意图[52]

    Figure 8.  Structure diagram of a MOPA with tapered grating[52]

    图 9  三段式MOPA结构示意图

    Figure 9.  Structure diagram of three section MOPA

    图 10  外腔锁相MOPA结构示意图[60]

    Figure 10.  MOPA-based external Cavity mode-locked laser[60]

    图 11  分离电极MOPA的结构示意图

    Figure 11.  Diagram of separating electrode

    表  1  MOPA的主流结构和其特征及其面临的问题

    Table  1.   Structures, characteristics and problems of main MOPAs

    MOPA类型结构特征性能特征存在的问题
    锥形MOPA锥形放大器输出功率高整形耦合难度大
    脊型MOPA脊型放大器光束质量高输出功率低
    DBR-MOPADBR光栅窄线宽、输出功率高光栅工艺复杂
    DFB-MOPADFB光栅窄线宽、光束质量高光栅工艺复杂
    三段式MOPA集成控制器可调谐、多用途电流控制难度大
    下载: 导出CSV

    表  2  大功率MOPA研究进展

    Table  2.   Progress of high-power MOPA

    Yearλ/nmP/WKey featureRefs.
    2010106412DFB ASLOC Embed[101]
    2011106012ASLOC6thDBR AR/AR[102]
    2016103012.7ASLOC3thDBR AR/AR[51]
    2017103015.5TQW ASLOC 7thDBR[94]
    2017103010.5ASLOC 7thDBR[93]
    20189807.3TPL PHC[84]
    201910609.5ASLOC 7thDBR[29]
    20219757TPL[97]
    20227857DBR TPL[103]
    下载: 导出CSV

    表  3  窄线宽MOPA的研究进展

    Table  3.   Progress of MOPAs with a narrow linewidth

    Yearλ/nmLength/pmGrating featureRefs.
    20111 060<10DBR 6th surface[102]
    2015117810DBR 3th surface[10]
    2017103017DBR 7th surface[105]
    20199962.4DBR 44th surface[43]
    20199802.7DBR 44th surface[33]
    20217851DBR 10th surface[53]
    202178319DBR 10th surface[52]
    202278519DBR TPL[103]
    下载: 导出CSV

    表  4  高光束质量MOPA研究进展

    Table  4.   Progress of MOPAs with high beam quality

    Yearλ/nmM 2/1/e2Key featureRefs.
    201010641.3DFB ASLOC Embed[101]
    20116601.5TPL DQW[108]
    201610301.2ASLOC 3thDBR AR/AR[51]
    201710301.1TQW ASLOC 7thDBR[105]
    201710301.2ASLOC 7thDBR AR/AR[93]
    2018980<2TPL PBC[84]
    20199801.5TPL PBC narrow angle[26]
    201910601.1ASLOC 7thDBR[109]
    20199961.6444thDFB ASLOC DQW[43]
    20199801.744thDFB ASLOC DQW[33]
    20219751.66TPL[97]
    202115501.26TPL noval package[110]
    下载: 导出CSV

    表  5  高亮度MOPA研究进展

    Table  5.   Progress of MOPAs with high-brightness

    Yearλ/nmBrightness/MWcm−2sr−1Key featureRefs.
    2010980155(matrix)ASLOC TPL[91]
    20111 060860(1/e2)TPL HR/AR[102]
    20161030770(1/e2)TQW ASLOC[51]
    20171030700(1/e2)TQW ASLOC[93]
    20171030170(matrix)DFB special structure[94]
    201898085.3(matrix)PHC TPL[84]
    2019980126.8(matrix)PHC narrow angle[85]
    2021975369(1/e2)TPL[97]
    下载: 导出CSV
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  • 收稿日期:  2022-02-07
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