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基于可调谐半导体激光吸收光谱的氧气浓度高灵敏度检测研究

杨舒涵 乔顺达 林殿阳 马欲飞

杨舒涵, 乔顺达, 林殿阳, 马欲飞. 基于可调谐半导体激光吸收光谱的氧气浓度高灵敏度检测研究[J]. 中国光学(中英文). doi: 10.37188/CO.2022-0029
引用本文: 杨舒涵, 乔顺达, 林殿阳, 马欲飞. 基于可调谐半导体激光吸收光谱的氧气浓度高灵敏度检测研究[J]. 中国光学(中英文). doi: 10.37188/CO.2022-0029
YANG Shu-han, QIAO Shun-da, LIN Dian-yang, MA Yu-fei. Research on highly sensitive detection of oxygen concentrations based on tunable diode laser absorption spectroscopy[J]. Chinese Optics. doi: 10.37188/CO.2022-0029
Citation: YANG Shu-han, QIAO Shun-da, LIN Dian-yang, MA Yu-fei. Research on highly sensitive detection of oxygen concentrations based on tunable diode laser absorption spectroscopy[J]. Chinese Optics. doi: 10.37188/CO.2022-0029

基于可调谐半导体激光吸收光谱的氧气浓度高灵敏度检测研究

doi: 10.37188/CO.2022-0029
基金项目: 国家优秀青年科学基金(No. 62022032)、国家自然科学基金(No. 61875047,No. 61505041)、黑龙江省优秀青年科学基金(No. YQ2019F006)、黑龙江省博士后科研启动金(No. LBH-Q18052)、中央高校基本科研业务费专项资金
详细信息
    作者简介:

    杨舒涵(1999—),女,硕士研究生,2021于哈尔滨工业大学获得学士学位,主要研究方向为激光光谱技术。Email:yangshuhan@stu.hit.edu.cn

    马欲飞(1984—),男,教授,博士,主要研究方向为激光光谱技术及应用。Email:mayufei@hit.edu.cn

  • 中图分类号: O433.4

Research on highly sensitive detection of oxygen concentrations based on tunable diode laser absorption spectroscopy

Funds: Supported by the National Natural Science Foundation of China (Grant No. 62022032, No. 61875047 and No. 61505041), Natural Science Foundation of Heilongjiang Province of China (Grant No. YQ2019F006), Financial Grant from the Heilongjiang Province Postdoctoral Foundation (Grant No. LBH-Q18052), Fundamental Research Funds for the Central Universities.
More Information
  • 摘要: 可调谐半导体激光吸收光谱(TDLAS)是近年发展起来的一种激光光谱气体检测技术,相比于常见的电化学、离子导电陶瓷等技术,其具有选择性强、灵敏度高、响应快、可在线测量、抗背景光谱干扰能力强等优点,适用于复杂环境中气体的长期在线检测。氧气(O2)是人类生存环境中的重要气体,O2浓度的检测在生产生活各个领域应用广泛、意义重大。基于此,本文采用TDLAS技术对空气中O2进行高灵敏度测量。采用输出波长为760 nm的半导体激光器作为光源,直接吸收光谱法获得环境中的氧气浓度为20.56 %,最小检测极限为283.27×10−6。在波长调制方法中,优化了激光波长调制深度,得到了完整的二次谐波波形,可用于标定氧气浓度。此系统的信噪比为380.74,最小检测极限约为540×10−9。本文中实现的传感系统具有良好的O2检测能力,可广泛用于各个领域中O2浓度的检测。

     

  • 图 1  TDLAS测量系统结构示意图

    Figure 1.  The structure diagram of TDLAS measurement system

    图 2  基于HITRAN数据库仿真的O2吸收谱线

    Figure 2.  O2 absorption line based on the HITRAN2020 database

    图 3  激光器输出功率与电流关系曲线

    Figure 3.  Relationship between laser output power and the injected current

    图 4  不同拟合阶数时S-G滤波结果

    Figure 4.  S-G filtering results for different orders

    图 5  不同窗口长度时S-G滤波结果

    Figure 5.  S-G filtering results for different window lengths

    图 6  多项式拟合参考光基线

    Figure 6.  The baseline of the reference light fitted by a polynomial

    图 7  291 K温度下空气中O2的吸收光谱图

    Figure 7.  Absorption spectra of oxygen in air at 291 K

    图 8  TDLAS系统信号幅值随调制深度的变化关系

    Figure 8.  The variation of the TDLAS signal amplitude with modulation depth

    图 9  TDLAS 2f信号与噪声

    Figure 9.  2f signal and noise for the TDLAS system

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  • 网络出版日期:  2022-06-16

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