氨气高精度激光光谱检测装置的设计及实现

杨天悦; 宫廷; 郭古青; 孙小聪; 田亚莉; 邱选兵; 何秋生; 高晓明; 李传亮

doi:10.37188/CO.2023-0023

氨气高精度激光光谱检测装置的设计及实现

doi: 10.37188/CO.2023-0023

杨天悦^1,,
宫廷^1,,
郭古青^1,,
孙小聪^1,,
田亚莉^1,,
邱选兵^1,,
何秋生^2,,
高晓明^3,,
李传亮^1, ,

1.
太原科技大学应用科学学院, 山西太原 030024
2.
太原科技大学环境与安全学院, 山西太原 030024
3.
中国科学院安徽光学精密机械研究所环, 安徽合肥 230031

基金项目: 国家自然科学基金（No. U1810129 & No. 52076145）；山西省科技成果转化引导专项项目（No. 201904D131025）

详细信息

作者简介:
杨天悦（1997—），男，天津人，硕士研究生，2020年于太原科技大学获得学士学位，主要从事激光光谱学及应用等方面的研究。E-mail：1330944702@qq.com

宫　廷（1992—），女，山西忻州人，博士，讲师，硕士生导师，主要从事激光光谱学及应用等方面的研究。E-mail：gongting@tyust.edu.cn

郭古青（1986—），男，山西阳泉人，博士，副教授，硕士生导师，主要从事新型材料表征方法的研究。E-mail：2016035@tyust.edu.cn

孙小聪（1996—），女，山西运城人，博士，讲师，主要从事量子光学等方面的研究。E-mail：sunxiaocong@tyust.edu.cn

田亚莉（1991—），女，山西吕梁人，博士，讲师，主要从事原子与分子物理方面的研究。E-mail：tianyali@tyust.edu.cn

邱选兵（1980—），男，四川内江人，博士，教授，博士生导师，主要从事激光光谱技术、嵌入式系统的研究。E-mail：qiuxb@tyust.edu.cn

何秋生（1977—），男，山西介休人，博士，教授，博士生导师，主要从事有机污染物相关的大气环境、大气化学和污染修复研究。E-mail：heqs@tyust.edu.cn

高晓明（1965—），男，安徽南陵人，博士，研究员，博士生导师，主要从事高灵敏度光谱检测技术及应用的研究。E-mail：xmgao@aiofm.ac.cn

李传亮（1983—），男，山东沂源人，博士，教授，博士生导师，2011年于华东师范大学获得博士学位，主要从事激光光谱学及应用、光电传感装备的研究。E-mail：clli@tyust.edu.cn

中图分类号: O433.5+1
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出版历程
- 录用日期: 2023-04-13
- 网络出版日期: 2023-04-13

Design and achievement of device for ammonia gas detection with high-precision based on laser spectroscopy

1.
School of Applied Science, Taiyuan University of Science and Technology, Taiyuan 030024, China
2.
School of Environment and Safety, Taiyuan University of Science and Technology, Taiyuan 030024, China
3.
Anhui Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, Hefei 230031, China

Funds: National Natural Science Foundation of China (No. U1810129 & No. 52076145); Transformation of Scientific and Technological Achievements Fund of Shanxi Province (No. 201904D131025)

More Information

Corresponding author: clli@tyust.edu.cn

摘要

摘要:
氨气排放会对环境以及人体健康造成危害，因此对环境中氨气浓度的高精度监测显得尤为重要。本文基于具有高灵敏度、高响应速度等优点的离轴积分腔输出光谱技术(OA-ICOS)对氨气高精度检测装置进行了设计。使用基长30 cm装有反射率为99.99%的高反镜的光学谐振腔作为气体吸收池实现了近3000 m的光程，将中心波长为1528 nm的分布反馈式激光器（DFB）调谐至6548.611 cm⁻¹和6548.798 cm⁻¹附近，在常温140 torr的气压下对10−50 ppm范围内NH₃进行了检测，测量结果表明NH₃浓度与信号幅值的线性拟合度R²可达0.99979。使用Allan方差对实验数据进行分析得到在13 s后系统的平均检测极限为9.8 ppb，在103 s时系统的最低检测极限可达7 ppb（S/N~1）。通过实验验证，表明该检测装置具有良好的稳定性与高灵敏度，满足对氨气高精度检测的需求，也为国内自主研发痕量气体高精度检测设备提供了技术经验。
- 离轴积分腔输出光谱 /
- 氨气 /
- 高精度检测
Abstract:
Ammonia emission will cause harm to the environment and human health. It is particularly important to monitor the ammonia concentration with high precision. Off-axis integrating cavity output spectroscopy (OA-ICOS), which has the advantages of high sensitivity and high response speed, is used in this paper and has been designed to a high-precision ammonia detection device. The gas absorption cell is composed of two high reflection mirrors with a reflectivity of 99.99%, and the base length of the optical resonator is 30 cm. Finally, the optical path of nearly 3000 m was realized. The distributed feedback laser (DFB) with a central wavelength of 1528 nm which is tuned to 6548.611 cm⁻¹ and 6548.798 cm⁻¹. The concentration of NH₃ is changed from 10 ppm to 50 ppm and is detected under the atmospheric pressure of 140 torr at room temperature. The measurement results show that the linear fit R² between NH₃ concentration and signal amplitude can reach 0.99979. The Allan variance is used to analyze the experimental data, and the minimum detection limit of the system can reach 7 ppb at 103 s. The experimental results show that the detection device has good stability and high sensitivity, meets the demand for high-precision detection of ammonia gas, and also provides technical experience for domestic independent research and development of high-precision detection equipment for trace gases.
- Off-axis integrated cavity output spectroscopy /
- NH₃ /
- High-precision detection

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图 1 （a）检测装置原理图；（b）谐振腔结构示意图

Figure 1. (a) Schematic diagram of detection device; (b) Schematic diagram of resonator structure

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图 2 检测装置实物图

Figure 2. Detection device diagram

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图 3 （a）10 ppm NH3吸收信号；（b）去除背景信号后的NH3吸收信号

Figure 3. (a)10 ppm NH3 absorption signal; (b) NH3 absorption signal after removing background signal

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图 4 不同浓度下的NH₃测量信号

Figure 4. Measured NH₃ signals at different concentrations

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图 5 NH₃浓度与NH₃吸收信号幅度间的线性关系

Figure 5. Linear relationship between the real concentrations and the fitted ones

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图 6 （a）浓度为10 ppm的NH₃ 测量2000 s的原始数据；（b）Allan方差分析图

Figure 6. (a) Row data of individual concentration measurements over 2000 s; (b) Allan variance as a function of integration time

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图 7 浓度为10 ppm NH₃标准气体的检测浓度分布图，红线为高斯函数拟合结果

Figure 7. Detection concentration distribution diagram of NH3 standard gas with concentration of 10 ppm. The red line is a Gaussian profile fitting

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表 1 各检测方法对比表

Table 1. Comparison table of various detection methods

序号	研究者	检测方法	吸收线位置 (cm⁻¹)	吸收线强 (cm/mol)	光程 (m)	检测极限（ppm）
1	Claps ^[11]	VOAS	6528.76	1.174e-21	36	0.7
2	Miller ^[12]	WMS	1103.44	1.514e-19	60	0.0002
3	Guo ^[13]	WMS 2f/1f	6599.9	1.387e-21	15	0.16
4	Baer ^[15]	OA-ICOS	6528.9	1.350e-21	5035	0.002
5	Jia ^[16]	OA-ICOS& WMS	6528.76	1.174e-21	115.4	0.274
6	Our work	OA-ICOS	6548.61	1.879e-21	3000	0.007
6	Our work	OA-ICOS	6548.79	1.847e-21	3000	0.007
注：VOAS (Vibrational overtone absorption spectroscopy); WMS (Wavelength modulation spectroscopy); OA-ICOS (Off-axis integrated cavity output spectroscopy).

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