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单片集成式主振荡功率放大器研究进展

谭满清 游道明 郭文涛 刘维华

谭满清, 游道明, 郭文涛, 刘维华. 单片集成式主振荡功率放大器研究进展[J]. 中国光学(中英文). doi: 10.37188/CO.2022-0022
引用本文: 谭满清, 游道明, 郭文涛, 刘维华. 单片集成式主振荡功率放大器研究进展[J]. 中国光学(中英文). doi: 10.37188/CO.2022-0022
TAN Man-qing, YOU Dao-ming, GUO Wen-tao, Wei-hua LIU. Research progress of monolithic integration master-oscillation power-amplifiers[J]. Chinese Optics. doi: 10.37188/CO.2022-0022
Citation: TAN Man-qing, YOU Dao-ming, GUO Wen-tao, Wei-hua LIU. Research progress of monolithic integration master-oscillation power-amplifiers[J]. Chinese Optics. doi: 10.37188/CO.2022-0022

单片集成式主振荡功率放大器研究进展

doi: 10.37188/CO.2022-0022
基金项目: 国家自然科学基金资助项目(No. 61935018);国家电网公司科技项目(No. 5700-202058482A-0-0-00)
详细信息
    作者简介:

    谭满清(1967—),男,湖南衡阳人,博士,研究员,博士生导师,1996年于北京理工大学获得博士学位,主要从事半导体光电子器件和模块化方面的研究,E-mail:mqtan@semi.ac.cnSupported

    游道明(1998—),男,江西上饶人,硕士研究生,2020 年于哈尔滨工业大学获得学士学位,主要从事半导体光电子器件及其集成技术方面的研究,E-mail:youdaoming20@semi.ac.cn

    郭文涛(1986—),男,山西运城人,博士,副研究员。2009 年于南昌大学应用物理学专业获学士学位;2014 年于中国科学院半导体研究所微电子学与固体电子学专业获博士学位。研究方向为用于光纤传感领域的半导体光电子器件研究。E-mail:wtguo@semi.ac.cn

  • 中图分类号: TN248.4

Research progress of monolithic integration master-oscillation power-amplifiers

Funds: Supported by National Science Foundation of China:Basic research on noval micro photonic devices and Applications (NO. 61935018)and Science and technology project of State Grid Corporation of China (No. 5700-202058482A-0-0-00)
More Information
  • 摘要:

    单片集成式主振荡功率放大器(MOPA)具有体积小、功率大、光束质量高等优势,通过集成布拉格光栅,还能够实现窄线宽和动态单模,在倍频、泵浦、光通信和传感等领域具有重要应用价值,是近年来半导体光电子器件的研究热点。本文梳理了单片集成式MOPA的主流结构,包括锥形、脊型、布拉格光栅型和三段式MOPA,以各自的工作原理和性能特征为出发点,介绍其主要的研究方向,并结合各自面临的问题介绍最新的发展趋势。针对单片集成式MOPA中普遍存在的高功率下光束质量退化的问题,梳理了近年在外延层结构、腔面光学薄膜和电极设置等方面的优化设计,重点总结了单片集成式MOPA在提高光束质量和功率方面的重要进展。围绕不同领域的应用需求,整理了具备高功率、窄线宽、高光束质量和高亮度等性能特征的单片集成式MOPA的研究进展,最后展望单片集成式MOPA的发展趋势。

     

  • 图 1  锥形MOPA结构示意图(a)立体结构;(b)平面结构

    Figure 1.  Structural diagram of (a) a tapered-MOPA; (b) a plane MOPA

    图 2  双锥形激光器(a)平面示意图(b)立体结构示意图(c)表面光栅的SEM剖面图(d)表面光栅的SEM顶视图(e)周期电注入示意图[34]

    Figure 2.  Double tapered laser diagram (a) plane (b) three-dimensional structure (c) SEM of the surface grating (d) top view of the surface grating (e) periodic electric injection[34]

    图 3  脊型MOPA的结构示意图

    Figure 3.  Structure of a Ridge-waveguide MOPA

    图 4  弯曲脊型MOPA结构示意图[36]

    Figure 4.  Structure of a bent Ridge-Amplifier MOPA[36]

    图 5  布拉格光栅型MOPA结构示意图(a)DBR型;(b)DFB型

    Figure 5.  Grating-MOPA structure diagram (a) DBR; (b) DFB

    图 6  基于外腔光栅的MOPA阵列[57]

    Figure 6.  Structure of a MOPA array based on external grating[57]

    图 7  三段式MOPA结构示意图[60]

    Figure 7.  Structure of a three-section MOPA[60]

    图 8  可调谐的三段式MOPA示意图(a)传统结构;(b)倾斜腔;(c)弯曲腔[69]

    Figure 8.  Structure of a three-section MOPA (a) Traditonal; (b) Flared; (c) Bended[69]

    图 9  前腔面反射率为1%和10%对应的MOPA腔内光子密度和载流子密度[92]

    Figure 9.  Photon density and carrier density corresponding to the reflectivity of the front facet of 1% and 10%[92]

    图 10  分离电极MOPA的结构示意图

    Figure 10.  Diagram of separating electrode

    表  1  MOPA的结构、特征及其面临的问题

    Table  1.   Structure, characteristics and problems of MOPAs

    MOPA类型结构特征性能特征存在的问题
    锥形MOPA锥形放大器输出功率高整形耦合难度大
    脊型MOPA脊型放大器光束质量高输出功率低
    DBR-MOPADBR光栅窄线宽、输出功率高光栅工艺复杂
    DFB-MOPADFB光栅窄线宽、光束质量高光栅工艺复杂
    三段式MOPA集成控制器可调谐、多用途电流控制难度大
    下载: 导出CSV

    表  2  大功率MOPA研究进展

    Table  2.   Progress of high-power MOPAs

    Yearλ/nmP/WKey featureRef.
    2010106412DFB ASLOC Embed[103]
    2011106012ASLOC6thDBR AR/AR[104]
    2016103012.7ASLOC3thDBR AR/AR[50]
    2017103015.5TQW ASLOC 7thDBR[96]
    2017103010.5ASLOC 7thDBR[95]
    20189807.3TPL PHC[85]
    201910609.5ASLOC 7thDBR[30]
    20219757TPL[99]
    20227857DBR TPL[105]
    下载: 导出CSV

    表  3  窄线宽MOPA的研究进展

    Table  3.   Progress of MOPAs with a narrow wavelength

    Yearλ/nmLength/pmGrating FeatureRef.
    2011980<10DBR 6th surface[104]
    2015117810DBR 3th surface[11]
    2017103017DBR 7th surface[107]
    20199962.4DBR 44th surface[44]
    20199802.7DBR 44th surface[34]
    20217851DBR 10th surface[52]
    202178319DBR 10th surface[51]
    202278519DBR TPL[105]
    下载: 导出CSV

    表  5  高亮度MOPA研究进展

    Table  5.   Progress of high-brightness MOPAs

    Yearλ/nmBrightness/MWcm−2sr−1Key featureRef.
    2010980155(matrix)ASLOC TPL[93]
    2011980860(1/e2)TPL HR/AR[104]
    20161030770(1/e2)TQW ASLOC DFB[50]
    20171030700(1/e2)TQW ASLOC DBR[95]
    20171030170(matrix)DFB special structure[96]
    201898085.3(matrix)PHC TPL[85]
    2019980126.8(matrix)PHC narrow angle[86]
    2021975369(1/e2)TPL[99]
    下载: 导出CSV

    表  4  高光束质量MOPA研究进展

    Table  4.   Progress of high-quality MOPAs

    Yearλ/nmM2/1/e2Key featureRef.
    201010641.3DFB ASLOC Embed[103]
    20116601.5TPL DQW[110]
    201610301.2ASLOC 3thDBR AR/AR[50]
    201710301.1TQW ASLOC 7thDBR[107]
    201710301.2ASLOC 7thDBR AR/AR[95]
    2018980<2TPL PBC[85]
    20199801.5TPL PBC narrow angle[27]
    201910601.1ASLOC 7thDBR[111]
    20199961.6444thDFB ASLOC DQW[44]
    20199801.744thDFB ASLOC DQW[34]
    20219751.66TPL[99]
    202115501.26TPL noval package[112]
    下载: 导出CSV
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