变量耦合动态监控光学膜厚补偿技术

杜昕; 付秀华; 董所涛; 潘永刚; 王由德; 谢海峰

doi:10.37188/CO.2024-0174

变量耦合动态监控光学膜厚补偿技术

doi: 10.37188/CO.2024-0174

cstr: 32171.14.CO.2024-0174

杜昕^{1, 2,},
付秀华^{1, 2, ,},
董所涛²,
潘永刚²,
王由德^{1, 2},
谢海峰^{1, 2}

1.
长春理工大学光电工程学院, 吉林长春 130022
2.
长春理工大学中山研究院光电工程学院, 广东中山 528436

基金项目: 国家自然科学基金（No. 62127813）；中山市引进创新团队项目（No. CXTD2023008）；中山市社会公益科技研究项目（No. 2022B2005）

详细信息

作者简介:
杜　昕（1999—），女，辽宁辽阳人，长春理工大学硕士研究生，主要从事光学薄膜及光学监控方面的研究。E-mail：Du_xin0824@163.com

付秀华（1963—），女，博士，教授，博士生导师，1984年于长春光机所（现长春理工大学）获得学士学位，2010年于长春理工大学获得博士学位，主要从事于光学薄膜和光学制造方面的研究。E-mail：goptics@126.com

中图分类号: O484
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出版历程
- 网络出版日期: 2025-03-07

Variable coupling dynamic monitoring optical film thickness compensation technology

DU Xin^{1, 2
,},
FU Xiu-hua^{1, 2
, ,},
DONG Suo-tao²,
PAN Yong-gang²,
WANG You-de^{1, 2},
XIE Hai-feng^{1, 2}

1.
College of Optoelectronic Engineering, Changchun University of Science and Technology, Changchun 130022, Jilin, China
2.
Zhongshan Research Institute, Changchun University of Science and Technology, Zhongshan 528436, Guangdong, China

Funds: Supported by National Natural Science Foundation of China (No. 62127813); Zhongshan Introduces Innovative Team Program (No. CXTD2023008);Zhongshan Social Welfare Science and Technology Research Program (No. 2022B2005)

More Information

Corresponding author: goptics@126.com

摘要

摘要:
为提高红外波段膜厚准确控制精度和波长精准定位等问题，本课题基于LabVIEW编程语言，在光学膜厚监控系统的基础上，进行变量耦合的动态监控光学膜厚补偿技术的研究。基于光的干涉以及光学薄膜设计理论，采用光电极值法构建数学模型，重点解决极值点判停误差和滤波除噪等问题，高度还原实时采集的光量值的监控数据，实时同步拟合膜厚监控的透射曲线，计算并拟合膜厚极值点以及任意目标厚度对应的停镀点，实现膜厚有效准确的判停。为了验证光控系统的可靠性和稳定性，通过制备1064 nm窄带滤光膜对系统进行验证，结果表明，制备的1064 nm窄带滤光膜单面峰值透过率为91.5%，通带半宽度为5 nm，经计算，监控系统误差小于0.01%。
- 光学薄膜 /
- 膜厚监控 /
- 拟合算法 /
- 窄带滤光膜
Abstract:
To address issues related to the accurate control of infrared band film thickness and precise wavelength positioning, this study employs the LabVIEW programming language to develop a dynamic monitoring and compensation technology for optical film thickness, based on an optical film thickness monitoring system. Based on the principles of light interference and optical thin film design, a mathematical model is constructed using the photoelectric polarimetric method. This study focuses on resolving stopping errors and filtering noise at extremum points, thereby accurately restoring the real-time monitoring data of light intensity. The system achieves real-time and synchronous fitting of the film’s transmittance curve, calculates and fits the stopping point corresponding to the extremum of the film thickness. To validate the reliability and stability of the optical control system, a 1064 nm narrow-band filter film was fabricated. The results indicate that the peak transmittance of the 1064 nm narrow-band filter film reached 91.5%, with a pass-band half-width of 5 nm. The error of the monitoring system was calculated to be less than 0.01%.
- optical film /
- film thickness monitoring /
- fitting algorithm /
- narrow-band filter

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图 1 光控系统整体结构示意图

Figure 1. Schematic diagram of the overall structure of the optical control system

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图 3 信号变换示意图

Figure 3. Signal conversion schematic

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图 4 光学膜厚监控系统功能结构图

Figure 4. Functional structure of optical film thickness monitoring system

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图 2 光控硬件装置图

Figure 2. Optical control hardware device diagram

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图 5 软件膜厚监控系统逻辑流程图

Figure 5. Logic flow chart of software film thickness monitoring system

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图 6 光亮值曲线对比图

Figure 6. Brightness value curve comparison chart

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图 7 非线性拟合测试软件程序

Figure 7. Non-linear fit test software program

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图 8 膜厚监控曲线拟合对比图。（a）多项式膜厚监控拟合曲线；（b）含吸收膜厚监控拟合曲线

Figure 8. Film thickness monitoring curve fit comparison. (a) Polynomial film thickness monitoring fitting curve; (b) Fitting curve with absorption film thickness monitoring

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图 9 非线性拟合测试软件程序

Figure 9. Non-linear fit test software program

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图 10 原始与滤波处理后的信号对比图。（a）原始信号；（b）中值滤波后信号；（c）S-G滤波后信号

Figure 10. Comparison of original and filtered signals. (a) Raw signal; (b) Signal after median filtering; (c) S-G filtered signal

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图 11 滤波算法阶次测试软件程序

Figure 11. Filtering algorithm order test software program

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图 12 S-G滤波不同阶次信号对比图。（a）三阶次信号；（b）四阶次信号；（c）五阶次信号

Figure 12. Comparison plot of S-G filtered signals of different orders. (a) third-order signal; (b) fourth-order signal; (c) fifth-order signal

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图 13 光学监控设计曲线图

Figure 13. Optical monitoring design curve

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图 14 实际膜厚与设计膜厚差值示意图

Figure 14. Difference between actual film thickness and design film thickness diagram

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图 15 实际测试光控光谱曲线对比图

Figure 15. Comparison of actual test light control spectral curve

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表 1 镀膜工艺参数表

Table 1. Coating process parameters

Beam
电压/V ACC
电压/V Beam
电流/mA gas1 gas2 gas3

Clear 750 600 750 40 5 8
Ti₃O₅ 900 600 900 50 0 8
SiO₂ 1150 600 950 40 0 8

下载: 导出CSV

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