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用于高压测量的MEMS硅-玻光纤FP压力传感器

付雨薇 王睿楠 唐文婷 杜喜昭 王伟 陈海滨

付雨薇, 王睿楠, 唐文婷, 杜喜昭, 王伟, 陈海滨. 用于高压测量的MEMS硅-玻光纤FP压力传感器[J]. 中国光学(中英文). doi: 10.37188/CO.2023-0224
引用本文: 付雨薇, 王睿楠, 唐文婷, 杜喜昭, 王伟, 陈海滨. 用于高压测量的MEMS硅-玻光纤FP压力传感器[J]. 中国光学(中英文). doi: 10.37188/CO.2023-0224
FU Yu-wei, WANG Rui-nan, TANG Wen-ting, DU Xi-zhao, WANG Wei, CHEN Hai-bin. MEMS silicon-glass fiber-optic FP pressure sensor for high pressure measurements[J]. Chinese Optics. doi: 10.37188/CO.2023-0224
Citation: FU Yu-wei, WANG Rui-nan, TANG Wen-ting, DU Xi-zhao, WANG Wei, CHEN Hai-bin. MEMS silicon-glass fiber-optic FP pressure sensor for high pressure measurements[J]. Chinese Optics. doi: 10.37188/CO.2023-0224

用于高压测量的MEMS硅-玻光纤FP压力传感器

doi: 10.37188/CO.2023-0224
基金项目: 陕西省重点研发计划(No. 2023-GHZD-52);陕西省教育厅重点研究计划(No. 22JY026)
详细信息
    作者简介:

    付雨薇(2000—),女,陕西汉中人,西安工业大学硕士研究生,主要从事光纤传感技术及光电瞬态测试技术的研究。E-mail:fyw_xatu@163.com

    王睿楠(1999—),女,陕西渭南人,西安工业大学硕士研究生,主要从事光纤传感技术的研究。E-mail:wangruinankl@163.com

    唐文婷(2000—),女,陕西西安人,西安工业大学硕士研究生,主要从事光电探测及传感器的研究。E-mail:twt_18629669918@163.com

    杜喜昭(1984—),男,河北保定人,硕士,主要从事智能机器人、光电检测技术的研究工作。E-mail:dxz1361332@163.com

    王 伟(1973—),男,河南济源人,博士,教授,博士生导师,主要从事光纤传感技术及其工程化和超快光纤激光器技术的研究。E-mail:wangwei@xatu.edu.cn

    陈海滨(1981—),男,山东昌邑人,博士,副教授,博士生导师,主要从事光电探测及光纤传感技术方面的研究。E-mail:chenhaibin@xatu.edu.cn

  • 中图分类号: TP212

MEMS silicon-glass fiber-optic FP pressure sensor for high pressure measurements

Funds: Supported by Key Research and Development Project of Shaanxi Province (No. 2023-GHZD-52); Key Research Programs of Shaanxi Provincial Education Department (No. 22JY026)
More Information
  • 摘要:

    研究了一种基于微机电系统(MEMS)技术的用于高压测量的硅-玻光纤法布里-珀罗(FP)压力传感器,以硅材料作为敏感元件,将电感耦合等离子体(ICP)干法刻蚀后的单晶硅膜片和高硼硅玻璃阳极键合构成FP腔。传感头使用MEMS技术批量制造,结构稳定、抗过载能力强、在高压环境下不容易失效。实验结果表明,该传感器能够实现30 MPa的高压压力测量,灵敏度为46.94 nm/MPa,线性拟合度为0.99897,测量结果具有较好的一致性和可靠性,所设计的压力传感器在高压检测方面有很强的应用前景。

     

  • 图 1  光纤FP压力传感器结构示意图

    Figure 1.  Schematic diagram of fiber-optic FP pressure sensor

    图 2  膜片形变分布三维图

    Figure 2.  Three-dimensional diagram of diaphragm deformation distribution

    图 3  不同膜厚条件下膜片中心形变量与有效半径关系

    Figure 3.  Relationship between diaphragm center deformation and effective radius for different diaphragm thicknesses

    图 4  压力敏感结构模型三维受压图

    Figure 4.  Three-dimensional pressure diagram of the pressure sensitive structure model

    图 5  压力敏感结构模型受压形变图

    Figure 5.  Pressure sensitive structural model of deformation under pressure

    图 6  传感头制作工艺流程图

    Figure 6.  Sensor head production process flow chart

    图 7  单个传感头

    Figure 7.  Single sensor head

    图 8  传感器实物图

    Figure 8.  Physical photograph of the sensor

    图 9  压力测试系统

    Figure 9.  Pressure testing system

    图 10  传感器反射光谱

    Figure 10.  Reflection spectrum of the sensor

    图 11  腔长与压力关系实测结果

    Figure 11.  Experimentally measured relationship between the cavity length and pressure

    图 12  传感器重复性与稳定性

    Figure 12.  Repeatability and stability of the sensor

    表  1  传感器的参数

    Table  1.   Sensor parameters

    SensorParameterValue
    Silicon diaphragmEffective radius0.375 mm
    Thickness0.1 mm
    Glass substrateThickness0.4 mm
    Sensor headSide length2.5 mm
    下载: 导出CSV
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出版历程
  • 收稿日期:  2023-12-18
  • 录用日期:  2024-04-15
  • 网络出版日期:  2024-05-10

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