产生环形激光的光学系统设计

陈宝华; 吴泉英; 唐运海; 范君柳; 陈晓翌; 余浩墨; 孙毅

doi:10.37188/CO.2023-0045

产生环形激光的光学系统设计

doi: 10.37188/CO.2023-0045

1.
苏州科技大学物理科学与技术学院江苏省微纳热流技术与能源应用重点实验室, 江苏苏州 215009
2.
苏州明世光学科技有限公司, 江苏苏州 215127
3.
江苏省研究生工作站苏州苏大明世光学股份有限公司, 江苏苏州 215127

基金项目: 国家自然科学基金资助项目（No. 62275187，No. 61875145，No. 11804243）；江苏省十四五光学工程重点学科项目资助（No. 2021135）；苏州市产业前瞻与关键核心技术项目资助（No. SYC2022145）；苏州市重点实验室（No. SZS201202）

详细信息

作者简介:
陈宝华（1990—），男，江苏泰州人，实验师，2016年于苏州大学获得硕士学位，现为苏州科技大学物理实验中心实验师，主要从事光学仪器加工与检测方面研究。E-mail：chenbaohua@mail.usts.edu.cn

吴泉英（1965—），女，江苏苏州人，教授，博士生导师，2006年于苏州大学获得博士学位，现为苏州科技大学物理科学与技术学院教授，主要从事光学仪器设计、加工与检测方面研究。E-mail：wqycyh@mail.usts.edu.cn

中图分类号: O439
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出版历程
- 收稿日期: 2023-03-20
- 修回日期: 2023-04-19
- 网络出版日期: 2023-07-12

Design of an optical system for generating ring-shaped laser beam

1.
Jiangsu Key Laboratory of Micro and Nano Heat Fluid Flow Technology and Energy Application, School of Physical Science and Technology, Suzhou University of Science and Technology, Suzhou 215009, China
2.
Suzhou Mason Optical Co. Ltd., Suzhou 215127, China
3.
Graduate Practice Station in Soochow Mason Optics Co. Ltd., Suzhou 215127, China

Funds: Supported by National Natural Science Foundation of China (No. 62275187, No. 61875145, No. 11804243); The Jiangsu Key Disciplines of the Fourteenth Five-Year Plan (No. 2021135); Suzhou Industrial Outlook and Key Core Technology Project (No. SYC2022145); Suzhou Key Laboratory (No. SZS201202)

More Information

Corresponding author: wqycyh@mail.usts.edu.cn

摘要

摘要:
为了产生半径可自由调控的聚焦环形激光且确保离焦后光束强度仍均匀，本文提出一种透射-反射式组合的环形光光学系统设计方法。对于透射式系统，基于等能量分割原理，建立入射光与出射光投射高度的映射函数，优化透镜的各项参数，将入射的高斯光先整形成平顶圆形光，实现光束强度均匀化。反射式系统通过调整焦面环形光直径调控范围、工作距离等参数，结合几何光线追迹原理，计算圆锥反射镜、抛物柱面镜及动镜的各项参数，将平顶圆形光再整形成环形光。实验结果表明：当动镜半顶角为16°时，所设计系统能够实现聚焦环形光半径在15~30 mm范围的自由调控，尺寸误差不超过0.05 mm，离焦后强度均匀度达到84%。该设计方法无需更换系统镜片即可兼顾强度均匀性和尺寸自由度，可操作性好，产生的环形光加工精度和效率更高。
- 光学系统 /
- 环形激光 /
- 半径调控 /
- 离焦均匀
Abstract:
We present a method for designing a transmissive-reflective combined optical system to generate a focused ring-shaped laser beam. The design aims to achieve a freely adjustable radius for the focused ring-shaped laser beam and ensure uniform beam intensity even after defocusing. Based on the principle of equal energy splitting, the transmissive system establishes mapping functions for the input and output light projection height. It optimizes the lens parameters to shape the incident Gaussian light into a flat-topped circular shape, thus achieving uniformity of beam intensity. On the other hand, the reflective system uses the adjustable diameter range of the focal plane ring-shaped light and working distance parameters. By applying the principle of geometric ray tracing, it calculates the parameters of the conical reflecting mirror, parabolic cylindrical mirror, and dynamic mirror, then the flat-topped circular light is transformed into a ring-shaped light. The experimental results show that when the half-apex angle of the dynamic mirror is 16°, the designed system can achieve a freely adjustable radius for the focused ring-shaped laser beam from 15 mm to 30 mm with a size error not more than 0.05 mm, and the intensity uniformity after defocusing reaches 84%. The design method can achieve both uniformity of intensity and freedom of size adjustment without replacing the system lens. It has good operability and yields higher precision and efficiency in the processing of ring-shaped light.
- optical system /
- ring-shaped laser /
- radius control /
- defocus uniformity

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图 1 透射-反射式组合的环形光光学系统

Figure 1. Transmissive-reflective combined ring-shaped beam optical system

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图 2 透射式平顶光束整形系统

Figure 2. Transmissive flat-top beam shaping system

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图 3 不同切趾因子的（a）高斯光强分布曲线及（b）投射高度关系曲线

Figure 3. (a) Gaussian light intensity distribution curves and (b) projection height curve under different apodization factors

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图 4 透射式平顶光束整形系统设计图及设计结果

Figure 4. Transmission flat-topped beam shaping system and the results of the system

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图 5 反射式聚焦环形光整形系统

Figure 5. Reflective focusing ring-shaped laser beam system

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图 6 半顶角θ与移动距离L和焦面补偿距离ΔZ之间的关系曲线图

Figure 6. Relationship between the half vertex angle θ, and the distance L, the focal compensation distance ΔZ

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图 7 动镜是内圆锥时的反射式环形光系统及焊接应用

Figure 7. The optical system and welding application when the moving mirror is an inner conical mirror

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图 8 透射-反射式光学系统及焦面环形光尺寸参数

Figure 8. Transmission-reflection optical system and ring-shaped laser beam size parameters of focal plane

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图 9 平顶光整形前后的离焦光强分布图

Figure 9. Defocused light intensity distribution maps before and after flat top beam shaping

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图 10 镜片实物图

Figure 10. Diagram of lens components

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图 11 实验光路图

Figure 11. Experimental laser beam path diagram

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图 12 聚焦环形光半径调节示意图及实测与理论尺寸对比曲线

Figure 12. Adjustment diagram of focused ring-shaped laser beam radius and comparison curve between theoretical and actual measurement values

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图 13 环形光的离焦结果

Figure 13. Defocusing results of ring-shaped laser beam

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图 14 环形光系统中的平行平板玻璃透镜

Figure 14. Parallel flat lens in the ring-shaped laser beam system

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表 1 初始条件

Table 1. Initial condition

	入瞳半径 d/mm	波长 λ/nm	D /mm	S /mm	工作距离 /mm	均匀度 /%
数值	12	632.8	30	15	150~170	>80%

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表 2 透镜参数

Table 2. Lens parameters

	有效直径/mm	材料	厚度/mm	曲率半径/mm	Conic	A₄	A₆	A₈	A₁₀
面型1	27	PMMA	15	5	−1.914	1.047×10⁻⁴	−3.943×10⁻⁷	1.167×10⁻⁹	−1.609×10⁻¹²
面型2	36	PMMA	12	17.877	−0.959	−1.983×10⁻⁴	3.056×10⁻⁸	−4.444×10⁻¹¹	7.283×10⁻¹⁴

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表 3 反射镜及面上特征点参数

Table 3. Parameters of characteristic points on the mirror and surface

	α(°)	Q	F	f/mm	K	θ(°)	L/mm	ΔZ/mm	材料
数值	45	(18，−114.04)	(−50，−22.04)	160	(70，−180.04)	16	27.2	4.5	7075-T6

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