High-precision spherical wavefront calibration method for shack-hartmann wavefront sensor
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摘要:
为解决哈特曼-夏克波前传感器传统标定方法存在的测量精度低、稳定性不足等问题，提出了一种基于球面波的哈特曼-夏克波前传感器高精度绝对标定方法。通过理论推导获取了球面波的高精度标定方法，结合搭建的球面波标定实验装置，对子孔径数为128×128的哈特曼-夏克波前传感器完成高精度标定。该方法计算得到了哈特曼-夏克波前传感器结构参数
f ，w 以及L 0的精确值。对标定后的哈特曼-夏克波前传感器的测量精度进行测试，实验结果表明，经本文方法标定后的哈特曼-夏克波前传感器的波前复原精度达到了PV=1.376×10−2λ，RMS=4×10−3λ（λ=625 nm），重复性精度为PV=3.2×10−3λ，RMS=9.76×10−4λ（λ=625 nm）。该方法可以为大口径的SHWFS完成高精度标定，提升测量精度。-
关键词:
- 哈特曼-夏克波前传感器 /
- 绝对标定 /
- 球面波前
Abstract:To address the issues of low measurement accuracy and insufficient stability in traditional calibration methods for Shack-Hartmann wavefront sensors (SHWFS), we propose a high-precision absolute calibration method using spherical waves generated by sensor. A high-precision calibration method for spherical waves was obtained through theoretical derivation. Combined with the constructed spherical wave calibration experimental device, high-precision calibration was performed on the SHWFS with sub apertures of 128×128. The structural parameters of the SHWFS (
f ,w , andL 0) are calculated precisely. The measurement accuracy of the SHWFS is verified after calibration. The experimental results demonstrate that by using this method to calibrate the SHWFS, its wavefront recovery accuracy reaches a PV of 1.376×10−2λ and an RMS of 4×10−3λ (where λ=625 nm), respectively. Additionally, its repeatability accuracy reaches a PV of 3.2×10−3λ and an RMS of 9.76×10-4λ (where λ=625 nm), respectively. These findings suggest that this method is suitable for enhancing the measurement accuracy of high-precision calibration of SHWFS with large aperture. -
图 2 球面波前在SHWFS探测器上形成的光斑图
Figure 2. Spots pattern of a spherical wavefront on the plane of the SHWFS detector
图 3 高精度球面波标定装置原理图
Figure 3. Schematic diagram of the high-precision spherical wavefront calibration device
图 4 高精度球面波标定实物装置
Figure 4. Setup of the high-precision spherical wavefront calibration
图 5 不同曲率半径的球面波前复原误差
Figure 5. Residual errors for spherical waves with different curvature radii
图 6 重复性精度测试结果
Figure 6. Repeatability of wavefront measurements by the calibrated SHWFS
表 1 待标定的SHWFS的物理参数
Table 1. Parameters of the SHWFS to be calibrated
CCD相机 参数 微透镜阵列 参数 生产商 HIKROBOT 子孔径大小 0.1 mm×0.1 mm 型号 MV-CH250-90TM-M58S-NF 使用子孔径数 128×128 像素个数 5120×5120 焦距 2.4 mm 像素尺寸 2.5 μm x 2.5 μm 通光口径 Φ12.8 mm 
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表 2 待标定的SHWFS的参数测量值
Table 2. Measured parameter values of the SHWFS to be calibrated
实验结果参数 f/mm $ {w}=\dfrac{{P}}{{S}} $ L0/mm 测量次数 1 2.402 39.960 1050.00 2 2.402 39.960 1050.00 3 2.402 39.960 1050.00 4 2.403 39.959 1050.00 5 2.402 39.960 1050.00 6 2.402 39.960 1050.00 7 2.403 39.959 1050.00 8 2.402 39.960 1050.00 9 2.401 39.961 1050.00 10 2.402 39.960 1050.00 均值 2.402 39.960 1050.00
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