单片集成式主振荡功率放大器研究进展

谭满清; 游道明; 郭文涛; 刘维华

doi:10.37188/CO.2022-0022

单片集成式主振荡功率放大器研究进展

doi: 10.37188/CO.2022-0022

谭满清^{1, 2, ,},
游道明^{1, 2,},
郭文涛^1,,
刘维华^{1, 2}

1.
中国科学院半导体研究所集成光电子学国家重点实验室, 北京 100083
2.
中国科学院大学材料科学与光电技术学院, 北京 100049

基金项目: 国家自然科学基金资助项目（No. 61935018）；国家电网公司科技项目（No. 5700-202058482A-0-0-00）

详细信息

作者简介:
谭满清（1967—），男，湖南衡阳人，博士，研究员，博士生导师，1996年于北京理工大学获得博士学位，主要从事半导体光电子器件和模块化方面的研究。E-mail：mqtan@semi.ac.cn

游道明（1998—），男，江西上饶人，硕士研究生，2020 年于哈尔滨工业大学获得学士学位，主要从事半导体光电子器件及其集成技术方面的研究。E-mail：youdaoming20@semi.ac.cn

郭文涛（1986—），男，山西运城人，博士，副研究员，2009 年于南昌大学应用物理学专业获得学士学位；2014 年于中国科学院半导体研究所微电子学与固体电子学专业获得博士学位，研究方向为用于光纤传感领域的半导体光电子器件。E-mail：wtguo@semi.ac.cn

中图分类号: TN248.4
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出版历程
- 收稿日期: 2022-02-07
- 修回日期: 2022-03-22
- 网络出版日期: 2022-05-16

Research progress of monolithic integration master-oscillation power-amplifiers

TAN Man-qing^{1, 2
, ,},
YOU Dao-ming^{1, 2
,},
GUO Wen-tao^1
,,
LIU Wei-hua^{1, 2}

1.
State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
2.
College of Materials Science and Opto-electronics Technology, University of Chinese Academy of Sciences, Beijing 100049, China

Funds: Supported by National Natural Science Foundation of China (No. 61935018); Science and Technology Project of State Grid Corporation of China (No. 5700-202058482A-0-0-00)

More Information

Corresponding author: mqtan@semi.ac.cn

摘要

摘要:
单片集成式主振荡功率放大器（MOPA）具有体积小、功率大、光束质量高等优势，通过集成布拉格光栅，还能够实现窄线宽和动态单模，在倍频、泵浦、光通信和传感等领域具有重要应用价值，是近年来半导体光电子器件的研究热点。本文梳理了单片集成式MOPA的主流结构，包括锥形、脊型、布拉格光栅型和三段式MOPA，以各自的工作原理和性能特征为出发点，介绍其主要的研究方向，并结合它们各自面临的问题介绍最新的发展趋势。针对单片集成式MOPA中普遍存在的高功率下光束质量退化的问题，梳理了近年在外延层结构、腔面光学薄膜和电极设置等方面的优化设计，重点总结了单片集成式MOPA在提高光束质量及高功率、容线宽及高亮度方面的重要进展。围绕不同领域的应用需求，整理了具备高功率、窄线宽、高光束质量和高亮度等性能特征的单片集成式MOPA的研究进展，最后展望了单片集成式MOPA的发展趋势。
- 主振荡功率放大器 /
- 单片集成结构 /
- 半导体激光器 /
- 半导体光放大器 /
- 优化设计
Abstract:
Besides its advantages in volume, power and beam quality, a monolithic integration Master-Oscillation Power-amplifier (MOPA) can also realize a narrower linewidth and dynamic single-mode by integrating Bragg grating. Its application value is high in the fields of frequency doubling, pumping, optical communication and sensing, which makes it a popular research topic in recent years. This paper firstly went over the mainstream structure and characteristics of monolithic integrated MOPA, including a tapered amplifier, ridge amplifier, Bragg grating and three-section MOPA. Based on their working principles and performance characteristics, we introduce the main research directions and the latest development trends in combination with their problems. Aiming at the problem of beam quality degradation at high power in monolithic integrated MOPA, the optimal design of epitaxial layer structure, facet optical film and electrode aspects are then summarized for monolithic integrated MOPAs. After that, we sort out the research progress of MOPAs with different performance characteristics for various application requirements including high power, narrow linewidth, high beam quality and high brightness. Finally, we prospect the development trend of monolithic integrated MOPA.
- Master-Oscillation Power-Amplifier (MOPA) /
- monolithic integrated /
- diode lasers /
- semiconductor optical amplifier /
- optimal design

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图 1 锥形MOPA结构示意图。（a）立体结构；（b）平面结构

Figure 1. (a) Three-dimensional structure and (b) planar structure of a tapered-MOPA

下载: 全尺寸图片幻灯片

图 2 双锥形激光器结构示意图。（a）平面示意图；（b）立体结构示意图；（c）表面光栅的SEM剖面图；（d）表面光栅的SEM顶视图；（e）周期电注入示意图^[33]

Figure 2. Schematic diagram of double tapered laser. (a) Planar structure; (b) three-dimensional structure; (c) SEM profile of the surface grating; (d) top view of the SEM of surface grating; (e) periodic electric injection diagram^[33]

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图 3 脊型MOPA的结构示意图

Figure 3. Structure diagram of a ridge-amplifier MOPA

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图 4 弯曲脊型MOPA结构示意图^[35]

Figure 4. Structure diagram of a bent ridge-amplifier MOPA^[35]

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图 5 布拉格光栅型MOPA结构示意图。（a）DBR型；（b）DFB型

Figure 5. Structure diagrams of grating-MOPA. (a) DBR; (b) DFB

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图 6 双光栅型MOPA的结构示意图^[47]

Figure 6. Structure diagram of a double DBR grating MOPA^[47]

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图 7 光栅型MOPA用于倍频的装置图^[50]

Figure 7. Schematic diagram of the frequency doubling setup with a MOPA^[50]

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图 8 锥形光栅型MOPA结构示意图^[52]

Figure 8. Structure diagram of a MOPA with tapered grating^[52]

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图 9 三段式MOPA结构示意图

Figure 9. Structure diagram of three section MOPA

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图 10 外腔锁相MOPA结构示意图^[60]

Figure 10. MOPA-based external Cavity mode-locked laser^[60]

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图 11 分离电极MOPA的结构示意图

Figure 11. Diagram of separating electrode

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表 1 MOPA的主流结构和其特征及其面临的问题

Table 1. Structures, characteristics and problems of main MOPAs

MOPA类型	结构特征	性能特征	存在的问题
锥形MOPA	锥形放大器	输出功率高	整形耦合难度大
脊型MOPA	脊型放大器	光束质量高	输出功率低
DBR-MOPA	DBR光栅	窄线宽、输出功率高	光栅工艺复杂
DFB-MOPA	DFB光栅	窄线宽、光束质量高	光栅工艺复杂
三段式MOPA	集成控制器	可调谐、多用途	电流控制难度大

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表 2 大功率MOPA研究进展

Table 2. Progress of high-power MOPA

Year	λ/nm	P/W	Key feature	Refs.
2010	1064	12	DFB ASLOC Embed	[101]
2011	1060	12	ASLOC6^thDBR AR/AR	[102]
2016	1030	12.7	ASLOC3^thDBR AR/AR	[51]
2017	1030	15.5	TQW ASLOC 7^thDBR	[94]
2017	1030	10.5	ASLOC 7^thDBR	[93]
2018	980	7.3	TPL PHC	[84]
2019	1060	9.5	ASLOC 7^thDBR	[29]
2021	975	7	TPL	[97]
2022	785	7	DBR TPL	[103]

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表 3 窄线宽MOPA的研究进展

Table 3. Progress of MOPAs with a narrow linewidth

Year	λ/nm	Length/pm	Grating feature	Refs.
2011	1 060	<10	DBR 6^th surface	[102]
2015	1178	10	DBR 3^th surface	[10]
2017	1030	17	DBR 7^th surface	[105]
2019	996	2.4	DBR 44^th surface	[43]
2019	980	2.7	DBR 44^thsurface	[33]
2021	785	1	DBR 10^th surface	[53]
2021	783	19	DBR 10^th surface	[52]
2022	785	19	DBR TPL	[103]

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表 4 高光束质量MOPA研究进展

Table 4. Progress of MOPAs with high beam quality

Year	λ/nm	M ²/1/e²	Key feature	Refs.
2010	1064	1.3	DFB ASLOC Embed	[101]
2011	660	1.5	TPL DQW	[108]
2016	1030	1.2	ASLOC 3^thDBR AR/AR	[51]
2017	1030	1.1	TQW ASLOC 7^thDBR	[105]
2017	1030	1.2	ASLOC 7^thDBR AR/AR	[93]
2018	980	<2	TPL PBC	[84]
2019	980	1.5	TPL PBC narrow angle	[26]
2019	1060	1.1	ASLOC 7^thDBR	[109]
2019	996	1.64	44^thDFB ASLOC DQW	[43]
2019	980	1.7	44^thDFB ASLOC DQW	[33]
2021	975	1.66	TPL	[97]
2021	1550	1.26	TPL noval package	[110]

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表 5 高亮度MOPA研究进展

Table 5. Progress of MOPAs with high-brightness

Year	λ/nm	Brightness/MWcm⁻²sr⁻¹	Key feature	Refs.
2010	980	155(matrix)	ASLOC TPL	[91]
2011	1 060	860(1/e²)	TPL HR/AR	[102]
2016	1030	770(1/e²)	TQW ASLOC	[51]
2017	1030	700(1/e²)	TQW ASLOC	[93]
2017	1030	170(matrix)	DFB special structure	[94]
2018	980	85.3(matrix)	PHC TPL	[84]
2019	980	126.8(matrix)	PHC narrow angle	[85]
2021	975	369(1/e²)	TPL	[97]

下载: 导出CSV

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