射频轴快流CO<sub>2</sub>激光器动态L型阻抗匹配网络设计

黄盼; 赵崇霄; 董祝君; 潘其坤; 冯育泽; 张来明; 郭劲

doi:10.37188/CO.2024-0096

射频轴快流CO₂激光器动态L型阻抗匹配网络设计

doi: 10.37188/CO.2024-0096

cstr: 32171.14.CO.2024-0096

黄盼^{1, 2},
赵崇霄^1, ,,
董祝君^{1, 2},
潘其坤¹,
冯育泽¹,
张来明¹,
郭劲¹

1.
中国科学院长春光学精密机械与物理研究所, 吉林长春 130033
2.
中国科学院大学, 中国北京 100049

基金项目: 国家自然科学基金（No. 62335016）；吉林省自然科学基金（No. 20220101207JC）；激光与物质相互作用国家重点实验室基金项目（No. SKLLIM2209）；中国科学院青年创新促进会（No. 2021216）；吉林省青年成长科技计划项目（No. 20230508139RC）

详细信息

作者简介:
赵崇霄（1993—），男，辽宁沈阳人，博士，工程师，2015年于大连理工大学获得学士学位，2021年于大连理工大学获得博士学位，现为中国科学院长春光学精密机械与物理研究所工程师，负责国家基金委青年基金项目1项，国家重点实验室项目1项，主要从事激光等离子体特性研究，高功率MOPA CO₂激光器技术研究。E-mail：zhaochongxiao@ciomp.ac.cn

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出版历程
- 网络出版日期: 2024-11-12

Design of dynamic L-type impedance matching network in RF excited fast axial flow CO₂ lasers

1.
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
2.
University of Chinese Academy of Sciences, Beijing 100049, China

Funds: Supported by National Natural Science Foundation of China (No. 62335016); Natural Science Foundation of Jilin Province (No. 20220101207JC); State Key Laboratory of Laser Interaction with Matter Project (No. SKLLIM2209); Youth Innovation Promotion Association, CAS (No. 2021216); Youth Growth Technology Project of Jilin (No. 20230508139RC)

More Information

Corresponding author: zhaochongxiao@ciomp.ac.cn

摘要

摘要:
针对高功率轴快流CO₂激光器射频放电阻抗匹配问题，本文设计了低反射率、高动态匹配范围的阻抗匹配网络，实现了射频激励轴快流CO₂激光器在不同放电结构下的射频功率高效利用。基于射频电路阻抗匹配理论，构建了多电极等效电路模型，提出向匹配网络中引入可调高压陶瓷电容的方法，设计了适用于高功率射频激励轴快流CO₂激光器的动态L型匹配网络。模拟的动态L型匹配网络可实现向16根放电管注入60 kW射频功率，在总负载阻抗12.81 Ω~49.94 Ω的范围内实现反射率小于1%；并搭建了单管射频放电实验装置，实验测得动态L型匹配网络在4 kW注入功率下反射率小于1%，与仿真结果相符。证明了引入可调高压陶瓷电容的动态L型匹配网络能够实现高动态范围内的阻抗匹配，基本满足高功率射频激励轴快流CO₂激光器匹配电路设计要求。
- 轴快流CO₂激光器 /
- 射频激励 /
- 阻抗匹配 /
- L型动态匹配
Abstract:
In order to solve the problem of RF discharge impedance matching of high-power fast axial flow CO₂ lasers, an impedance matching network with low reflectivity and high dynamic matching range was designed to realize the efficient utilization of RF excited fast axial flow CO₂ lasers under different discharge structures. Based on the impedance matching theory of RF circuits, a multi-electrode equivalent circuit model was constructed, a method of introducing tunable high-voltage ceramic capacitors into the matching network was proposed, and a dynamic L-type matching network suitable for high-power RF excited fast axial flow CO₂ lasers was designed. The simulated dynamic L-type matching network can inject 60 kW RF power into 16 discharge tubes and achieve a reflectivity of less than 1% in the range of total load impedance of 12.81 Ω~49.94 Ω. A single-tube RF discharge experimental device was built, and the reflectivity of the dynamic L-type matching network was measured as less than 1% at 4 kW injection power, which was consistent with the simulation results. It is proved that the dynamic L-type matching network with adjustable high-voltage ceramic capacitors can achieve impedance matching in the high dynamic range, which meets the design requirements of high-power RF excited fast axial flow CO₂ laser matching circuits.
- fast axial flow CO₂ laser /
- RF excitation /
- impedance matching /
- L-Type dynamic matching

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图 1 单管放电模块

Figure 1. Single-tube discharge module

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Figure 2. Laser equivalent circuit model

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图 3 放电系统示意图

Figure 3. Schematic diagram of the discharge system

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图 4 L型阻抗匹配网络，对应式（10）解(a)：a=−0.186, b=5.186；(b) a=2.180, b=−5.209

Figure 4. L-type impedance matching network, corresponding to the solution of Eq. (10): (a) a=−0.186, b=5.186; (b) a=2.180, b=−5.209

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图 5 反射率$ \text{η} $/电压增益G/功率沉积W_L-等离子体电阻R_L关系曲线

Figure 5. Reflectivity η/voltage gain G/power deposition-plasma resistance R_L relationship curve

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图 6 动态L型阻抗匹配网络

Figure 6. Dynamic L-type impedance matching network

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图 7 动态匹配网络(a) C1-等效电阻调节曲线；(b)反射率调节曲面(c)等效电阻调节曲面(d)等效电抗调节曲面

Figure 7. Dynamic matching network (a) C1-equivalent resistance adjustment curve (b) Reflectance adjustment surface (c) Equivalent resistance adjustment surface (d) Equivalent reactance adjustment surface

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图 8 动态阻抗匹配网络驻波比调节曲面（匹配中心C₁=127.6 pF, C₂=89.6 pF）

Figure 8. The dynamic impedance matching network’s VSWR adjustment surface (match center C₁=127.6 pF, C₂=89.6 pF)

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图 9 动态阻抗匹配网络史密斯圆图：等离子体阻抗为38.6 ${ \Omega }\text{-17.7}\;{ \Omega }\text{j} $

Figure 9. Smith chart of dynamic impedance matching network. Plasma impedance is 38.6 ${ \Omega }\text{-17.7}\;{ \Omega }\text{j} $

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图 10 单管辉光放电

Figure 10. Single-tube glow discharge

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图 11 (a)单管射频放电动态阻抗匹配网络(b)阻抗匹配网络实际装置

Figure 11. (a) Single-tube RF discharge dynamic impedance matching network (b) Actual device of the impedance matching network

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表 1 激光器工作参数

Table 1. Laser operating parameters

电源功率射频频率内径外径电极长度电极面积工作气压工作温度

60 kW 13.56 MHz 24 mm 28 mm 300 mm 5.37×10⁻³ m² 10 kPa 400 K

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