基于可调谐半导体激光吸收光谱的氧气浓度高灵敏度检测研究

杨舒涵; 乔顺达; 林殿阳; 马欲飞

doi:10.37188/CO.2022-0029

基于可调谐半导体激光吸收光谱的氧气浓度高灵敏度检测研究

doi: 10.37188/CO.2022-0029

哈尔滨工业大学航天学院可调谐激光技术国家级重点实验室, 哈尔滨 150001

基金项目: 国家自然科学基金（No. 62022032，No. 61875047，No. 61505041）；黑龙江省优秀青年科学基金（No. YQ2019F006）；黑龙江省博士后科研启动金（No. LBH-Q18052）；中央高校基本科研业务费专项资金

详细信息

作者简介:
杨舒涵（1999—），女，吉林四平人，硕士研究生，2021于哈尔滨工业大学获得学士学位，主要研究方向为激光光谱技术。E-mail：yangshuhan@stu.hit.edu.cn

马欲飞（1984—），男，教授，博士，籍贯甘肃省庆阳市，2013年于哈尔滨工业大学获得博士学位，曾在美国莱斯大学进行联合培养，主要研究方向为激光光谱技术及应用。E-mail：mayufei@hit.edu.cn

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出版历程
- 收稿日期: 2022-03-01
- 修回日期: 2022-03-22
- 网络出版日期: 2022-06-16

Research on highly sensitive detection of oxygen concentrations based on tunable diode laser absorption spectroscopy

National Key Laboratory of Science and Technology on Tunable Laser, Harbin Institute of Technology, Harbin 150001, China

Funds: Supported by the National Outstanding Youth Science Fund of China (No. 62022032), National Natural Science Foundation of China (No. 61875047 and No. 61505041), Natural Science Foundation of Heilongjiang Province of China (No. YQ2019F006), Financial Grant from the Heilongjiang Province Postdoctoral Foundation (No. LBH-Q18052), Fundamental Research Funds for the Central Universities

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Corresponding author: mayufei@hit.edu.cn

摘要

摘要:
可调谐半导体激光吸收光谱(TDLAS)是近年发展起来的一种激光光谱气体检测技术，相比于常见的电化学、离子导电陶瓷等技术，其具有选择性强、灵敏度高、响应快、可在线测量、抗背景光谱干扰能力强等优点，适用于复杂环境中气体的长期在线检测。氧气(O₂)是人类生存环境中的重要气体，O₂浓度的检测在生产生活各个领域应用广泛、意义重大。基于此，本文采用TDLAS技术对空气中的O₂进行高灵敏度测量。采用输出波长为760 nm的半导体激光器作为光源，直接吸收光谱法获得环境中的氧气浓度为20.56%，最小检测极限为5.53×10⁻³。在波长调制方法中，优化了激光波长调制深度，得到了完整的二次谐波波形，可用于标定氧气浓度。此系统的信噪比为380.74，最小检测极限约为540×10⁻⁶。本文的传感系统具有良好的O₂检测能力，可广泛用于各个领域中的O₂浓度检测。
- TDLAS /
- 氧气(O₂)浓度检测 /
- 直接测量 /
- 波长调制 /
- 半导体激光器
Abstract:
Tunable Diode Laser Absorption Spectroscopy (TDLAS) is a recently developed laser spectral gas detection technology. Compared with common oxygen sensors such as electrochemical devices and ionic conductive ceramics, TDLAS has the advantages of high selectivity and sensitivity, fast response, on-line measurement and strong anti-background spectral interference ability. Oxygen (O₂) is an important gas in habitable environments and is greatly significant to industrial production and human life, and the detection of O₂ concentration is also widely used in these fields. Based on this, we adopt TDLAS technology to carry out high sensitivity measurements of O₂ in air. Using a semiconductor laser with an output wavelength of 760 nm as the light source, the oxygen concentration in the environment is 20.56% by direct absorption spectroscopy, and the minimum detection limit is 5.53×10⁻³. In the wavelength modulation spectroscopy method, the laser wavelength modulation depth is optimized to obtain a complete second harmonic waveform, which can be used to calibrate the oxygen concentration. The SNR of the system is 380.74, and the minimum detection limit is about 540×10⁻⁶. The system realized in this paper has good oxygen detection ability and can be widely used in various fields of oxygen concentration detection.
- TDLAS /
- Oxygen (O₂) concentration detection /
- direct measurement /
- wavelength modulation /
- semiconductor laser

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图 1 TDLAS测量系统结构示意图

Figure 1. Structure diagram of TDLAS measurement system

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图 2 基于HITRAN2020数据库仿真的O₂吸收谱线

Figure 2. O₂ absorption line based on the HITRAN2020 database

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图 3 激光器输出功率与电流关系曲线

Figure 3. Relationship between laser output power and the injected current

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图 4 不同拟合阶数时S-G滤波结果

Figure 4. S-G filtering results for different orders

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图 5 不同窗口长度时S-G滤波结果

Figure 5. S-G filtering results for different window lengths

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图 6 多项式拟合参考光基线

Figure 6. The baseline of the reference light fitted by a polynomial

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图 7 291 K温度下空气中O₂的吸收光谱图

Figure 7. Absorption spectra of oxygen in air at 291 K

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图 8 TDLAS系统信号幅值随调制深度的变化关系

Figure 8. The variation of the TDLAS signal amplitude with modulation depth

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图 9 TDLAS 2f信号与噪声

Figure 9. 2f signal and noise for the TDLAS system

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