腔衰荡光谱仪器腔镜微缺陷散射模型

任颐杰; 张正涛

doi:10.37188/CO.2024-0094

腔衰荡光谱仪器腔镜微缺陷散射模型

doi: 10.37188/CO.2024-0094

cstr: 32171.14.CO.2024-0094

任颐杰^{1, 2, 3, ,},
张正涛^{1, 2, 3,}

1.
中科慧远视觉技术(洛阳)有限公司, 河南洛阳 471000
2.
中国科学院自动化研究所, 北京 100190
3.
中科(洛阳)机器人与智能装备研究院, 河南洛阳 471000)

基金项目: 新一代人工智能国家科技重大专项（No. 2022ZD0119400）

详细信息

作者简介:
任颐杰（1994—），男，山西长治人，博士，助理研究员，2018 年获得长春理工大学学士学位，2023年获得中国科学院长春光学精密机械与物理研究所光学工程博士学位，中国科学院自动化研究所工业视觉与智能装备技术工程实验室助理研究员，主要从事腔衰荡光谱技术、微纳光学、工业视觉技术等方面的研究。E-mail：yijie.ren@ia.ac.cn

张正涛（1981—），山东烟台人，博士，研究员，博士生导师，2004年获得中国石油大学东营分校学士学位，2007年获得北京理工大学理学硕士学位，2010年获得中国科学院自动化研究所控制科学与工程博士学位。现为中国科学院工业视觉与智能装备技术工程实验室主任。主要研究方向为工业视觉检测、智能机器人等。E-mail ：zhengtao.zhang@ia.ac.cn

中图分类号: O433.1
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出版历程
- 网络出版日期: 2024-11-11

Study of the scattering model of micro-defects on cavity mirrors in cavity ring-down spectroscopy instruments

REN Yi-jie^{1, 2, 3
, ,},
ZHANG Zheng-tao^{1, 2, 3
,}

1.
CASI Vision Technology Company, LTD, Luoyang 471000, China
2.
Institute of Automation, Chinese Academy of Sciences, Beijing 100190, China
3.
Luoyang Institute for Robot and Intelligent Equipment, Luoyang 471000, China

Funds: Supported by National Science and Technology Major Project (No. 2022ZD0119400)

More Information

Corresponding author: yijie.ren@ia.ac.cn

摘要

摘要:
腔衰荡光谱仪器（CRDS）中腔镜微缺陷会导致测量精度下降。本文建立了基于Bobbert Vlieger BRDF 理论的腔镜微缺陷散射模型，分析了微缺陷在不同光源波长、入射角度、缺陷量级、缺陷类型、缺陷密度、基底膜层的散射光特性。腔镜微缺陷散射模型研究表明：微米至亚微米（100 μm~0.1 μm）量级缺陷会降低衰荡吸收精度；针对该量级微缺陷的检测，构建了腔镜微缺陷散射和微缺陷暗场检测的分析模型。CRDS腔镜微缺陷散射光模型的建立与分析，是实现腔镜微缺陷高精度检测和CRDS测量精度恢复的关键技术。
- 腔衰荡光谱 /
- 腔镜微缺陷 /
- CRDS精度 /
- 双向反射分布函数 /
- 微缺陷散射模型
Abstract:
Microdefects in cavity mirrors utilized in cavity ring-down spectroscopy (CRDS) adversely affect measurement accuracy. This paper establishes a microdefect scattering model grounded in Bobbert and Vlieger's Bidirectional Reflectance Distribution Function (BRDF) theory to analyze the characteristics of scattered light from microdefects under varying wavelengths, incident angles, defect sizes, types, densities, and substrate coatings. Studying the cavity mirror microdefect scattering model shows that defects in the micrometer to submicron range (100 um to 0.1 um) affect the ring-down absorption accuracy. Aiming at detecting microdefects of this order, this paper’s authors constructed analytical models of microdefect scattering and dark field detection of microdefects in cavity mirrors. Establishing and analyzing the scattering light model of CRDS mirror microdefects is critical to realizing the high-precision detection of CRDS mirror microdefects and recovering CRDS measurement accuracy.
- cavity ring-down spectrum /
- microdefect of cavity mirror /
- CRDS accuracy /
- BRDF /
- microdefect scattering model

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图 1 CRDS中腔镜缺陷对阈值建立和衰荡吸收的影响

Figure 1. The impact of cavity mirror defects on threshold establishment and decay absorption in CRDS

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图 2 明场缺陷检测与暗场缺陷检测原理示意图

Figure 2. Schematic diagram of bright field defect detection and dark field defect detection principles

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图 3 腔镜缺陷BRDF散射模型及参数

Figure 3. BRDF scattering model and parameters of cavity mirror defects

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图 4 不同入射角度下的散射场空间分布，(a)和(b)为0.1 μmPSL颗粒在75°斜入射和正入射下的空间分布，(c)和(d)为1 μmPSL颗粒在75°斜入射和正入射下的空间分布

Figure 4. Spatial distribution of scattering field at different incidence angles (a)(b) Spatial distribution of 0.1 μm PSL particles under 75° oblique incidence and normal incidence (c)(d) Spatial distribution of 1 μm PSL particles under 75° oblique incidence and normal incidence

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图 6 各典型波长由紫外至红外((a)为266 nm、(b)为355 nm、(c)为490 nm、(d)为633 nm、(e)为808 nm、(f)为1064 nm)75°斜入射下散射光的空间分布

Figure 6. Spatial distribution of scattered light at various typical wavelengths from UV to IR (a) 266 nm (b) 355 nm (c) 490 nm (d) 633 nm (e) 808 nm (f) 1064 nm

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图 8 不同粒径((a)为 3 μm，(b)为 1 μm、(c)为0.5 μm、(d)为0.1 μm) 75°斜入射下散射光的空间分布

Figure 8. Spatial distribution of scattered light for different particle sizes under 75° oblique incidence (a) 3 μm (b) 1 μm (c) 0.5 μm (d) 0.1 μm

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图 9 不同粒径((a)为 3 μm，(b)为 1 μm、(c)为0.5 μm、(d)为0.1 μm) 75°斜入射下散射光的散射平面分布

Figure 9. Plane distribution of scattered light for different particle sizes under 75° oblique incidence (a) 3 μm (b) 1 μm(c) 0.5 μm (d) 0.1 μm

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图 11 不同颗粒密度 (a)为10/μm² (b)为1/μm² (c)为 0.1/μm² (d)为0.01/μm² 斜入射时散射光的空间分布为1 μmPSL颗粒在75°斜入射和正入射下的空间分布

Figure 11. Spatial distribution of scattered light for different particle densities under oblique incidence (a) 10/μm² (b) 1/μm² (c) 0.1/μm² (d) 0.01/μm²

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图 13 不同材质颗粒（(a)为PSL、(b)为Au、(c)为 Cu）斜入射时散射光的空间分布

Figure 13. Spatial distribution of scattered light for different material particles under oblique incidence (a) PSL (b) Au (c) Cu

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图 5 微缺陷在正入射及斜入射时，各散射角的能量分布。蓝色绿色实线为75°斜入射时反射面内不同散射角下半径为3 μm、1 μm 、0.5 μm 、0.1 μm PSL颗粒BRDF，红色虚线为正入射时反射面内不同散射角下3 μm、1 μm 、0.5 μm 、0.1 μm PSL颗粒的BRDF

Figure 5. The energy distribution of microdefects at each scattering angle at normal and oblique incidence. The lines show the BRDF of PSL particles with radii of 3 μm, 1 μm, 0.5 μm, and 0.1 μm at different scattering angles within the reflective. Blue and green solid lines are the BRDF under 75° oblique incidence, and red dashed lines are the BRDF under normal incidence.

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图 7 各典型光源波长下75°斜入射时反射面内的BRDF

Figure 7. BRDF of the reflective surface at various typical wavelengths under 75° oblique incidence

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图 10 不同粒径大小PSL (3 μm、2 μm、1 μm、0.7 μm、0.5 μm、0.1 μm、0.05 μm) 斜入射时反射面内的BRDF

Figure 10. BRDF of the reflective surface for different sizes of PSL particles under oblique incidence (particle sizes: 3 μm, 2 μm, 1 μm, 0.7 μm, 0.5 μm, 0.1 μm, 0.05 μm)

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图 12 不同颗粒密度斜入射时反射面内的BRDF

Figure 12. BRDF of the reflective surface for different particle densities under oblique incidence

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图 14 不同材质颗粒斜入射时反射面内的BRDF

Figure 14. BRDF of the reflective surface for different material particles under oblique incidence

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图 15 基底不同膜层斜入射时反射面内的BRDF

Figure 15. BRDF of the reflective surface for different high-reflective coatings on substrates under oblique incidence

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表 1 线偏振光(P光)正入射时，不同缺陷量级腔镜的散射光强度

Table 1. Scattered light intensity of cavity mirrors with different defect orders under normal incidence of linearly polarized light (P polarization)

Particle radius (μm)	Scattered light intensity (ppm)	s-polarization (ppm)	p-polarization (ppm)
0.01	7.939×10⁻¹¹	2.3368×10⁻¹²	7.9242×10⁻¹¹
0.05	1.2351×10⁻⁶	1.9405×10⁻⁰⁸	1.2087×10⁻⁶
0.1	3.4466×10⁻⁵	1.9143×10⁻⁶	3.0221×10⁻⁵
0.5	2.9963×10⁻³	0.0008.1527×10⁻⁴	2.3632×10⁻³
1	1.5833×10⁻²	2.6241×10⁻³	1.4189×10⁻²

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