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用于量子传感的窄线宽无磁垂直腔面发射激光器

张星 张建伟 周寅利 薛洪波 宁永强 王立军

张星, 张建伟, 周寅利, 薛洪波, 宁永强, 王立军. 用于量子传感的窄线宽无磁垂直腔面发射激光器[J]. 中国光学(中英文), 2022, 15(5): 1038-1044. doi: 10.37188/CO.2022-0135
引用本文: 张星, 张建伟, 周寅利, 薛洪波, 宁永强, 王立军. 用于量子传感的窄线宽无磁垂直腔面发射激光器[J]. 中国光学(中英文), 2022, 15(5): 1038-1044. doi: 10.37188/CO.2022-0135
ZHANG Xing, ZHANG Jian-wei, ZHOU Yin-li, Xue Hong-bo, NING Yong-qiang, WANG Li-jun. Narrow line width and magnetism-free vertical-cavity surface-emitting lasers for quantum sensing[J]. Chinese Optics, 2022, 15(5): 1038-1044. doi: 10.37188/CO.2022-0135
Citation: ZHANG Xing, ZHANG Jian-wei, ZHOU Yin-li, Xue Hong-bo, NING Yong-qiang, WANG Li-jun. Narrow line width and magnetism-free vertical-cavity surface-emitting lasers for quantum sensing[J]. Chinese Optics, 2022, 15(5): 1038-1044. doi: 10.37188/CO.2022-0135

用于量子传感的窄线宽无磁垂直腔面发射激光器

doi: 10.37188/CO.2022-0135
基金项目: 国家重点研发计划(No. 2018YFB2002401);国家自然科学基金项目(No. 62090060, No. 52172165);中国科学院科技网络服务计划项目(No. KFJ-STS-QYZD-2021-15-001);中国科学院青年创新促进会(No. 2017260, No. 2018181)
详细信息
    作者简介:

    张 星(1983—),男,吉林辉南人,博士,硕士生导师,2005年于吉林大学获得学士学位;2011年于中国科学院长春光学精密机械与物理研究所获得博士学位,主要从事窄线宽垂直腔面发射激光器芯片研究。E-mail:zhangx@ciomp.ac.cn

  • 中图分类号: TN248.4

Narrow line width and magnetism-free vertical-cavity surface-emitting lasers for quantum sensing

Funds: Supported by National Key Research and Development Program (No. 2018YFB2002401); National Natural Science Foundation of China (No. 62090060, No. 52172165); Science and Technology Service Network Program of the Chinese Academy of Sciences (No. KFJ-STS-QYZD-2021-15-001); Youth Innovation Promotion Association of the Chinese Academy of Sciences (No. 2017260, No. 2018181)
More Information
  • 摘要:

    为了研制出表面微透镜集成外腔的垂直腔面发射激光器(VCSEL),实现窄线宽无磁激光输出,满足原子磁强计等量子传感器应用要求,本文设计并生长了适合于表面集成微透镜的VCSEL外延结构,完成了表面微透镜集成外腔VCSEL器件制备,在电极材料方面选取无磁材料以满足应用要求。实验结果表明:研制的VCSEL器件工作温度达到90 °C,激光波长为896.3 nm,功率为1.52 mW,边模抑制比为36.3 dB,激光线宽为38 MHz,封装为模组后的磁场强度低于0.03 nT。结果表明本文研制的窄线宽无磁VCSEL满足量子传感的应用需求。

     

  • 图 1  VCSEL器件结构示意图

    Figure 1.  Schematic diagram of VCSEL structure

    图 2  封装后的VCSEL

    Figure 2.  The packaged VCSEL

    图 3  湿法刻蚀微透镜的工艺流程

    Figure 3.  Fabrication steps of micro-lens wet etching

    图 4  微透镜表面形貌AFM测试结果

    Figure 4.  Surface morphology of the micro-lens by AFM

    图 5  25 °C下测试得到的功率-电流-电压曲线

    Figure 5.  P-I-V characteristics at room temperature (25 °C)

    图 6  20~90 °C下测试得到的功率-电流曲线

    Figure 6.  P-I characteristics under 20~90 °C

    图 7  VCSEL的输出光谱测试结果

    Figure 7.  Measured output spectrum of the VCSEL

    图 8  VCSEL线宽测试结果

    Figure 8.  Measured frequency line width of the VCSEL

    图 9  无磁封装VCSEL光源模组

    Figure 9.  Packaged VCSEL magnetism-free module

    图 10  VCSEL模组剩磁测试结果

    Figure 10.  Testing results of the remaining magnetic field intensity of VCSEL

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出版历程
  • 收稿日期:  2022-06-17
  • 修回日期:  2022-06-28
  • 网络出版日期:  2022-08-03

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