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摘要:
本文提出了一种基于微机电系统(MEMS)技术的光纤法布里-珀罗压力传感器，可用于冲击波等瞬态压力测量。该传感器敏感单元由深反应离子刻蚀(DRIE)后的单晶硅和BF33玻璃晶圆通过阳极键合制成，并通过激光熔接技术实现光纤与敏感单元的无胶化集成。通过搭建信号解调实验平台，对静态和动态压力环境下传感器性能进行测试。实验结果表明，该传感器在0~10 MPa压力范围内具有良好的线性响应，满量程非线性误差为0.41%，迟滞为0.37%，传感器的上升时间为8.5 μs。该传感器具备抗电磁干扰、可批量化制备、一致性高、成本低等优点，理论谐振频率为1.39 MHz，展示了其在爆炸场等恶劣环境下进行动态压力测量的良好应用前景。
Abstract:A fiber-optic Fabry-Perot pressure sensor based on microelectromechanical systems (MEMS) technology is proposed for transient pressure measurements such as shock waves. The sensitive unit is made of etched silicon wafers and BF33 glass wafers through anodic bonding, and the adhesive-free integration of the optical fiber and the sensitive unit is realized by laser fusion bonding technology. A signal demodulation experiment platform was built to comprehensively evaluate the pressure sensing characteristics of sensors in static and dynamic pressure environments. The test results show that the sensor has a good linear response over the pressure range of 0-10 MPa, with a full-scale nonlinear error of 0.41% and a hysteresis of 0.37%. In dynamic pressure measurement, the sensor has a rise time of 8.5μs. The sensor has the advantages of anti-electromagnetic interference, high consistency, low cost, and has a theoretical resonant frequency of 1.39 MHz, demonstrating the prospect of its wide application for dynamic pressure measurements in harsh environments such as explosion fields.
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Key words:
- Fabry-Perot /
- shock wave /
- fiber optic sensor /
- pressure measurement /
- shock tube
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图 2 敏感膜片尺寸与特征频率和灵敏度关系数值仿真
Figure 2. Numerical simulation of the relationship between diaphragm size and eigenfrequency and sensitivity
图 7 三波长动态解调系统原理图
Figure 7. Schematic diagram of three-wavelength dynamic demodulation system
图 9 不同压力下激波截面验证结果
Figure 9. Verification results of shock wave cross section at different pressures
图 10 光纤传感器与压电传感器输出曲线
Figure 10. Fiber optic sensor and piezoelectric sensor output curves
表 1 压力传感器的结构参数
Table 1. Structural parameters of the pressure sensor
Performance Symbol Value Diaphragm radius/mm r 0.8 Diaphragm thickness/mm h 0.245 Measurement range/MPa P 0~10 Sensitivity/nm·MPa−1 S 113 Natural frequency/MHz f 1.39 
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