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基于哈特曼探测器的光学传递函数测量方法研究

张黄轲 李子凡 施文恺 毛红敏 陆焕钧 樊丽娜 曹召良

张黄轲, 李子凡, 施文恺, 毛红敏, 陆焕钧, 樊丽娜, 曹召良. 基于哈特曼探测器的光学传递函数测量方法研究[J]. 中国光学(中英文). doi: 10.37188/CO.2025-0012
引用本文: 张黄轲, 李子凡, 施文恺, 毛红敏, 陆焕钧, 樊丽娜, 曹召良. 基于哈特曼探测器的光学传递函数测量方法研究[J]. 中国光学(中英文). doi: 10.37188/CO.2025-0012
ZHANG Huang-ke, LI Zi-fan, SHI Wen-kai, MAO Hong-min, LU Huan-jun, FAN Li-na, CAO Zhao-liang. Research on optical transfer function measurement based on Hartmann wavefront sensor[J]. Chinese Optics. doi: 10.37188/CO.2025-0012
Citation: ZHANG Huang-ke, LI Zi-fan, SHI Wen-kai, MAO Hong-min, LU Huan-jun, FAN Li-na, CAO Zhao-liang. Research on optical transfer function measurement based on Hartmann wavefront sensor[J]. Chinese Optics. doi: 10.37188/CO.2025-0012

基于哈特曼探测器的光学传递函数测量方法研究

cstr: 32171.14.CO.2025-0012
基金项目: “十四五”江苏省重点学科资助(No. 2021135);吉林省科技厅重点研发项目(No. 20220203033SF);国家自然科学基金青年科学基金项目(No. 22205155);江苏省自然科学基金青年基金项目(No. BK20220640);江苏省高校基础科学(自然科学)研究面上项目(No. 22KJB150011);
详细信息
    作者简介:

    张黄轲(2000—),男,江苏苏州人,硕士研究生,2022年于苏州大学文正学院获得学士学位,主要研究方向为光电检测与仪器。E-mail:2460651048@qq.com

    樊丽娜(1980—),女,山西榆次人,博士,实验师,2020年于上海理工大学获得博士学位,主要从事微纳光学器件方面的研究。E-mail:lnfan@mail.usts.edu.cn

    曹召良(1974—),男,河南济源人,博士,教授,博士生导师,2008年于中国科学院长春光学精密机械与物理研究所获得博士学位,主要从事液晶自适应光学系统的光学设计、光学实验以及理论分析和模拟工作。E-mail:caozl@usts.edu.cn

  • 中图分类号: TP394.1;TH691.9

Research on optical transfer function measurement based on Hartmann wavefront sensor

Funds: Supported by Jiangsu Key Disciplines of the Fourteenth Five-Year Plan (No. 2021135); Key R & D Projects of Jilin Provincial Department of Science and Technology (No. 20220203033SF); National Natural Science Foundation of China (No. 22205155); Natural Science Foundation of Jiangsu Province (No. BK20220640); Natural Science Research of Jiangsu Higher Education Institutions of China (No. 22KJB150011)
More Information
  • 摘要:

    为实现光学传递函数的低成本、实时测量,本文提出基于哈特曼探测器的光学传递函数测量方法。首先,基于哈特曼探测器的测量波面,给出光学传递函数的测量方法。然后,设计传函测量光路,并给出焦深、像差和焦距的测量方法。同时,设计了物镜像差的标定光路,并给出标定方法。最后,搭建实验光路,实现了单透镜的调制传递函数(MTF)、像差、焦距、焦深及色差的测量。结果显示,该方法实现了0~1° 视场透镜的MTF测量;透镜的像散、慧差及球差分别为0.114 λ、0.128 λ和0.02 λ;0°视场下透镜的色差在红、绿、蓝三个波长下分别为0.047 λ、0.055 λ、0.048 λ,1°视场下增长到0.117 λ、0.176 λ和0.154 λ;焦深为0.454 mm,误差2%,焦距为74.6 mm,误差0.8%。结果表明该测量方法能够实现透镜的传函测量,为光学系统传函的低成本、实时测量提供技术途径。

     

  • 图 1  哈特曼探测器工作原理示意图

    Figure 1.  Working principle of Hartmann wavefront sensor

    图 2  传函仪系统光路示意图

    Figure 2.  Schematic diagram of optical layout of the OTF measurement system

    图 3  系统光路的等效光路示意图

    Figure 3.  Equivalent optical path diagram of the system configuration

    图 4  物镜像差标定光路示意图

    Figure 4.  Schematic of the calibration optical path for objective lens aberration

    图 5  传函测量系统实验光路

    Figure 5.  Experimental optical setup for OTF measurement system

    图 6  物镜像差

    Figure 6.  Objective lens aberrations

    图 7  0°视场的透镜像差

    Figure 7.  Lens aberrations at 0° field of view

    图 8  0°视场下透镜的MTF。(a) MTF的三维分布;(b) x方向及(c) y方向的MTF分布

    Figure 8.  MTF of the lens at 0° field of view. (a) 3D MTF; (b) MTF in x direction, and (c) MTF in y direction

    图 9  不同视场的MTF测量结果。(a) x方向,(b) y方向

    Figure 9.  MTF measurement results for different fields of view: (a) in the x direction, and (b) in the y direction

    图 10  不同视场的镜头传函质量

    Figure 10.  MTF performance characterization of the lens under different fields of view

    图 11  焦深测量波面。(a) 原始波面, (b) 离焦波面

    Figure 11.  Defocus-dependent wavefront characterization. (a) Original wavefront and (b) defocus wavefront

    图 12  透镜的像差测量结果。(a) 总像差, (b) 像散, (c) 彗差, (d) 球差

    Figure 12.  Aberration measurement results of the lens. (a) Total aberration, (b) astigmatism, (c) comma, and (d) spherical aberration

    图 13  色差测量结果。(a) 红、绿、蓝波长的色差;(b) 红、蓝偏移绿波长的色差

    Figure 13.  Chromatic aberration measurement results. (a) Chromatic aberration at red, green, and blue wavelengths; (b) Chromatic aberration with red/blue wavelengths shifted relative to the green

    图 14  d2测量误差随焦距变化

    Figure 14.  Variation of d2 measurement error with focal length

    表  1  前8项Zernike表达式

    Table  1.   The first 8 terms of Zernike polynomials

    Zernike序号 描述
    1 倾斜(X方向)
    2 倾斜(Y方向)
    3 离焦
    4 初级像散(X方向)
    5 初级像散(Y方向)
    6 初级彗差(X方向)
    7 初级彗差(Y方向)
    8 初级球差
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  • [1] GOODMAN, JOSEPH W. Introduction to Fourier optics[M]. Roberts and Company publishers, 2005.
    [2] WILLIAMS T L. The optical transfer function of imaging systems[M]. Routledge, 2018.
    [3] 张卓成.基于调制传递函数的消费级镜头在线质量检测与评价[D].西安工业大学,2024.

    ZHANG Z C. Online quality inspection and evaluation of consumer-grade lenses lased on Modulation Transfer Function[D]. Xi’an Technological University, 2024. (in Chinese).
    [4] 曹天皓,张继艳,林正煜,等. 紧凑式长波红外变焦光学系统设计[J]. 红外技术,2025,47(5):553-562.

    CAO T H, ZHANG J Y, LIN Z Y,et al. Design of compact long-wave infrared zoom optical system[J]. Infrared Technology, 2025,47(5):553-562. (in Chinese).
    [5] 马洪涛, 韩冰, 许洪刚,等. 短波中波红外折反射式共口径光学系统设计[J]. 中国光学(中英文), 2025, 18(2): 359-367.

    MA H T, HAN B, XU H G, et al. Design of SWIR/MWIR catadioptric common-aperture optical system[J]. Chinese Optics, 2025, 18(2): 359-367. (in Chinese).
    [6] ROBERTO F S, FRANCISCO J P, LUIS A I. Modulation transfer function formula for different age ranges[J]. Opt. Soc. Am. A 40, 1979-1985 (2023
    [7] Pierre M D. L' intégrale de Fourier et ses applications à l'optique[M] . Imprimeries Oberthur, 1946.
    [8] LINDBERG P. Measurement of contrast transmission characteristics in optical image formation[J]. Optica Acta: International Journal of Optics, 1954, 1(2): 80-89. doi: 10.1080/713818664
    [9] 庄松林, 钱振邦. 光学传递函数[M]. 北京: 机械工业出版社, 1981.

    ZHUANG S L, QIAN B Z. Optical Transfer Function[M]. Beijing: China Machine Press, 1981. (in Chinese).
    [10] 罗敏. 用自相关函数法计算光学传递函数[J]. 云光技术,1996(4):1-13.

    LUO M. Calculation of optical transfer function by autocorrelation function method[J]. Yunguang Jishu, 1996(4): 1-13. (in Chinese).
    [11] MADANIPOUR K, TAVASSOLY M T. Moiré fringes as two-dimensional autocorrelation of transmission function of linear gratings and its application for modulation transfer function measurement[J]. Optics and Lasers in Engineering, 2010, 48(1): 43-47. doi: 10.1016/j.optlaseng.2009.07.008
    [12] 陈燕芹. 基于图像处理的调制传递函数测试方法研究[D]. 长春: 长春理工大学, 2016.

    CHEN Y Q. Research on the modulation transfer function testing method based on image processing[D]. Changchun: Changchun University of Technology, 2016. (in Chinese).
    [13] BATTULA T, GEORGIEV T, GILLE J, et al. Contrast computation methods for interferometric measurement of sensor modulation transfer function[J]. Journal of Electronic Imaging, 2018, 27(1): 013015.
    [14] SAIGA R, TAKEUCHI A, UESUGI K, et al. Method for estimating modulation transfer function from sample images[J]. Micron, 2018, 105: 64-69. doi: 10.1016/j.micron.2017.11.009
    [15] SCHULZE R K W, DOERING C I. Simple computation of the approximated modulation transfer function (MTF) using spreadsheet-software: method and evaluation in five maxillofacial CBCT-devices[J]. Dentomaxillofacial Radiology, 2019, 48(4): 20180350. doi: 10.1259/dmfr.20180350
    [16] SCHENKER M, STAVRIDIS M, SCHULZ M, et al. Effects of misalignments on the modulation transfer function measurement of camera lenses analyzed in optomechanical simulations[J]. Optical Engineering, 2020, 59(3): 034101.
    [17] 朱沁雨, 陈梅蕊, 陆焕钧, 等. 微透镜阵列衍射效应对夏克一哈特曼波前探测器的影响分析[J]. 中国光学(中英文),2023,16(1):94-102. doi: 10.37188/CO.2022-0176

    ZHU Q Y, CHEN M R, LU H J, et al. Analysis of influence of diffraction effect of microlens array on Shack-Hartmann wavefront sensor[J]. Chinese Optics, 2023, 16(1): 94-102. (in Chinese). doi: 10.37188/CO.2022-0176
    [18] 徐雷, 陆欣怡, 李静妮, 等. 基于哈特曼探测器的光波相位三维显示方法[J]. 液晶与显示,2023,38(12):1681-1688. doi: 10.37188/CJLCD.2023-0300

    XU L, LU X Y, LI J N, et al. Three-dimensional display method of optical phase based on Hartmann wavefront sensor[J]. Chinese Journal of Liquid Crystals and Displays, 2023, 38(12): 1681-1688. (in Chinese). doi: 10.37188/CJLCD.2023-0300
    [19] 马卫红. 基于图像分析的光学传递函数测试技术研究[D]. 西安: 中国科学院西安光学精密机械研究所, 2005.

    MA W H. Study of MTF measurement technique based on image analysis[D]. Xi’an: Xi’an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, 2005. (in Chinese).
    [20] 郑克哲. 光学计量[M]. 北京: 原子能出版社, 2002.

    ZHENG K ZH. Optical Metrology[M]. Beijing: Atomic Energy Publishing House, 2002. (in Chinese).
    [21] ROBERT E F. Optical System Design[M]. New York: SPIE, 2000.
    [22] GUO W J, ZHAO L P, CHEN I M. Simulation of the sensing performance of a Shack-Hartmann wavefront sensor related to the lenslet array[J]. Physics Procedia, 2011, 19: 188-191. doi: 10.1016/j.phpro.2011.06.147
    [23] 夏明亮. 高精度人眼像差哈特曼探测器的研制[D]. 长春: 中国科学院研究生院(长春光学精密机械与物理研究所), 2011.

    XIA M L. The development of high precision Hartmann wavefrot detector for eye aberration[D]. Changchun: Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 2011. (in Chinese).
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  • 收稿日期:  2025-01-18
  • 录用日期:  2025-03-28
  • 网络出版日期:  2025-04-19

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