高精度电光调制椭偏应力传感系统

陈敏; 理智; 刘巍; 牛宇; 罗子人

doi:10.37188/CO.2023-0222

高精度电光调制椭偏应力传感系统

doi: 10.37188/CO.2023-0222

cstr: 32171.14.CO.2023-0222

陈敏^1,,
理智^2,,
刘巍^2,,
牛宇^3, ,,
罗子人^2, ,

1.
中冶赛迪信息技术有限公司, 重庆 401329
2.
中国科学院力学研究所, 北京 100190
3.
国科大杭州高等研究院, 基础物理与数学科学学院, 杭州 310024

基金项目: 国家重点研发计划资助（No. 2020YFC2200104，No. 2021YFC220290）

详细信息

作者简介:
陈　敏（1979—），男，四川成都人，硕士，高级工程师，上海交通大学固体力学专业，主要从事多领域耦合系统的联合仿真。E-mail：min.chen@cisdi.com.cn

理　智（1983—），男，河北人，工程师，主要研究光机电系统耦合设计。E-mail：lizhi@imech.ac.cn

刘　巍（1983—），男，湖北武汉人，博士，助理研究员，中国科学院力学所一般力学专业，主要从事椭偏传感技术。E-mail：liuwei@imech.ac.cn

罗子人（1980—），男，湖南人，博士，研究员，中国科学院数学与系统科学研究院，主要从事精密物理测量。E-mail：luoziren@imech.ac.cn

中图分类号: TP394.1;TH691.9
计量
- 文章访问数: 44
- HTML全文浏览量: 15
- PDF下载量: 2
- 被引次数: 0
出版历程
- 收稿日期: 2023-12-12
- 录用日期: 2024-02-06
- 网络出版日期: 2025-01-22

High-precision electro-optic modulated ellipsometric stress sensing system

CHEN Min^1
,,
LI Zhi^2
,,
LIU Wei^2
,,
NIU Yu^{3
, ,},
LUO Zi-ren^{2
, ,}

1.
CISDI Group Co., LTD. Chongqing, 401329, Chin
2.
Institute of Mechanics, Chinese Academy of Science, Beijing, 100190, China
3.
School of Fundamental Physics and Mathematical Sciences, Hangzhou Institute for Advanced Study, UCAS, Hangzhou 310024, China

Funds: Supported by the National Key Research and Development Program (No. 2020YFC2200104, No. 2021YFC220290)

More Information

Corresponding author: niuyu@ucas.ac.cn; luoziren@imech.ac.cn

摘要

摘要:
目的：为了实现精密制造中关键部件残余应力的高精度检测，建立了电光调制椭偏应力传感系统。对工程中常见的304不锈钢材料在单轴拉伸应力条件下的椭偏信号响应进行了研究。方法：首先，基于反射椭偏的基本原理，建立了不同光轴方向上椭偏信号与单轴拉伸金属试样寻常折射率和异常折射率的关系。其次，针对不锈钢材料，优化了椭偏应力传感的工作点。通过对比消光点和非零线性工作点的椭偏信号，证明了非零线性条件适用于应力信号的传感。最后，针对不同光轴方向下，应力引起的椭偏信号进行了测量。结果：实验结果表明：针对304不锈钢，系统的最低应力检测限为7.84 kPa，系统的应力检测精度优于7.84 kPa。结论：该系统可用于精密制造中，金属工件高精度应力检测的要求。
- 光弹性 /
- 应力双折射 /
- 椭偏 /
- 残余应力 /
- 电光调制
Abstract:
Objective: To achieve high-precision residual stress detection in key components in precision manufacturing, a system using electro-optic modulation for ellipsometric stress detection has been established. This study focused on the ellipsometric signal response of common stainless-steel materials in engineering under uniaxial tensile stress conditions. Method: Firstly, based on the fundamental principles of reflection ellipsometry, the relationship between the ellipsometric signal and the ordinary and extraordinary refractive indices was established for different optical axis directions. Secondly, the working point of ellipsometric stress sensing was optimized for stainless steel materials. By comparing the ellipsometric signals at the extinction point and the non-zero linear working point, it was demonstrated that the non-zero linear condition is suitable for stress signal sensing. Finally, the stress-induced ellipsometric signals were measured under different optical axis directions. Result: The experimental results indicate that for 304 stainless steel, the system's minimum stress detection limit is 7.84 kPa, and the stress detection accuracy of the system is better than 7.84 kPa. Conclusion: This system can be utilized for high-precision stress detection requirements in metal workpieces in precision manufacturing.
- photoelasticity /
- stress birefringence /
- ellipsometry /
- residual stress /
- electro-optic modulation

HTML全文

图 1 高精度电光调制的椭偏应力系统

Figure 1. High-precision electro-optic modulated ellipsometric stress sensing system

下载: 全尺寸图片幻灯片

图 2 应力加载装置

Figure 2. Stress-loading device

下载: 全尺寸图片幻灯片

图 3 探测光照射样件示意图

Figure 3. Schematic diagram of the incident light on the test sample

下载: 全尺寸图片幻灯片

图 4 不同入射角条件下不锈钢的椭偏参数幅值及相位$ ? $

Figure 4. Ellipsometric amplitude and phase $ \Delta $ of stainless steel at different angles of incidence

下载: 全尺寸图片幻灯片

图 5 消光点附近的椭偏信号

Figure 5. Ellipsometric signal in the proximity of the extinction point; (a) signal in the time domain; (b) corresponding signal in the frequency domain

下载: 全尺寸图片幻灯片

图 6 非零线性工作点附近的椭偏信号

Figure 6. Ellipsometric signal in the proximity of the non-zero linear work point; (a) signal in the time domain; (b) corresponding signal in the frequency domain

下载: 全尺寸图片幻灯片

图 7 不同光轴方向下304不锈钢的椭偏应力测量

Figure 7. Ellipsometric stress of 304 stainless-steel under different optical axis directions; (a) optical axis parallel to the x-direction; (b) optical axis parallel to the y-direction

下载: 全尺寸图片幻灯片

参考文献(16)

[1]	肖石磊, 李斌成. 光学元件残余应力无损检测技术概述[J]. 光电工程,2020,47(8):190068. XIAO SH L, LI B CH. Residual stress measurement methods of optics[J]. Opto-Electronic Engineering, 2020, 47(8): 190068. (in Chinese).
[2]	PEIXOTO C, VALENTIM P T, SOUSA P C, et al. Injection molding of high-precision optical lenses: A review[J]. Precision Engineering, 2022, 76: 29-51.
[3]	马晓晖, 毛晶, 龙丽霞, 等. XRD测试材料表面微区残余应力[J]. 实验室科学,2022,25(2):10-13,18. doi: 10.3969/j.issn.1672-4305.2022.02.002 MA X H, MAO J, LONG L X, et al. Measurement of residual stress in the micro-zone of the sample by X ray diffractometer[J]. Laboratory Science, 2022, 25(2): 10-13,18. (in Chinese). doi: 10.3969/j.issn.1672-4305.2022.02.002
[4]	许光, 邢力超, 张婷, 等. X射线衍射法测量高温合金波纹管残余应力[J]. 压力容器,2021,38(7):32-37. doi: 10.3969/j.issn.1001-4837.2021.07.005 XU G, XING L CH, ZHANG T, et al. Measurement of residual stress in superalloy bellow using X-ray diffraction technology[J]. Pressure Vessel Technology, 2021, 38(7): 32-37. (in Chinese). doi: 10.3969/j.issn.1001-4837.2021.07.005
[5]	包亦望, 马德隆. 陶瓷涂层的残余应力评价及其尺寸效应[J]. 硅酸盐学报,2019,47(8):1033-1038. BAO Y W, MA D L. Evaluation of residual stress in ceramic coatings and its size effects[J]. Journal of the Chinese Ceramic Society, 2019, 47(8): 1033-1038. (in Chinese).
[6]	刘明智, 梁康, 熊巍, 等. 沉积参数对磁控溅射镀金膜膜层残余应力与微观形貌的影响[J]. 导航与控制,2020,19(6):98-104,73. doi: 10.3969/j.issn.1674-5558.2020.06.013 LIU M ZH, LIANG K, XIONG W, et al. Effect of deposition parameters on residual stress and microstructure in magnetron sputtering Au thin films[J]. Navigation and Control, 2020, 19(6): 98-104,73. (in Chinese). doi: 10.3969/j.issn.1674-5558.2020.06.013
[7]	郑锦华, 李志雄, 刘青云, 等. 负偏压对高界面强度类金刚石薄膜制备的影响[J]. 材料工程,2023,51(10):93-100. doi: 10.11868/j.issn.1001-4381.2022.001081 ZHENG J H, LI ZH X, LIU Q Y, et al. Effect of negative bias voltage on preparation of diamond-like carbon films with high interfacial strength[J]. Journal of Materials Engineering, 2023, 51(10): 93-100. (in Chinese). doi: 10.11868/j.issn.1001-4381.2022.001081
[8]	KAJIHARA Y, TAKAHASHI R, YOSHIDA I, et al. Measurement method of internal residual stress in plastic parts using terahertz spectroscopy[J]. Nanomanufacturing and Metrology, 2021, 4(1): 46-52.
[9]	FARAHANI B V, DIREITO F, SOUSA P J, et al. Electronic Speckle Pattern Interferometry for fatigue crack monitoring[J]. Procedia Structural Integrity, 2022, 37: 873-879. doi: 10.1016/j.prostr.2022.02.021
[10]	YADAV N, WACHTARCZYK K, GĄSIOR P, et al. In‐line residual strain monitoring for thermoplastic automated tape layup using fiber Bragg grating sensors[J]. Polymer Composites, 2022, 43(3): 1590-1602. doi: 10.1002/pc.26480
[11]	李克武, 王爽, 刘梓良, 等. 双弹光级联的差频调制型应力双折射测量[J]. 光学学报,2023,43(4):0412001. doi: 10.3788/AOS221495 LI K W, WANG SH, LIU Z L, et al. Stress birefringence measurement based on double cascaded photoelastic modulation with differential frequencies[J]. Acta Optica Sinica, 2023, 43(4): 0412001. (in Chinese). doi: 10.3788/AOS221495
[12]	张伟, 杨林, 刘灿. 一种基于光弹调制器的应力双折射测量方法[J]. 光学与光电技术,2021,19(2):64-69. ZHANG W, YANG L, LIU C. A stress birefringence measurement method based on photoelastic modulator[J]. Optics & Optoelectronic Technology, 2021, 19(2): 64-69. (in Chinese).
[13]	WANG CH Y, LIU W, NIU Y, et al. Using the reflection ellipsometry to detect the stress for the gold coating reflection mirrors[J]. Microgravity Science and Technology, 2022, 34(5): 98.
[14]	AZZAM R M A, BASHARA N M, BALLARD S S. Ellipsometry and polarized light[J]. Physics Today, 1978, 31(11): 72. .
[15]	ARWIN H, WELIN-KLINTSTRÖM S, JANSSON R. Off-null ellipsometry revisited: basic considerations for measuring surface concentrations at solid/liquid interfaces[J]. Journal of Colloid and Interface Science, 1993, 156(2): 377-382. doi: 10.1006/jcis.1993.1125
[16]	JIN X N, WANG CH Y, SHEN J, et al. Linear off null working condition for total internal reflection imaging ellipsometry to detect subtle electron density change[J]. Proceedings of SPIE, 2020, 11781: 117811I.