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摘要:
针对高能激光器出光过程中出现的大量离焦和0°像散低阶像差现象，提出了基于哈特曼波前传感器和二维整形光路的
XY 离焦像差校正方法。首先，通过对Zernike多项式的离焦项和0°像散项进行线性组合得到XY 离焦像差的表达式，该XY 离焦像差系数的大小可直接表征X 离焦和Y 离焦的波前PV值。同时，通过微调高能激光器中二维整形光路中的镜子间距，可实现激光器输出光束XY 离焦波面的补偿。因此，首先利用哈特曼波前传感器提取出光束的XY 离焦像差系数大小，而后再根据XY 离焦像差系数的大小实时闭环微调二维整形光路中的镜子间距，从而实现XY 离焦像差的校正，改善输出光束的光束质量。实验结果表明，该方法可有效地将高能激光器输出光束XY 离焦量的PV值由5.2 μm和1.1 μm校正到0.5 μm以下，相应的光束质量β 因子由3.1降到1.8，光束质量得到明显改善。Abstract:A method for correcting
XY defocus aberrations, based on Hartmann-Shack wavefront sensor and two-dimensional beam-shaping light path, was presented due to the large percentage of defocus and 0° astigmatism aberrations with large PV values in high-energy laser beam. The first step is to derive an expression forXY defocus aberrations by linearly combining the defocus and 0° astigmatism terms of Zernike polynomials. The coefficients directly characterize the wavefront peak-to-valley (PV) values ofX andY defocus. At the same time, compensation forXY defocus wavefronts of the laser beam can be achieved by fine-tuning the mirror spacing in the two-dimensional shaping optics of the high-energy laser. Therefore, the Hartmann wavefront sensor is used to extract the coefficients ofXY defocus aberrations from the laser beam. The computer dynamically adjusts the mirror spacing in the two-dimensional shaping optics based on these coefficient values to correctXY defocus aberrations and improve the beam quality of the output laser beam. The results of the experiment showcase a significant decrease in PV value ofXY defocus aberrations from 5.2 μm and 1.1 μm to less than 0.5 μm, as well as a decrease inβ factor from 3.1 to 1.8, resulting in substantial improvement in beam quality.-
Key words:
- high energy laser /
- beam quality /
- aberration correction /
- beam shaping /
- matrix optics
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图 1 （a）离焦波前和（b）0°像散波前
Figure 1. (a) Defocus wavefront and (b) 0° astigmatism wavefront
图 3 X方向整形光路结构示意图
Figure 3. Schematic diagram of shaping optical path structure in X direction
图 4 低阶像差校正实验系统原理图
Figure 4. Schematic diagram of low-order aberration correction experiment system
图 5 高精度电动平移台实物图
Figure 5. Physical picture of a high-precision electric displacement platform
图 6 整形光路中凸柱面镜和凹柱面镜相对共焦间距不同偏移量时的XY离焦量变化曲线。（a）X方向整形光路；（b）Y方向整形光路
Figure 6. The XY defocus variation curves with the relatively different deviation of the co-focal distance of the convex cylindrical mirror and the concave cylindrical mirror in the (a) X-direction and (b) Y-direction shaping optical path
图 7 像差未校正时XY离焦量变化曲线
Figure 7. PV curve of XY defocus aberrations with uncorrected aberration
图 8 像差未校正时出光4.2 s时刻的远场光斑
Figure 8. Far-field spot at 4.2 s with uncorrected aberration
图 9 像差未校正时激光器输出功率随时间的变化曲线
Figure 9. Laser output power over time with uncorrected aberration
图 10 像差闭环校正时XY离焦量变化曲线
Figure 10. PV curve of XY defocus aberrations with closed-loop aberration correction
图 11 像差闭环校正时出光4.2 s时刻的远场光斑
Figure 11. Far-field spot at 4.2 s with closed-loop aberration correction
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