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半导体激光器侧向模式控制技术的研究进展

汪丽杰 佟存柱 王延靖 陆寰宇 张新 田思聪 王立军

汪丽杰, 佟存柱, 王延靖, 陆寰宇, 张新, 田思聪, 王立军. 半导体激光器侧向模式控制技术的研究进展[J]. 中国光学(中英文), 2022, 15(5): 895-911. doi: 10.37188/CO.2022-0143
引用本文: 汪丽杰, 佟存柱, 王延靖, 陆寰宇, 张新, 田思聪, 王立军. 半导体激光器侧向模式控制技术的研究进展[J]. 中国光学(中英文), 2022, 15(5): 895-911. doi: 10.37188/CO.2022-0143
WANG Li-jie, TONG Cun-zhu, WANG Yan-jing, LU Huan-yu, ZHANG Xin, TIAN Si-cong, WANG Li-jun. Recent advances in lateral mode control technology of diode lasers[J]. Chinese Optics, 2022, 15(5): 895-911. doi: 10.37188/CO.2022-0143
Citation: WANG Li-jie, TONG Cun-zhu, WANG Yan-jing, LU Huan-yu, ZHANG Xin, TIAN Si-cong, WANG Li-jun. Recent advances in lateral mode control technology of diode lasers[J]. Chinese Optics, 2022, 15(5): 895-911. doi: 10.37188/CO.2022-0143

半导体激光器侧向模式控制技术的研究进展

doi: 10.37188/CO.2022-0143
基金项目: 国家自然科学基金(No. 62025506, No. 62134008, No. 61790584);中国科学院青年创新促进会(No. 2021217);长春市科技计划发展项目(No. 21SH6)
详细信息
    作者简介:

    汪丽杰(1985—),男,河北石家庄人,副研究员,硕士生导师,2013年于中国科学院长春光学精密机械与物理研究所获得博士学位,主要从事高亮度半导体激光方面的研究。E-mail:wanglijie@ciomp.ac.cn

    佟存柱(1976—),男,吉林伊通人,研究员,博士生导师,2005年于中国科学院半导体研究所获得博士学位,主要从事半导体激光方面的研究。E-mail:tongcz@ciomp.ac.cn

  • 中图分类号: TN248.4

Recent advances in lateral mode control technology of diode lasers

Funds: Supported by National Natural Science Foundation of China (No. 62025506, No. 62134008, No. 61790584); Youth Innovation Promotion Association, CAS (No. 2021217); Changchun City Science and Technology Development Plan (No. 21SH6)
More Information
  • 摘要:

    高功率半导体激光器在固体或光纤激光器泵浦、材料加工、激光雷达、空间通讯及国防等领域具有重大需求,但传统器件面临发散角大、光束质量差、亮度低的难题,限制了其直接应用。宽区半导体激光器具有输出功率和转换效率高的优点,但其侧向模式受多种物理效应的影响,高电流下激射模式数很大,导致远场宽度随电流增大迅速展宽,光束质量非常差,成为制约半导体激光亮度提高的关键瓶颈难题。因此,需要对半导体激光器的侧向模式进行控制。本文首先从半导体激光器的侧向模式影响机制出发,分析了其侧向模式特性及光场分布与器件结构的关联关系;接着,介绍了目前主要的侧向模式控制技术,通过抑制高阶模式及侧向远场展宽,实现光束质量的改善及激光亮度的提升。采用先进的侧向模式控制技术,可从芯片层次发展新型的高亮度半导体激光器,有利于拓展半导体激光器应用领域及降低应用成本,具有重要的研究意义。

     

  • 图 1  半导体激光器的侧向模式影响机制

    Figure 1.  Influence mechanisms of diode laser lateral modes

    图 2  不同阶侧模随电流增大时光场分布变化

    Figure 2.  Simulated near-field distributions of different order lateral modes as a function of increased current

    图 3  半导体激光器不同阶侧模的近场和远场分布

    Figure 3.  Calculated (a) near-field and (b) far-field profiles of the lateral mode with different mode orders

    图 4  (a)增益导引、(b)质子注入及(c)二次外延电流阻挡层的半导体激光器侧向电流扩散示意图

    Figure 4.  Schematic diagram of lateral current spreading for diode lasers utilizing (a) gain-guiding, (b) ion implantation, (c) current-blocking layers after the two-step epitaxial growth

    图 5  空间电流调制(SCM)半导体激光器的结构示意图

    Figure 5.  Schematic diagram of diode laser with Spatial Current-Modulated (SCM) structure

    图 6  侧向脊波导宽区半导体激光器的结构示意图

    Figure 6.  Schematic diagram of broad-area diode laser with multiple lateral ridge waveguides

    图 7  基于LLGS结构的布拉格反射波导激光器结构示意图

    Figure 7.  Schematic diagram of bragg reflection waveguide laser with Ladder Like Groove Structure (LLGS)

    图 8  微条耦合宽区(MSBA)半导体激光器的结构示意图

    Figure 8.  Schematic diagram of GaSb-based microstripebroad-area (MSBA) lasers

    图 9  GaSb基半导体激光器鱼骨形微光学结构示意图

    Figure 9.  Schematic diagram of GaSb based diode laser with fish bone micro structures

    图 10  锯齿微结构激光器的结构示意图

    Figure 10.  Schematic diagram of the laser with sawtooth micro structure

    图 11  箭头型沟槽微光学结构激光器的结构示意图

    Figure 11.  Schematic diagram of diode laser with arrow-trench micro structure

    图 12  (a)刻蚀微孔的显微镜照片及(b)不同的激光远场形貌

    Figure 12.  (a) Micrograph of etched micro-holes and (b) different far-field patterns under various currents

    图 13  半导体激光器不同模式的近场分布及损耗剪裁位置

    Figure 13.  Calculated near-field profiles of the lateral modes with different orders and the loss tailoring placement

    图 14  (a)损耗调控宽区半导体激光器结构示意图;(b)测得的有结构器件和传统宽区结构器件在不同电流下的侧向光束质量对比

    Figure 14.  (a) Schematic diagram of the loss tailoring BAL; (b)measured lateral beam quality of the structured and unstructured BALs at different currents

    图 15  微结构激光器在室温连续工作下的功率-电流-电压特性曲线

    Figure 15.  Measured power-current-voltage characteristics of diode lasers with microstructures

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  • 收稿日期:  2022-06-24
  • 修回日期:  2022-07-19
  • 网络出版日期:  2022-08-04

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